Siiiil"Tivrc

J 1n 114 250 3/8 350 112 450 3/4 5 5 0 1 650 1 1i2 850-2 I I Port Sr" I PT pofts ilodel Bracket Beplacement Element AMG150 BM5'I AMG-EL150 02 1/4 (AMG 1s0) 03 3y8 (AMG 250) 04 1/2 (AMG 350) 06 3/4 (AMG 4s0) 1 o 1 ( A M G 5 5 O ) 14 1 1/2 (AMG 6s0) 20-2(AMGsso) AMG250 BM52 AMG-EL25O AMG35O BM53 AMG-EL35O AMG45O BM54 AMG-EL45O AMG550 BM55 AMG-EL55O AMG65O BM56 AMG-EL65O AMG850 BM57 AMG-EL85O

Series 12-REA Sine rodless cylinder

Rodless cylinder Adjusting screw width across flats Lock nut A tightening torque Model Model Width across flats (mm) Tightening torque (Nm) 12-REA25 12-REA25 5 1.2 12-REA32 12-REA32 5 1.2 4. When used for vertical operation, use caution regarding allowable load.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Adjusting screw width across flats Lock nut A tightening torque Model 12-REA25 12-REA32 12-REA40 12-REA50 12-REA63 Width across flats (mm) 5 5 6 8 8 Model 12-REA25 12-REA32 12-REA40 12-REA50 12-REA63 Tightening torque (Nm) 1.2 1.2 2.1 3.4 3.4 5. Do not scratch or gouge the external surface of the cylinder.

Compact Guide Cylinder End Lock Type SeriesMGP

Models Standard strokes (mm) 32 40 50 63 MGP 25, 50, 75, 100, 125, 150, 175 200, 250, 300, 350, 400 M L Intermediate strokes (in 5mm increments) are produced by installing spacers of 5, 10, 15 and 20mm widths. When a special intermediate stroke body is needed, contact SMC.

FC2W-X110

Turn power off and then on again. 1.6 Over current 500 ms 500 ms 0 1.0 5.0 1.3 1.2 Input signal Voltage [V] Flashing: Two ashing cycles of 250 ms at two-second intervals Error automatically resets when the supply ow rate is recovered (LED goes off). Insufcient supply ow rate Flow rate control Position control (Fully closed) 250 ms 250 ms 2000 ms 1 A

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

After installation, perform a leak test. 5 Process Gas Equipment Common Precautions 2 Be sure to read before handling. Maintenance Export Warning Warning 1. Perform a routine maintenance. Perform a routine maintenance at customers responsibility by taking into consideration the operating conditions of the equipment.

42

(R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ (A) 4 (B) 2 (A) 4 (B) 2 VQ4250 VQ4251 SQ VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VFR VQ7 (A) 4 (B) 2 (A) 4 (B) 2 VQ4351 VQ4350 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4451 VQ4450 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4551 VQ4550 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1

LEC-OM02704CN

515-61 5.1 52 5.1.1 52 5.1.2 53 5.1.3 54 5.2 55 5.2.1 55 5.2.2 56 5.2.3 57 5.2.4 58 5.2.5 59 5.2.6 59 5.3 5-10 5.4 5-12 5.4.1 5-12 5.4.2 5-14 5.4.3 5-26 5.5 5-32 5.5.1 JOG 5-32 5.6 5-34 5.6.1 5-34 5.6.2 DOG 5-36 5.6.3 5-38 5.6.4 5-40 5.6.5 5-41 5.6.6 (ON) 5-43 5.6.7 DOG 5-44 5.6.8 5-46 5.6.9 DOG CRADLE 5-48 5.6.10 DOGZ 5-50 5.6.11 DOG 5

HRX-OM-X084

4.2.4 Cautions for re-start . 4-5 4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List of parameters . 5-6 5.3.1 Main Menu . 5-6 5.3.2 Alarm display menu . 5-6 5.3.3 Notice for maintenance Menu . 5-6 5.3.4 Monitor Menu . 5-7 5.3.5

Fieldbus System

valve (A) (A) 4 (B) 2 (A) 4 (B) 2 Note) A 1 5 (R1) 3 (R2) 1 (P) 3 (R2) 5 (R1) 1 (P) N.C.

V

SEAL ULTRA HIGH SPEED SOLENOID VALVE VQ2000 2.35 5 PORT METAL/RUBBER SEAL ULTRA HIGH SPEED SOLENOID VALVE VQ4000 2.42 5 PORT METAL/RUBBER SEAL BASE MOUNTED PLUG IN TYPE VQ1000 2.46 5/2, 5/3 SPOOL & SLEEVE, ULTRA HIGH SPEED SOLENOID VALVE Courtesy of Steven Engineering, Inc. !

VM

6-8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective

Air Fittings & Tubing

(inch) Model Style 1 8 5 32 3 16 1 4 5 16 3 8 1 2 1 8 5 32 3 16 1 4 5 16 3 8 1 2 1 8 5 32 3 16 1 4 5 16 3 8 1 2 10-32UNF NPT NPT NPT NPT 10-32UNF NPT NPT NPT NPT 3 16 5 32 Hex. socket head male connector Triple universal male elbow 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 Different dia. union "Y" KQ2U KQ2S KQ2VT 1 4 5 16 3 8 1 2 Double branch universal male elbow 10-32UNF NPT NPT NPT NPT NPT NPT NPT

MXQ

5 !6 !7 !8 !

VM

6-8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective

Vacuum Pad

Acid resistance > > > > > /5 /5 Tear resistance > > > > > /> /> Flex crack resistance Maximum operation temperature nC Minimum operation temperature nC 120 60 250 100 200 200 0 0 0 0 30 10 104 or less 104 or less Volume resistivity (7cm) > 5 > > > > > > > Heat aging > > > > > > > > > > Weather resistance 5 > > > > 5 > > > > Ozone resistance Gas permeability resistance > > /5 /5 /5 /5 > >

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

C85

5 !6 !

KJ

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !