Speed Controller with

Body size 100 200 205 300 400 Metric size Inch size M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 02 23 04 06 08 10 12 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)

PFxx-OMO0004CN

7 0.4 V () 30 msec. 8 9 L/mincfm 10 3 Lft -10210 L/min(-11 L/min [ 0]) 0999,999,999 L 1 L/min 1 L LED 3 7 ON (OUT1:OUT2 IP40 AC1000 V 1 50 M (DC500 V ) 050 -1060 () 3585RH() CE(EMC ROHS )ULCSA Rc1/4NPT1/4G1/48 FKMSUS304PPSPBT ()HNBRSiAuGE4F Rc1/4 NPT1/4 70 g 85 g G1/4 115 g 130 g 8 50 g 65 g +45 g +35 g +20 g +15 g DIN +65 g -66No.PF-OMO0004CN-E 1 () 2()10024

rail type, DUST SEAL BAND, ELECTRIC ACTUATOR, 130 lb

Auto switch mounting grooves have replaced the NCQ2's mounting rails, preventing projection of auto switches and improving ease and safety of work.Compact, double acting, single rod, large bore , Bore size (mm): 125,  140, 160 , Standard stroke (mm): 10 through 300 , Through hole mount, Auto switch capable, Compact Cylinder, NCQ2-Z, COMPACT CYLINDER, 130 lb

1.63

Max. speed Coefficient Up to 300 mm/s 1.7 Up to 400 mm/s 1 Up to 500 mm/s 0.6 502 Model Selection MGPW Series L L m m Slide bearing Vertical Mounting Operating pressure 0.5 MPa MGPWM20 to 63 (1) 50 stroke or less, V = 200 mm/s or less (2) Over 50 stroke, V = 200 mm/s or less 100 100 63 63 50 50 40 40 32 32 10 10 25 25 Load mass m (kg) Load mass m (kg) 20 20 1 1 MGJ JMGP MGP 0.1 0.1 10 100

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

JIS Symbol How to Order 1 F 06 3 200 AS Flow Direction Symbols on Body JIS Symbol Body size Panel mount type Symbol M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.

Speed Controller with One-touch Fittings Series AS In-line Type 1

M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.

HAA

(mm) Voltage(V) 10% 15 2200 300 Single100 55/65 37 5700 350 X 2 3-phase200 132/170 X 2 1.44/1.4 11/2B union 55 22 3300 400 3-phase200 90/130 0.4/0.45 B union 36 Single200 38/46 3-phase200 50/60 Cooling fan (50/60Hz) Power consumption (W) Current (A) 0.46/0.52 0.23/0.26 Rp(PS) Socket 18 0.8/0.9 0.4/0.35 1B union 24 11 2 Port size Weight (kg) 3 4 Compact size and light weight Note 1) Based

MIW/MIS

MIS12-10D 20 160 5 3 MIS12-20D 30 190 MIS12-30D MIS 10 300 MIS20-10D 20 355 15 5 MIS20-20D 30 410 MIS20-30D 6 Series MIW/MIS Construction Option Double finger type/MIW With scraper With stroke adjuster Single finger type/MIS Description Material Note Parts list: Standard Description Material Note Parts list: Option/With stroke adjuster No.

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body ported 80 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 130 (Without subplate 80) N.C. Base mounted (with sub-plate) SYJA724-01 SYJA724-02 N.O.

Escapements Series MIW/MIS

MIS12-10D 20 160 5 3 MIS12-20D 30 190 MIS12-30D MIS 10 300 MIS20-10D 20 355 15 5 MIS20-20D 30 410 MIS20-30D 6 Series MIW/MIS Construction Option Double finger type/MIW With scraper With stroke adjuster Single finger type/MIS Description Material Note Parts list: Standard Description Material Note Parts list: Option/With stroke adjuster No.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Inch sizes 1/4", 5/16" 3/16" 5/32" 3/16", 1/4" 1/8", 5/32", 3/16", 1/4" l/min (ANR) {Nl/min} Flow rate 12 38 7 Controlled flow Effective area mm 0.2 0.6 0.1 l/min (ANR) {Nl/min} Flow rate 460 100 290 130 230 Free flow Effective area mm 7 1.5 4.5 2 3.5 Note) Flow rates are values measured with pressure at 0.5MPa and temperature at 20C.

EX500-GPR1A.eng

L3 [mm] 67 88 109 130 151 172 193 214 L2 [mm] 72 93 114 135 156 177 198 219 L1 [mm] 83 104 125 146 167 188 209 230 M3 18 : 2 pcs. ( Hexagon socket head cap screw ( with spring washer )) Note NOTE Holding with hand so that there will be no gap between units and tighten the bolts.

Piston Material: Aluminum, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15～13.5, Tube Material: Stainless Steel, Piston Speed(mm/sec): 8～300, Piston Packing Material: NBR, Stroke(mm): 130, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10～80, Support Type: [Rod Side Flange] Rod-Side Rectangular-Flanged Type, Standard: JIS

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15～18, Tube Material: Steel, Piston Speed(mm/sec): 8～300, Piston Packing Material: NBR, Stroke(mm): 130, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10～80, Support Type: [Head Side Flange] Head-Side Rectangular-Flanged Type, Standard: JIS Specifications

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15～14, Tube Material: Stainless Steel, Piston Speed(mm/sec): 8～300, Piston Packing Material: NBR, Stroke(mm): 130, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10～80, Support Type: [Rod Side Flange] Rod-Side Rectangular-Flanged Type, Standard

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15～12, Tube Material: Stainless Steel, Piston Speed(mm/sec): 8～300, Piston Packing Material: NBR, Stroke(mm): 130, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10～60, Support Type: [Rod Side Flange] Rod-Side Square-Flanged Type, Standard: ISO

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15～12, Tube Material: Stainless Steel, Piston Speed(mm/sec): 8～300, Piston Packing Material: NBR, Stroke(mm): 130, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10～60, Support Type: [Rod Side Flange] Rod-Side Square-Flanged Type, Standard: ISO

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

Light/Surge voltage suppressor Y Note) DIN terminal YO Note) DIN terminal (Without connector) IP Nil None Z With light/surge voltage suppressor S Note) With surge voltage suppressor Note) Conforming to DIN 43650, Form B IW Note) Available for grommet type only. 1301 Specifications AW Symbol Single solenoid Fluid Air Valve type Normally closed IL1 (3) (A) 2 Max. operating pressure 0.9 MPa (130

฀AS

Bodysize Metricsize Inchsize 100 200 205 300 400 M3,M5standard 1/8standard 1/4standard 3/8standard 1/2standard Grease-free(Sealant:Fluorocoated)+ Restrictor(WithoutCheckValve) -X21 02 23 04 06 08 10 12 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)AS2002F-04-X21 Note)Notparticle-free 4 6 8 10 12 Withone-touchfittings Restrictor(WithoutCheckValve) -X214 Use1/8"tube.