SMC Pneumatic Clean Series

When replacing the rod seal, take care that the snap ring does not spring out while you are removing it. 175 Actuator / Common Precautions 1 Be sure to read before handling. Refer to the main text for precautions for each series. Precaution on designing Selection Warning Warning 1.

SMC

2-M8 x 1.25 thread depth 15 40.5 M 0.5 58.5 62 Z ZZ G H (NN1) x H 16 34 16 34 A B 11 12 6.6 12 38 2 7 A B NN-M8 x 1.25 thread depth 16 6H9 depth 6 +0.030 0 6H9 depth 6 +0.030 0 GA HA Section AA Section BB (mm) Model ZZ 133.5 133.5 133.5 143.5 156.5 197.5 238.5 296.5 336.5 M 92 92 92 102 115 156 197 255 295 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 K 35 45 55 65 75 100 125 150 175

MLU

Piston rod Standard stroke (mm) Locking direction Bore size (mm) Series 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 LOCK LOCK Load direction Fulcrum FREE 25 Extension lock 32 MLU Pivot 40 Retraction lock Clearance 50 9-13-2 9-13-3 3 Series MLU Specific Product Precautions 1 Be sure to read before handling. Selection Selection Warning Allowable Load Weight 1.

MXF

0 92 DNN-4.2 26 11.5 NN-8 -X 208.5 H 2-M5 x 0.8 thread depth 12 Data 5.5 NN-M5 x 0.8 NN 2 ( 1) x H 13 G Section AA A M 12 Operating port 2-M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number of pitches 27 7 12 J 3 Z Max. 9.5 ZZ H G 33.5 (mm) 6 Z M J NN H G N ZZ Model 5H9 +0.030 0 depth 5 MXF20-30 91 91 57 4 30 29 4 104 MXF20-50 113 113 77 4 45 36 4 126 MXF20-75 162 162 125 6 45 40 6 175

25

175 Potential amplitude (V) Potential amplitude (V) 150 150 125 125 0.1 Hz 100 100 75 75 50 50 30 Hz 0.1 Hz 30 Hz 25 25 0 0 0 500 1,000 1,500 2,000 0 500 1,000 1,500 2,000 Installation distance (mm) Installation distance (mm) 422 Technical Data IZS40/41/42 Series r Flow Rate Pressure Characteristics IZS IZS With high speed de-ionizing cartridge With energy saving type de-ionizing cartridge

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

CJ2Q

Low Friction: Double Acting Single Rod Series CJ2Q 10, 16 How to Order Bore size 10 16 10mm 16mm Mounting Basic Axial foot Front flange Double clevis Standard stroke (mm) B L F D 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 CJ2Q L 16 60 Standard L 16 60 C73 CDJ2Q With auto switch Number of switches With auto switch (Built-in magnet) 2 1 n S n Auto switch

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Without motor brake Without motor brake With motor brake With motor brake Without motor brake 50 Direct acting guide Series LXF 0.03 Ball screw 3 100 50 Series LXP 6 Ball bushing guide 100 Ball screw 0.03 50 5 100 Series LXS 50 10 High rigidity direct acting guide 100 Ball screw 0.03 50 5 100 5 Simplified Selection Flow Chart Series LX Standard stroke (mm) and 25 50 75 100 125 150 175

Microspeed Cylinder: Double Acting/Single Rod Series CJ2X ø 10, ø 16 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

How to Order Bore size 10 16 10mm 16mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes other than the above are produced upon receipt of order.

Plate Cylinder with Lock Series MLU

Foot type Flange type Knuckle joint Clevis type Flexible mounting: Possible to mount on all surfaces except for the one with ports Bottom mounting type Side mounting type Axial surface mounting Series Variations Standard stroke (mm) Locking direction Bore size (mm) Series 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Extension lock 32 MLU 40 Retraction lock 50 Features 2

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

One-touch Fittings/Stainless Steel Series AS-FG P. 20 One-touch Fittings/Stainless Steel Series KG P. 21 Miniature Fittings MS P. 25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Dual Type Flow rate and effective area Model ASD230FM-M5 ASD330FM-01 ASD430FM-02 8, 10 6 6, 8 Metric sizes 4, 6 Inch sizes Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/4", 5/16" 3/8" 3/16", 1/4" l/min (ANR) {Nl/min} 7 12 38 Flow rate Controlled flow Effective area mm 0.1 0.6 0.2 Free flow l/min (ANR) {Nl/min} Flow rate 175 350 295 75 Effective area mm 4.5 1.1 5.3 2.7 Note) Flow rates are values

End Lock Cylinder Series CBJ2

Information End Lock Cylinder Series CBJ2 / 16 Cylinder stroke (mm) 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes are available in 1 mm increments without stroke adjustment with a spacer. For types with auto switch, refer to Minimum Strokes for Auto Switch Mounting on page 2.

Single Axis Electric Actuator Series LJ1

Without motor brake Without motor brake With motor brake With motor brake Without motor brake 50 Direct acting guide Series LXF 0.03 Ball screw 3 100 50 Series LXP 6 Ball bushing guide 100 Ball screw 0.03 50 5 100 Series LXS 50 10 High rigidity direct acting guide 100 Ball screw 0.03 50 5 100 5 Simplified Selection Flow Chart Series LX Standard stroke (mm) and 25 50 75 100 125 150 175

MXS Series Air Slide Table

70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA NA 2 2 2 2 2 2 4 4 4 M 92 92 92 102 115 156 197 255 295 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35 45 55 65 75 100 125 150 175

Refrigerated Air dryer Series IDU/IDF

C H G F E D B A Port size Model J K 959 317 289 363 157 152 910 260 R 3/4 IDU11C/11D 571 580 30 70 1009 337 309 383 207 175 960 280 R 1 IDU15C : Power source 220 to 240VAC 7

Series LX Acceleration Time Guide

L X P Table displacement (m) Table displacement (m) LXPB-200 LXPB-200 1500 1500 LXPB-175 LXPB-175 1000 1000 LXPB-150 LXPB-150 LXPB-125 LXPB-125 LXPB-100 LXPB-100 500 500 LXPB-75 LXPB-75 LXPB-50 LXPB-50 0 Weight (kg) 0 Weight (kg) 1 2 3 4 5 6 1 2 3 4 5 6 Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.

Thomas Oil-less Articulating Piston Compressor Flow Rate: 4.3 CFM / 121.7 LPM , 4.3 CFM / 121.7 LPM, Max Pressure: 175 PSI / 12.0 bar , 175 PSI / 12.0 bar, Horsepower (60 Hz): .5, Net Weight: 51 lbs. / 23.1 Kg Internal Code: G0268317. Billing Code: 3HCA6.

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Bore size/Stroke (mm) 10 25, 50, 75, 100 Cushion (Option) 15 25, 50, 75, 100, 125, 150, 175, 200 With adjusting bolt (2 pcs.) Nil 25 25, 50, 75, 100, 125, 150, 175, 200 B With shock absorber (2 pcs.) For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.)

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.