3 Port Solenoid Valve/

0.25 to 0.7 MPa (Same as operating pressure) Maximum operating frequency 30 times/minute Minimum operating frequency 1 time/week Operating and ambient temperature 14 to 122F [10 to 50C] (No freezing) Ambient humidity 20 to 90%RH (No condensation) Manual override None Pilot exhaust Individual exhaust Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance 150

VCL

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C E A (U) VX3 D G C B VXA L1 L2 L3 16 VN LVC D side U side Stations 1 2 3 4 5 n LVA LVH LVD LVQ 21 5.5 16 OUT port n-1/4 n-1/8 : Thread type LQ H H P = J (Pitch) 2 LVN L Dimension (mm) TI/ TIL n (stations) Model Dimensions 3 5 6 7 8 9 10 2 4 PA L1 103.5 138 172.5 207 241.5 276 310.5 345 69 VV2CL2 L2 115.5 150

VCS

184.5 219 253.5 288 322.5 357 PB L3 93 127.5 162 196.5 231 265.5 300 334.5 369 L1 77 115.5 154 192.5 231 269.5 308 346.5 385 VV2CS3 L2 89 127.5 166 204.5 243 281.5 320 358.5 397 L3 101 139.5 178 216.5 255 293.5 332 370.5 409 L1 83 124.5 166 207.5 249 290.5 332 373.5 415 VV2CS4 L2 95 136.5 178 219.5 261 302.5 344 385.5 427 L3 107 148.5 190 231.5 273 314.5 356 397.5 439 Manifold composition

VNC

Solenoid Model Port size Flow characteristics Weight (kg) Air operated External pilot Solenoid Orifice size (mm) Model Threaded Note) Flange Av x 10-6 m2 VNC1-6A VNC1-8A VNC1-10A VNC24-10A VNC2-10A VNC24-15A VNC2-15A VNC34-20A VNC3-20A VNC44-25A VNC4-25A VNC54-32A VNC5-32A VNC54-32F VNC5-32F VNC64-40A VNC6-40A VNC64-40F VNC6-40F VNC74-50A VNC7-50A VNC74-50F VNC7-50F 1 8 1 4 30 32 36 95

Vacuum System Peripherals:

Voltage type 0 to 5 VDC Voltage type 0 to 10 VDC Preset input 20 Output pressure (kPa) Nil B Without bracket Flat bracket L-bracket 30 40 C Option 50 Monitor output Thread type Port size Option 60 2 1/4 0 Without (In the case of preset input) Analog output 1 to 5 VDC Switch output/NPN output Switch output/PNP output Analog output 4 to 20 mA DC 70 Nil Rc NPT NPTF G 1 80 N 2 T 90 3 50 100 150

Series VCS

Seal material PTFE (FKM) Ambient temperature 20 to 100C (-4 to 212F) 184C (363F) or less (PTFE), 120C (248F) or less (FKM) Note 1) Fluid temperature Enclosure Dust proof, Splash proof (equivalent to IP65) Environment Location without corrosive or explosive gases Valve leakage cm/ min 300 (PTFE), 0.1 (FKM) with air Mounting orientation Unrestricted Vibration/Impact resistance m/s Note 2) 30/150

lPSMt

Steel) Pressure Gauge For OUT 1, OUT 2 pressure range 0-150 psi, 1/8 NPT G43-P10-N01 or KSlOB-AD11 (St.

lPSMt

Steel) Pressure Gauge For OUT 1, OUT 2 pressure range 0-150 psi, 1/8 NPT G43-P10-N01 or KSlOB-AD11 (St.

NVEPA|VEFseies

N272 ElectroPneu matic Valve NVEPA|VEFseies Output Pressure or Flow is Controlled By An Electrical Input Signal Amplifier Supply Voltage is 1 1SVAC or 24yDC Operating Pressure Up To 150 psig 114" lo 314" Port Sizes Base Mount or Body Ported Built-ln PID Controller is Optional NVE NVEP The conventional pneumatic valve syslem consists of ON-OFF valves which are in a deenergized or energized

Mounting: D (Double Clevis), Bore Size: 63mm, Thread: Rc, Full Stroke: 150mm, First Stroke: 80mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Mounting: Double Clevis, Bore Size: 63mm, Thread: Rc, Full Stroke: 150mm, First Stroke: 80mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

BP1000

Please contact SMC. 95 Process Gas Equipment / Regulator Specific Product Precautions Be sure to read before handling. Refer to back cover for Safety Instructions and P. 145 and 146 and the Operation Manual for common precautions. Operation manual is available from the SMC web site. http://www.smcworld.com Selection Warning Maintenance Warning 1. Confirm the specifications.

BP1000

Please contact SMC. 95 Process Gas Equipment / Back Pressure Regulator Specific Product Precautions AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Be sure to read before handling.

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Center of F.R.L. body A D Silencer Compact resin type High noise reduction type B B A A Dimensions [mm] Model Port size R Dimensions [mm] A B AN302-03 3/8 84 28 AN402-04 1/2 95 34 Model Port size R A B AN30-03 3/8 58.5 20 AN40-04 1/2 68 24 3 Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve VP500/700 Series Dimensions VP517 Surge voltage suppressor (for D YS, D YZ) Manual

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Size Single vane Double vane Adjustment range of adjustment bolt (B) 90 145 150 1 25 Adjustment range of adjustment bolt (A) (S): 10 (D): 5 180 140 90 230 240 90 (S): 10 (D): 5 3 30 180 225 90 360 375 7 50 180 355 90 510 580 20 60 22.5 180 505 Allowable Load Positioning pin hole Do not permit the load and moment applied to the table to exceed the allowable values shown in the table below

CE2

CE2 ML2B Center trunnion style Z + 1/2 stroke C J G5-S CV MVGQ CC RB Rod side flange, Head side flange Rod side flange Single clevis, Double clevis Double clevis Center trunnion Bore size (mm) 40 50 63 80 100 J CD H10 Z TZ TX CZ BB Z B FX U FD FV RR FZ FT CX L TDe8 FY 224.5 117 15 10 15 85 29.5 299.5 71 80 16 9 60 10 100 12 30 42 76.5 + 0.058 0 + 0.3 + 0.1 0.032 0.059 D248.5 127 18 12 15 95

Soft Start-up Valve

tank New New 20 9.2 4 AV2000-A Current model 30 13.1 7.4 Up to 50% shorter 40 19.2 12.2 50 (Port size 3/4) 34.8 22.6 AV2000-A New New Fill time 50 (Port size 1") 41.3 24.4 Current model For 1(P) R 2(A) Improved adjustability at low speed air supply Needle Valve Flow Rate Characteristics Inlet pressure: 0.5 MPa 400 Air flow rate [L/min (ANR)] 350 Current model 300 250 200 New New AV2000-A 150

AR20-B to AR60-B

/8 1/8 53 85.6 30.7 29.4 M38 x 1.5 29.4 3.5 28 30.4 27.8 40.9 37.5 65.9 37.5 66.9 AR40(K)-B 1/4, 3/8, 1/2 1/8 70 91.7 35.8 33.8 M42 x 1.5 33.8 3.5 28 34.8 27.8 45.3 42.5 71.3 42.5 71.3 AR40(K)-06-B 3/4 1/8 75 93.2 35.8 33.8 M42 x 1.5 33.8 3 28 34.8 27.8 45.3 42.5 71.3 42.5 71.3 AR50(K)-B 3/4, 1 1/8 90 125.2 43 43.3 M62 x 1.5 43.3 3.2 28 44.3 27.8 54.8 42.5 80.8 42.5 80.8 AR60(K)-B 1 1/8 95

Exhaust Cleaner for Vacuum Pump AMV Series

Size (Applicable vacuum pump) 100 (4B) JIS 10K FF flange Symbol Max. exhaust speed (L/min) 3 6 15 37 75 160 360 650 1,500 3,700 7,500 16,000 Specifications Oil mist removal Filtration Maximum operating temperature 99.5% or more 0.3 m (Trapping efficiency: 95%) 80C Model Model Connection R Max. air flow (L/min [ANR]) Applicable vacuum pump Max. exhaust speed (L/min) Weight (kg) Oil accumulation