Series MXP Precision Air Slide Table

Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L=120mm L=120mm L=120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100

AC Servo Motor Driver (CC-Link Type)

600 300 150 1000 500 250 800 400 200 Different from the initial value. *5.

IDX-OM-Z004

70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L) (mg/L) 1.0 0.1 1.0 (mg/L) 0.3 0.3 0.3 (mg/L) 4.0 4.0 4.0 6.07.0 1 2 JIS K 0101 2 a b c 4.2 IDF100150F-W 4 2 IDX-OM-Z004 4 (3) 1 Y Y , Y Y (4) 3 2 (5) 1( 2 3 4 a) 1. 1.5 2. 4.2 IDF100150F-W 4 3 IDX-OM-Z004 4 3. 4. 5.

VDW

87.5 105 122.5 140 157.5 175 L2 45 62.5 80 97.5 115 132.5 150 167.5 185 L3 52 69.5 87 104.5 122 139.5 157 174.5 192 2 stns. x 1 Manifold composition 3 stns. x 1 2 stns. x 2 2stns. + 3stns. 3 stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 Note) Manifold base is consisted of the junction of 2 and 3 station bases.

Compact Cylinder with Solenoid Valve/

-100 135 x 135L M8 x 60L 60 15 CVQM405 45 M5 x 45L x 65L 65 20 10 50 x 50L x 70L 70 25 15 55 x 55L x 75L 75 30 20 60 x 60L x 80L 80 35 25 65 14.5 x 65L x 85L 85 40 30 70 x 70L x 90L 90 7.5 45 35 75 x 75L x 95L 95 50 40 80 x 80L x 100L 100 75 45 85 x 85L x 125L 125 -100 50 90 x 90L x 150L 150 75 115 x 115L -100 140 x 140L Plate Non-rotating Accuracy Plate Allowable Rotational Torque Non-rotating

CXS

The maximum piston speed for retraction is approximately 70% that of extension. MY Standard Stroke CY (mm) MG Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 CX 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 D10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available as a special order.

CXS

The maximum piston speed for retraction is approximately 70% that of extension.

Compact Type

The maximum piston speed for retraction is approximately 70% that of extension. Standard Stroke (mm) Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available as a special order.

Compact Type Dual-Rod Cylinder Series CXSJ

The maximum piston speed for retraction is approximately 70% that of extension. Standard Stroke (mm) Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available as a special order.

Refrigerated Air dryer Series IDU/IDF

C H G F E D B A Port size Model J K 959 317 289 363 157 152 910 260 R 3/4 IDU11C/11D 571 580 30 70 1009 337 309 383 207 175 960 280 R 1 IDU15C : Power source 220 to 240VAC 7

Pneumatic Positioner IP300/IP3100

psi 0.25 SCFIVI @ 20 Dsi 0.7 SCFM @ 70 DSi Supply Pressure Variation Effect (Max.)

VCL

107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class H 17-2-35 8 Series VCL How to Order Manifold How to Order Manifold Assembly VV2C L 2 02 01 Enter the mounting valve and option part numbers under the

Vacuum Equipment

-70 kPa -60 kPa -50 kPa -40 kPa -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa Lifting force (N) Lifting force (N) How to read the graph Example: Workpiece weight 1 kg (Lifting force: 9.8 N) : Conditions/Number of pads: 5 pcs.

ZPT/ZPX

-75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions: Desired number of pads 5 pcs.

Sine Cylinder Series REC

Up to 700 25 150 Up to 700 1500 32 150 Up to 1000 40 200 Up to 1000 Note 1) The cylinder performance may not as expected when stroke is longer than recommended stroke even they are available.

Sine Cylinder Series REC

Up to 700 25 150 Up to 700 1500 32 150 Up to 1000 40 200 Up to 1000 Note 1) The cylinder performance may not as expected when stroke is longer than recommended stroke even they are available.

Possible to transfer a workpiece at low-speed.

150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Construction CRB2 CRB1 MSU CRJ CRA1 o i @5 @6 t y !

3 Port Solenoid Valve Metal Seal Series VZ200 1

) 300 (Lead wire length) 76 68.5 2-M5 x 0.8 (Pilot EXH) Stations n: Stations Formula L1 = 16n + 11 L2 = 16n + 22 2 43 54 3 59 70 4 75 86 5 91 102 6 107 118 7 123 134 8 139 150 9 155 166 10 171 182 Symbol L1 L2 4-15-8 9 3 Port Solenoid Valve Metal Seal, Body Ported/Base Mounted Series VZ200 Dimensions: Common Exhaust Individual: VV3Z2-50 (G) (L) (M) (D) With light/surge voltage suppressor

IDX-OM-M051

or less 70 or less Calcium hardness (mgCaCO3/L) 150 or less 50 or less 50 or less Ionic state silica (mgSiO2/L) 50 or less 30 or less 30 or less Iron (mg/L) 1.0 or less 0.3 or less 1.0 or less Copper (mg/L) 0.3 or less 0.1 or less 1.0 or less Reference items Sulfide ions (mg/L) Shall not be detected.

3

screen) Line name Expanded flow range Compact, Space saving Wide range of flow measurement with one product Compared with the current PF2A, Flow ratio 78 % reduction Weight 74% reduction 100:1 Mounting space 1100 g a 240 g Compared with PFMC7202-06 and PF2A703H-10 Rated flow ratio is 10 : 1 for current PF2A. 2000 L type 55 Applicable flow range [L/min] PFMC7202 New 1 2 5 10 20 25 50 100 150