Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

as duty ratio 50% Duty ratio: 50% 15000 15000 Duty ratio: 50% Duty ratio: 25% 10 10 Duty ratio: 100% 5000 5000 Duty ratio: 100% Duty ratio: 75% Duty ratio: 75% 0 0 0 10 20 30 0 10 20 30 40 Work load [kg] Work load [kg] LEJS40B LEJS63B 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] The value of 50% or less is the same as duty ratio 50% Duty ratio: 50% 15000 15000

Thermo-chiller

) Ambient temperature 104F (40C) 10 10 8 8 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 6 6 4 4 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-W -20/40(50 Hz) HRS150-W -20/40(60 Hz) 20 20 Facility water temperature 90F (32C)

RHC

Energy Absorption Maximum energy absorption (J) 20 25 32 40 50 63 80 100 Bore size (mm) 7 12 21 33 47 84 127 196 10-6-5 5 High Power Cylinder Series RHC 20, 25, 32, 40, 50, 63, 80, 100 How to Order RHC 20 H7BW B Number of auto switches Mounting style Nil S n 2 pcs. 1 pc. n pcs.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

70 48 17 50 40 Up to 1200 3/4 1 +0.100 0 0.1 0.3 0.1 0.3 M20 x 1.5 M45 x 1.5 63 18.5 20 39 60 46 44 226 90 182 25 50 115 74 48 17 Lube Non-lube 50 40 Up to 1200 +0.100 0 M24 x 1.5 M56 x 2 110 71 67 23 25 56 49 55 277 225 30 60 140 86 60 20 63 50 Up to 1200 +0.120 0 0.1 0.3 M30 x 1.5 130 M64 x 2 1 80 76 23 30 65 49 68 330 270 37 70 140 96 60 20 80 63 Up to 1200 With Auto Switch: 125 to 200

SMC Pneumatic Clean Series

8 6 KA 1 2 23 0<23> 0 0 40 32 25 20 30 22 22 18 10 0 0 0 27 27 32 38 20 20 30 32 2 2 14<12> 14<12> 58 58 218 218 80 40 37 32 50 25 40 3 20<17> 71 13 89 M10 x 1.5 depth 22 10 22 M22 x 1.5 80 3/8 10 122 10 20 264 100 40 37 41 60 30 50 3 20<17> 71 16 110 M12 x 1.75 depth 22 10 26 M26 x 1.5 100 1/2 10 122 10 20 264 50 35 32 63 35 32 11 11 58 72 10 10 23 20 M18 x 1.5 M18 x 1.5 55 69 1/4 1/4 10

Modular F.R.L. Units

33.8 3 50 80.2 40 9 18 5 48 AC50-B 3/4, 1 1/8 282.4 220.1 41.2 93.1 110 43.3 3.2 70 96.2 50 11 20 6 60 AC55-B 1 1/8 292.4 234.1 44.7 98.1 110 43.3 3.2 70 96.2 50 11 20 6 60 AC60-B 1 1/8 297.4 234.1 44.7 98.1 110 43.3 3.2 70 101.2 50 11 20 6 60 Optional specifications Semi-standard specifications Metal bowl with level gauge With drain guide Metal bowl with drain guide With barb fitting

CG5-S

10 M10 x 1.25 24 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 35.5 1/8 to 300 40 10 M14 x 1.5 24 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 44 1/8 to 500 50 14 M18 x 1.5 40 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 55 1/4 to 600 63 14 M18 x 1.5 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 69 1/4 to 600 80 22 M22 x 1.5 60 40 37 32 50 75 25 28 20

Series IDG

0.7MPa 20 20 30 30 40 40 50 50 600 0 200 400 800 0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG60H IDG75H 0 P1 = 0.3MPa P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa P1 = 0.7MPa 20 20 P1 = 0.7MPa 30 30 40 40 50 0 200 400 600 800 50 0 200 400 600 1000 800 Outlet

ISO Standard Hydraulic Cylinder

11 57 248 30 18 53 33 1/2 191 67 +0.052 0 63 50 29 25 to 800 90 64.3 M27 x 2 80 12 M12 x 1.25 20 13 36 36 30 32 32 136 39 13 55 265 30 17 68 33 1/2 200 71 80 60 34 25 to 800 115 82.7 M33 x 2 93 15 M16 x 1.5 28 9 45 45 41 39 41 159 46 17 66 308 40 20 76 40 3/4 229 77 168 +0.062 0 100 72 50 130 96.9 M42 x 2 101 15 M16 x 1.5 25 to 1000 36 10 56 56 50 54 52 47 19 67 363 50 20 91 40 3/4 257 82

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

A B C D E EE F G H J K Applicable size Y200T-D 3.2 67 29 51 24 33 11.5 5.5 15.5 3.5 30 JSXM20 Y300T-D 4.2 85 42.5 67.5 35 14 7 20 6 41 JSXM30 Y400T-D 5.2 115 50 85.5 40 55 18 9 26 7 50 JSXM40 45 JSX10, 20, 30 Series Table of UL-compliant Products * Refer to the table below for UL-compliant products.

CQM

Mounting Bolt for CQM/Without Auto Switch Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt CQMB12-5 -10 -15 -20 -25 -30 CQMB16-5 -10 -15 -20 -25 -30 CQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB32-5 -10 -15 -20 -25

AC

Coef. for compensation 20 10 0 10 30 40 50 60 Air temp.

CG1

TB C-12 type for pivot TT TR Td TE TF TH C-14 type for pivot (29.3) (33.1) (40.4) (49.2) (60.4) (74.6) 28-01 3.2 3.2 4.5 4.5 6 8 11 12 13 15 17 21 24 26 36 50 36 43 50 58 70 82 73 90 8 10 12 14 16 18 18 22 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 11 13.5 25 30 35 40 50 60 55 65 CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A 20 25 32 40 50 63 80 100

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Mounting same side MGC D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 50+45(n2) 50 15 10 15+45( n2 ) (n=2, 4, 6) MGF 2 60+45(n2) 60 15 10 CY1 15+50( n2 ) (n=2, 4, 6) MY1 2 65 15 10 65+50(n2) 20+50( n2 ) (n=2, 4, 6) 2 65 20 D-H7LF 10 15+50( n2 ) (n=2, 4, 6) 2 D-B5/B6 D-G5NTL 10 75 15 75+55(n2) 20+50( n2 ) (n=2, 4, 6) 2 15 75 20 D-B59W D-A3A D-G39A D-K39A D-A44A 10 100+100(n2) 35+30

HRX-OM-M090

HRS 10 A 012 Cooling capacity Option 012 1100W/1300W (50/60Hz) Null None 1500W/1700W(50/60Hz)(1) 018 1700W/1900W (50/60Hz)(2) B Earth leakage breaker 024 2100W/2400W (50/60Hz)(3) G High temperature type(4) 1 Power supply-10(100V Type) 2 Power supply-20(200V Type) 3 Power supplyOnly -20(200V Type)can be chosen.

C76

(mm) Item h 1 to 50 77 88 AM C e f K KK Stroke Bore 51 to 100 101 to 150 102 113 151 to 200 115 126 201 to 300 140 151 301 to 400 165 176 401 to 500 190 201 32 40 90 101 12 14 35 46 30 35 10 12 M10 x 1.5 M12 x 1.75 20 24 Item I Wh Bore Stroke 1 to 50 12.5 12.5 51 to 100 25 25 101 to 150 37.5 37.5 151 to 200 50 50 201 to 300 75 75 301 to 400 100 100 401 to 500 125 125 1 to 50 57 64 51 to

C76

Boot (mm) Item h 1 to 50 77 88 AM C e f K KK Stroke Bore 51 to 100 101 to 150 102 113 151 to 200 115 126 201 to 300 140 151 301 to 400 165 176 401 to 500 190 201 32 40 90 101 12 14 35 46 30 35 10 12 M10 x 1.5 M12 x 1.75 20 24 Item I Wh Bore Stroke 1 to 50 12.5 12.5 51 to 100 25 25 101 to 150 37.5 37.5 151 to 200 50 50 201 to 300 75 75 301 to 400 100 100 401 to 500 125 125 1 to 50 57 64 51

Environment

Level Range> Without Load 800 Lead 4: LEY32C Model Pushing speed [mm/s] Pushing force (Setting input value) Model Pushing speed [mm/s] Pushing force (Setting input value) 700 Lead 8: LEY32B 1 to 4 20% to 65% 1 to 4 40% to 95% 600 LEY25 LEY25A 5 to 20 35% to 65% 5 to 20 60% to 95% Lead 16: LEY32A 500 21 to 35 50% to 65% 21 to 35 80% to 95% Force [N] 1 to 4 20% to 85% 400 LEY32 5 to 20 35%