PF2D

How to Order Dimensions LQ1 fitting size: 3 1S PF2D504 S 11 (186) 70 58 1 27.5 9.53 With LQ1 fitting Size OUT side 3 4 (With reducer) 3 4 (With reducer) IN side 3 3 4 (With reducer) 4 (With reducer) Model 11 1113 1311 13 LQ1 fitting size: 4 58 1 33 9.53 LQ1 fitting size: 4 13 1S PF2D520 S (186) 70 58 1 33 With LQ1 fitting 12.7 Size OUT side 4 5 (With reducer) 4 5 (With reducer) Model 13

Guide Table Series MGF ø40, ø63, ø100 1

MGF40 MGF40 20MGF40 MGF40 10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

DIN terminal: VKF334-D-01 Base mounted Grommet: VKF334-G-01 33.5 16.7 26 4 Manual override (Non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 MAX.10 2-4.3 (Mounting hole) Applicable cable O.D. 4 to 6.5 48.5 300 26 4 Pg.7 3 27 (Lead wire length) Manual override (Non-locking) A 20.5 18.5 mPm 3 32 59 68 78 70.5 43.5 12 7.5 P R 7.5 12 43.5 13.5 11 33.5 P R 13.5 11 Refer to grommet type for other

Series VQ Metal Seal/Rubber Seal Body Ported

5m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 4.5 (0.25) VQ1000 (Metal seal) 6 6.3 (0.35) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CJ2 Pressure 0.5MPa

Table of Contents

Volume is reduced by approx. 70% max.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

equipped with bracket. 1 Series VKF300 Standard specifications Type of actuation Fluid Ambient and fluid temperature Response time (at 0.5MPa {5.1kgf/cm}) Note 1) Direct operated type 2 position single solenoid Air Maximum 50C 10ms or less (standard), 15ms or less (low power comsumption type) Non-locking push type Not required (if lubricated, use class 1 turbine oil ISO VG32) Unrestricted 300

AC Servo Motor Driver (CC-Link Type)

150 600 300 150 1000 500 250 800 400 200 Different from the initial value. *5.

VKF300

equipped with bracket. 1 Series VKF300 Standard specifications Type of actuation Fluid Ambient and fluid temperature Response time (at 0.5MPa {5.1kgf/cm}) Note 1) Direct operated type 2 position single solenoid Air Maximum 50C 10ms or less (standard), 15ms or less (low power comsumption type) Non-locking push type Not required (if lubricated, use class 1 turbine oil ISO VG32) Unrestricted 300

ISO Standard Hydraulic Cylinder

: CHSDFY Z + Stroke J MM 2 x RcP PJ + Stroke Y GB GA CHQ Head side cushion valve 4 x FD CHK CHN RD BB D E FY V CHM MA K F FT Air release Rod side air release G CHS CHS Air release A SS NA NB B C Rod side cushion valve FZ FX S + Stroke ZZ + Stroke H M CH2 CHA Stroke range Bore size (mm) Related Products B C F A D FZ MM FX G GA MA BB E FD FT FY GB J K M H NB P PJ NA 40 25 to 800 52 52 6.6 70

2/3 Port Valve

Select a model from the highest operating pressure difference and the characteristic figure of flow rate in p.4.1-70. Thread T F N Orifice size 1 2 3 4 Rc(PT) NPTF G(PF) NPT 1.5mm 2.2mm 3mm 4mm Refer to table q for configuration. Port size 01 02 03 1 8 1 4 3 8 Valve/Body 4 Common/single Refer to table q for configuration.

RZQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Additional cylinder tube length Full stroke RHC CDQ2 MK(2) RS Q G Overall length of cylinder tube RS H A Comparison of cylinder tube overall length (mm) RZQ Full stroke = 300 mm (150 + 150 = 300 mm in case of CG1BN) MI W S CG1BN150+150-XC11 Dual stroke

Vacuum Filter AFJ Series

136.1 18 35.4 38.4 40 35.4 50 52 26 8.5 12.5 70 2.3 35 785 AFJ Series Specific Product Precautions 1 Be sure to read this before handling the products.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

400 500 600 700 800 900 1000 1200 1500 LJ1S101SC 50W to 300 LJ1S202SC 100W to 300 LJ1H101SC 50W to 500 LJ1H101PB 50W to 600 LJ1H101NB 50W to 600 Standard motor LJ1H202SC 100W to 500 [Tamagawa Seiki Co., Ltd.]

Single Axis Electric Actuator Series LJ1

400 500 600 700 800 900 1000 1200 1500 LJ1S101SC 50W to 300 LJ1S202SC 100W to 300 LJ1H101SC 50W to 500 LJ1H101PB 50W to 600 LJ1H101NB 50W to 600 Standard motor LJ1H202SC 100W to 500 [Tamagawa Seiki Co., Ltd.]

3 Position Cylinder Series RZQ

3 Position Cylinder 2-stage stroke enabled with a small increase in length Provides intermediate stop mechanism Overall length of cylinder tube RZQ First-stage stroke Additional cylinder tube length Full stroke CDQ2 Overall length of cylinder tube Series RZQ 32, 40, 50, 63 Comparison of cylinder tube overall length (mm) Full stroke = 300 mm (150 + 150 = 300 mm in case of CG1BN) CG1BN150

42

Bore size CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] Series 40 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQ4100--03 VQ4101--03 1100 1000 900 800 700 600 500 400 300 200 100 0 VQ5100--04 VQ5101--04 Values at extension

HEC_W-E

Product Development Div. 6, Engineering Headquarters Japan Technical Center, SMC Corporation, Address: 4-2-2 Kinunodai, Tsukubamirai-city, Ibaraki-ken, 300-2493 TEL: +81 297-52-6 FAX: +81 297-20-5007 E-mail: kaihatsu_6_g3@.smcjpn.co.jp Note: The contents of this manual are subject to change without notice. i Warranty Scope of warranty and liability to the Thermo-con Please thoroughly understand

Multistage Ejector (N)ZL Series

[MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate [l/min(ANR)] Suction Flow rate [l/min (ANR)] Time to reach vacuum

Multistage Ejector Series ZL112/212 1

70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

3

Line name Expanded flow range Compact, Space saving Wide range of flow measurement with one product Compared with the current PF2A, Flow ratio 78 % reduction Weight 74% reduction 100:1 Mounting space 1100 g a 240 g Compared with PFMC7202-06 and PF2A703H-10 Rated flow ratio is 10 : 1 for current PF2A. 2000 L type 55 Applicable flow range [L/min] PFMC7202 New 1 2 5 10 20 25 50 100 150 200 300