lPSMt

Less Than 0.64 SCFM (18 Nl/min) at 70 psi (5 kgf/cm'?) Supp Output Flow Rate 8.8 SCFM (250 Nl/min)at 70 psi (5 kgf/cm'?)

CG5-S

, 200 201 to 350 Minimum stroke for mounting auto switches 25 301 to 400 32 301 to 450 Number of auto switches Model 40 301 to 800 25, 50, 75, 100, 125, 150, 200, 250, 300 2 pcs. 1 pc. 50, 63 301 to 1200 D-G5BA 15mm 10mm 80 301 to 1400 Refer to page 15 for details. 100 301 to 1500 Note 1) All non-standard strokes are produced upon receipt of order.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

1 Air Preparation Equipment International Standard ISO 8573-1: 1991 Degrees of Quality Air Preparation Equipment Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Quality Max. oil density (mg/m3) Degrees of quality Max. particle diameter (m) Min. pressure dew point (C) Indication Example) Solid particle diameter 0.1 m 0.1 1 70 0.01 Pressure dew point 3C Model Selection Guide 1 2

Compact Cylinder

Compact Overall length shortened Width shortened 6.5 mm JCQ 20 JCQ 20 6 mm 10 mm stroke Height shortened 4 mm 10 mm stroke JCQ 20 Current product 20 (CDQS series) Current product 20 (CDQS series) Max. 45% lighter Weight 150 ga82 g (Compared with the current CDQS series, 25, 10 mm stroke) CAT.ES20-239C JCQ Series Compact Cylinder JCQ Series Compact (Compared with the current product) [mm]

Intrinsically Safe Valve

Installation should be in accordance with Canadian Electrical Code or ANSI/ISA RP12.6 Installation of Intrinsically Safe Systems for Hazardous (Classified) Locations and the National Electrical Code or ANSI/NFPA 70. 3. Barrier manufacturers installation drawing must be followed when installing this equipment. 4.

JXCx-OMT0001CN

/16 70/16 (2.667) (3.333) (4.375) (4.375) mm/s 80 100 100 100 [mm/s] () 5 5 5 5 [mm/s] () 7 8 8 8 LEHS10 LEHS20 LEHS32 LEHS40 K [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) mm/s 70 80 100 120 [mm/s] () 5 5 5 5 [mm/s] () 8 8 9 9 TM -111No.JXC-OMT0001CN-C Revision history 2015 9 2015 12 A 2016 3 B 2019 3 C 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Valve specifications Electricity specifications 0.1 MPa Minimum operating pressure 0.15 MPa 0.15 MPa 10 to 50C (1) Ambient and fluid temperature 10 to 50C (1) 10 to 50C (1) Maximum operating frequency 20 Hz 5 Hz 20 Hz Individual EXH Pilot valve EXH Common exhaust Not required Lubrication Non-locking push type/Slotted locking type (tool required) as an option Pilot valve manual override 150

Uniaxial Electric Actuator Series LJ1

Model IX IY W H Moment of inertia of area LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 24.7 44.8 55 36 56.3 73.3 48 374 836 52 402 1000 70 122 151 70 122 151 7 40 84 15 60 177 IX IY Linear guide IX H IY Slider guide W (Except LJ1H10/LJ1S10) Features 1 rigidity and high linear precision. eved with an AC servomotor and feed screw.

Electric Actuators

Model IX IY W H Sectional secondary moment Top entry Linear guide LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 Slider guide 24.7 44.8 55 36 56.3 73.3 7 40 84 15 60 177 48 374 836 52 402 1000 70 122 151 70 122 151 Left entry Brake Right entry Axial entry Bottom entry Table traveling accuracy T-slots enable highly flexible mounting.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Valve Solenoid Max.operating frequency 20Hz 5Hz Individual EXH Pilot valve EXH Not required Lubrication Non-locking push style/Locking slotted style Manual override 150/30 m/s2 Shock/Vibration resistance (2) Dust proof Enclosure 12V, 24V DC and 100V, 110V, 200V, 220V AC 10% of rated voltage Coil rated voltage Allowable voltage Class B or equivalent Coil insurance 1W DC (42mA), 0.5W DC (21mA

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Valve Solenoid Max.operating frequency 20Hz 5Hz Individual EXH Pilot valve EXH Not required Lubrication Non-locking push style/Locking slotted style Manual override (2) 150/30 m/s2 Shock/Vibration resistance Dust proof Enclosure 12V, 24V DC 100V, 110V, 200V, 220V AC 10% of rated voltage Coil rated voltage Allowable voltage Class B Coil insurance 1W DC (42mA), 0.5W DC (21mA) 24V DC 1W DC (

Micro Mechanical Valve Series VM1000

Application Weight (g) Model Actuator Polyacetal roller 110 140 150 150 160 220 210 220 210 220 200 VM430-01-00 VM430-01-01 VM430-01-01S VM430-01-02 VM430-01-02S Basic VM-08A VM-07AS VM-07A VM-06AS VM-06A VM-05A VM-02AS VM-02A VM-01AS VM-01A Mechanical operation Manual operation Roller lever Hard steel roller Polyacetal roller Hard steel roller One way roller lever Straight plunger VM430

Series MXP Precision Air Slide Table

Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L=120mm L=120mm L=120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100

AC Servo Motor Driver (CC-Link Type)

600 300 150 1000 500 250 800 400 200 Different from the initial value. *5.

IDX-OM-Z004

70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L) (mg/L) 1.0 0.1 1.0 (mg/L) 0.3 0.3 0.3 (mg/L) 4.0 4.0 4.0 6.07.0 1 2 JIS K 0101 2 a b c 4.2 IDF100150F-W 4 2 IDX-OM-Z004 4 (3) 1 Y Y , Y Y (4) 3 2 (5) 1( 2 3 4 a) 1. 1.5 2. 4.2 IDF100150F-W 4 3 IDX-OM-Z004 4 3. 4. 5.

VDW

87.5 105 122.5 140 157.5 175 L2 45 62.5 80 97.5 115 132.5 150 167.5 185 L3 52 69.5 87 104.5 122 139.5 157 174.5 192 2 stns. x 1 Manifold composition 3 stns. x 1 2 stns. x 2 2stns. + 3stns. 3 stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 Note) Manifold base is consisted of the junction of 2 and 3 station bases.

Compact Cylinder with Solenoid Valve/

-100 135 x 135L M8 x 60L 60 15 CVQM405 45 M5 x 45L x 65L 65 20 10 50 x 50L x 70L 70 25 15 55 x 55L x 75L 75 30 20 60 x 60L x 80L 80 35 25 65 14.5 x 65L x 85L 85 40 30 70 x 70L x 90L 90 7.5 45 35 75 x 75L x 95L 95 50 40 80 x 80L x 100L 100 75 45 85 x 85L x 125L 125 -100 50 90 x 90L x 150L 150 75 115 x 115L -100 140 x 140L Plate Non-rotating Accuracy Plate Allowable Rotational Torque Non-rotating

CXS

The maximum piston speed for retraction is approximately 70% that of extension. MY Standard Stroke CY (mm) MG Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 CX 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 D10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available as a special order.

CXS

The maximum piston speed for retraction is approximately 70% that of extension.

Compact Type

The maximum piston speed for retraction is approximately 70% that of extension. Standard Stroke (mm) Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available as a special order.