Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 (n 2) 2 100 + 100 Same side 100 + 100 (n 2) n = 4, 6, 8 n = 2, 3, 4 1 pc. 75 90 80 10 Different sides 35 75 90 80 Same side 55 75 90 80 90 + 30 (n 2) 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n

42

5 1 14 0.39 3.9 16 0.35 4.5 60 63 63 0.58 (0.66) Pressure center Metal seal VQ550 5 0 12 0.23 2.9 13 0.24 3.3 50 53 70 0.65 (0.73) Rubber seal VQ550 5 1 13 0.32 3.4 14 0.40 3.9 60 63 63 0.58 (0.66) Double check Metal seal VQ560 5 0 8.0 8.5 62 65 65 1.17 (1.25) Rubber seal VQ560 5 1 8.3 9.0 75 78 78 1.10 (1.18) Note1) Value for valve on sub-plate.

Compact Guide Cylinder End Lock Type SeriesMGP

Models Standard strokes (mm) 32 40 50 63 MGP 25, 50, 75, 100, 125, 150, 175 200, 250, 300, 350, 400 M L Intermediate strokes (in 5mm increments) are produced by installing spacers of 5, 10, 15 and 20mm widths. When a special intermediate stroke body is needed, contact SMC.

NCA1

8 7/16-20 3/8 .75 3/4 2.02 1 1/8 3/4 1/2 1/2 9/16 0.3 1/4-28 2 3/8 3/8 1.26 1.1 0.62 0.62 1 3/4 5 1.71 3 5/8 2.36 4 3/4 1.43 CA2 200 (2) 5/8 7/16-20 3/8 .75 3/4 2.6 1 1/8 3/4 1/2 1/2 2 1/2 9/16 0.3 5/16-24 3/8 1.06 3/8 1.26 0.62 3/4 0.62 1 5 1.71 3 5/8 2.4 4 3/4 1.84 250 (2.5) 5/8 7/16-20 3/8 .75 3/4 3.1 1 1/8 3/4 1/2 1/2 9/16 5/16-24 3 0 3/8 3/8 1.30 1.06 0.62 0.62 1 7/8 5 1.75 3 3/4 2.48

NCA1

8 1/2 1.71 3/4 5 1 1/8 2.02 .75 5/8 7/16-20 3/8 3/4 1.43 CA2 200 (2) 3/4 1.06 0.3 2 1/2 1 0.62 0.62 1.26 3/8 3/8 5/16-24 4 3/4 9/16 2.4 1/2 3 5/8 1/2 1.71 3/4 5 1 1/8 2.6 .75 5/8 7/16-20 3/8 3/4 1.84 250 (2.5) 1 7/8 0.62 0.62 1.06 1.30 3/8 0 3/8 3 5/16-24 4 7/8 9/16 2.48 1/2 3 3/4 1/2 1.75 3/4 5 1 1/8 3.1 .75 5/8 7/16-20 3/8 3/4 2.19 CS1 325 (3.25) 1 3/8 0.87 1.05 1.57 5/8 1/2 3 3/4 3/8-24

NCQ8

/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 #6-32UNC2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/

0.4

)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQ2300 VQ2400 VQ2301 VQ2401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQ2500 VQ2501 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ2A01 VQ2B01 4(A) 2(B) 2(B) 4(A) r 5(R1) 1(P) 3(R2) 5(R1) 1(P) 3(R2) VQ2C01 2(B) 4(A) 5(R1) 1(P) 3(R2) Component Parts Component

HRX-OM-X037

Display and Setting of Various Functions . 5-1 5.1 Basic Operation . 5-1 5.1.1 Touch panel . 5-1 5.1.2 Basic operating instructions. 5-2 5.2 Flow Chart of the Operation Screen . 5-4 5.2.1 Flow Chart of the Operation Screen . 5-4 5.3 List of Functions . 5-7 5.4 Description of the Screen . 5-8 5.4.1 Home screen . 5-8 Menu key . 5-9 Display and setting of date and time . 5-9 Operating condition

HRX-OM-Y098

mode [MODE] . 5-12 RUN/STOP display . 5-13 Run/stop operation . 5-13 5.4.2 Menu . 5-14 5.4.3 Status screen . 5-15 5.4.4 Information screen . 5-17 Alarm reset . 5-18 HRL Series HRX-OM-Y098 Contents Alarm name .5-18 Alarm log record.5-19 Display of alarm/maintenance reminder .5-20 5.4.5 Check operation time screen and maintenance reminder .5-21 Setting the usage time of DI filter.5-23 Setting

HRX-OM-W060

Display and Setting of Various Functions . 5-1 5.1 Basic Operation . 5-1 5.1.1 Touch panel . 5-1 5.1.2 Basic operating instructions. 5-2 5.2 Flow Chart of Operation Screen. 5-4 5.2.1 Flow Chart of Operation Screen . 5-4 5.3 List of Functions . 5-7 5.4 Description of Screen . 5-8 5.4.1 Home screen . 5-8 Menu key . 5-9 Display and setting of date and time . 5-9 Operating condition display .

V

SEAL ULTRA HIGH SPEED SOLENOID VALVE VQ2000 2.35 5 PORT METAL/RUBBER SEAL ULTRA HIGH SPEED SOLENOID VALVE VQ4000 2.42 5 PORT METAL/RUBBER SEAL BASE MOUNTED PLUG IN TYPE VQ1000 2.46 5/2, 5/3 SPOOL & SLEEVE, ULTRA HIGH SPEED SOLENOID VALVE Courtesy of Steven Engineering, Inc. !

Table of Contents

on the type of L3 = 30 3 to 6 L2+3 Y 5 20 7 to 13 5 to 20 3 to 5 X 3.5 L1+2 machining required.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

on the type of L3 = 30 3 to 6 L2+3 Y 5 20 7 to 13 5 to 20 3 to 5 X 3.5 L1+2 machining required.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

on the type of L3 = 30 3 to 6 L2+3 Y 5 20 7 to 13 5 to 20 3 to 5 X 3.5 L1+2 machining required.

CRB2/CRBU2/CRB1

With auto switch CDRB1LW 50 CDRB1LW 63 CDRB1LW 80 CDRB1LW100 P411020-5 P411030-5 P411040-5 P411050-5 75 Series CRB1 Rotary Actuator with Built-in One-Touch Fitting: 50 Basic type CRB1W50F With auto switch CDRB1W50F- CRB1W50F-E CDRB1W50F-E Applicable tube and size Applicable tube

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" No. 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 No. 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 Tubing O.D.

High Purity Fluoropolymer

1 1 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" 1" x 7/8" 3/4" x 5/8"

ARM10/11

IN/OUT fitting type 5.

ARM10/11

IN/OUT fitting type 5.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Changeable range output 5 V (10 V) 20 mA At the time of shipment 1 V (0 V) 4 mA Grease-free 10% 100% 105% Display 0% Application example Analog Functions Adjustment point: 75 L/min , 100 L/min output pp. 27, 28 When 5 V output is required from the flow switch at 75 L/min, use a sensor that outputs 1 to 5 V at 1 to 100 L/min. 5 V Change Output operation Key-lock function Forced output function