VXA21/22

Refer to p.4.1-74, 4.1-75 for specifications and models.

ZR

4 ZCU Standard (Without options) M3 x 0.35 x 70 4 [For ZSE4 spec.] [For ZSE4 spec.] With function plate M3 x 0.35 x 75 4 Standard (Without options) M3 x 0.35 x 19 6 AMJ !5 With function plate M3 x 0.35 x 24 6 Components Vacuum switch/Filter unit Misc. 13-3-49

Air Cylinder

, 100, 125, 150 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

Swivels

Pressure 50 45 40 3/8" 45 40 35 40 35 Pressure Drop (psid) 30 1" 3/4" 35 Torque (in-lbs) 30 25 30 1" 1/2" 25 1/4" 1/4" RPM 25 20 1/2" 3/8" 20 3/4" 20 15 3/4" 15 15 1/2" 3/8" 10 1" 10 10 2" 1/4" 5 5 5 1-1/2" 0 0 0 0 2000 1000 3000 4000 5000 1000 0 2000 3000 4000 5000 0 10 20 30 40 50 60 70 80 90 Pressure (PSI) Pressure (PSI) Flow (USGPM) Quick Coupling Division 8145 Lewis Road Minneapolis

Mechanical Valves Series NVM, NVFM, NVZNI

) P T 0.079 in (2mm) o.T. 0 059 in (1 smm) T T 0 138 in (3 Smm) .75 PSIG (5 Kgf/cm2) F .

IIIIIII

) P T 0.079 in (2mm) o.T. 0 059 in (1 smm) T T 0 138 in (3 Smm) .75 PSIG (5 Kgf/cm2) F .

MQQ

, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

MQQ

28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Air Suction Filter With One-touch Fittings ZFB Series

IN side, OUT side 4 10 20 30 50 75 75 Weight (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 Unrestricted 360 piping tube mounting on the IN side 6 6 8 8 10 Metric size Easily replaced filter element Easy installation and removal with One-touch fittings ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 22 22 30 40 62 20 20

48

15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4 9.5 5 M5 x 0.8 12.5 23 23 16 44 28 89 70 98 12.7 33 M6 x 1 9 6 40 (32 x 2) 6.7 11 6 Rc1/8 NPT1/8 G1/8 13 16.5 26 27.5 20 43 33 97 71 107 15.3 29 M8 x 1.25 10 7.1 7 Dual Rod Cylinder JMGP Series Bore Size 50 (40 x 2), 63 (45 x 2) Standard: JMGPM WA + Stroke/2

Compact Guide Cylinder

15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4 9.5 5 M5 x 0.8 12.5 23 23 16 44 28 89 70 98 12.7 33 M6 x 1 9 6 40 (32 x 2) 6.7 11 6 Rc1/8 NPT1/8 G1/8 13 16.5 26 27.5 20 43 33 97 71 107 15.3 29 M8 x 1.25 10 7.1 7 Compact Guide Cylinder JMGP Series Bore Size 50 (40 x 2), 63 (45 x 2) Standard: JMGPM WA + Stroke

Table of Contents

Dimensions . 46 47 48 50 52 52 53 54 54 55 55 56 57 58 60 60 60 61 62 63 65 65 65 66 66 67 67 68 69 69 70 70 71 72 73 75 75 75 77 77 78 78 78 79 80 82 84 84 84 85 86 87 87 88 89 90 Series AS * 2 * 0-D Speed Controller Adjustable by Flat Head Screwdriver: Standard Type Elbow Type \(Metal Body\) . Specifications. How to Order . Construction. Dimensions .

SZ3000

4 position 2 position SZ360--M5 M5 x 0.8 79 3 position 4 position 75 1-3-10 11 Cassette Type Manifold Plug-in Type Series SZ3000 Manifold Option SUP block disk Blanking block assembly SZ3000-55-1A These are mounted when later addition of valves is planned, etc.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

bolt X0.02 DA DB mIB ID X U VB VA H T PW 2-Rc P (plug) Rc 1/8 unlocking port Unlocks when pressurized GC GA XAH7 depth XL 2-Rc P PB A + Stroke E B + Stroke FA FB C + Stroke PA + Stroke GB Q G J K IE S XAH7 depth XL (mm) MLGPM, MLGPL common dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75

Digital Flow Switches, Series PF2A, Series PF2W

69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc 2, NPT 2, G 2 46 M6 x 1 9 0V 75

IDX-OM-M051

or less 70 or less Calcium hardness (mgCaCO3/L) 150 or less 50 or less 50 or less Ionic state silica (mgSiO2/L) 50 or less 30 or less 30 or less Iron (mg/L) 1.0 or less 0.3 or less 1.0 or less Copper (mg/L) 0.3 or less 0.1 or less 1.0 or less Reference items Sulfide ions (mg/L) Shall not be detected.

IDX-OM-Z004

70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L) (mg/L) 1.0 0.1 1.0 (mg/L) 0.3 0.3 0.3 (mg/L) 4.0 4.0 4.0 6.07.0 1 2 JIS K 0101 2 a b c 4.2 IDF100150F-W 4 2 IDX-OM-Z004 4 (3) 1 Y Y , Y Y (4) 3 2 (5) 1( 2 3 4 a) 1. 1.5 2. 4.2 IDF100150F-W 4 3 IDX-OM-Z004 4 3. 4. 5.

Digital Flow Switches

Note 7) The display unit is comformed to CE mark. 4 Series PF2A Flow Characteristics (Pressure Loss) PF2A710,510 PF2A750,550 PF2A711,511 3.0 1.0 10 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 2.5 0.8 8 2.0 6 0.6 1.5 0.4 4 1.0 0.2 2 0.5 Flow rate (l/min) 0 100 10 25 50 75 5 2.5 7.5 0 5 10 15 20 25 30 40 35 45 50 0 1 10 Flow rate (l/min) Flow rate (l/min) PF2A721,521 PF2A751,551

VDW

N.C. 0.12 0.03 0.35 0.03 0.72 1 M5 1/8 (6A) 0.04 0.13 0.96 VDW200 0.52 0.04 1 0.31 0.08 0.45 0.09 1.9 1.6 0.52 0.16 0.52 0.16 3.8 2 1.8 1/8 (6A) 1/4 (8A) VDW300 0.13 0.38 1.0 3.1 0.28 0.52 0.30 0.50 0.12 6.7 3 1.5 0.44 0.49 0.46 11 4 17-2-75 16 Series VDW200/300 Construction VDW250 VDW350 i o !0 i !1 o w !0 !

MQQ

(mm) 25, 28 Bore size (mm) Stroke range (mm) A L 4-FD 2-FD 75 8 10 10 to 40 88.5 10 16 10 to 60 97 10 20 10 to 60 FV FV M 104.5 12 25 10 to 50, 75, 100 124 12 28 10 to 50, 75, 100 B + Stroke L FT FX FZ FX (Dimensions other than A and L are the same as the front flange type.)