Escapements Series MIW/MIS

Body through hole Max tightening torque (Nm) Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 Bolt M2.5 x 0.45 0.5 M3 x 0.5 0.88 M5 x 0.8 4.3 M6 x 1 7.3 M8 x 1.25 17.5 Max tightening torque (Nm) Bolt Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 M3 x 0.5 0.88 Caution M3 x 0.5 0.88 1.

REA/REB

4 2.5 16 16 REAH15 9 REAH20 16 REAH25 M3 25 REAHT25 W REAHT32 40 W M1 M2 Static Moment Moment generated by the workpiece weight even when the cylinder is stopped Pitch moment M1= WL Yaw moment M3 = W (L A) Roll moment M2 = WL (mm) Model REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 A 15 17.5 19.5 23.5 L L A L M2 0 M1 0 M3 Since there are 2 guides, the guides central axis and the cylinders

IDX-OM-W031

of 7oC 231 m3/h 347 m3/h 432 m3/h 720 m3/h At Outlet Pressure Dew Point of 10oC 254 m3/h 382 m3/h 510 m3/h 822 m3/h Operating Pressure 0.7MPa Rated Conditio Inlet Air Temperature 35oC Ambient Temperature 25oC Voltage 230V 50Hz n Working Fluid Compressed Air Inlet Air Temperature 5 to 50oC Operating Range MIN.Inlet Air Pressure 0.15MPa MAX.Inlet Air Pressure 1.0MPa Ambient Temperature 2 to

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

Body through-hole Applicable bolts Model MHK2 -12 MHKL2-12 MHK2L-16 MHKL2-16 MHK2L-20 MHKL2-20 MHK2L-25 MHKL2-25 0.59 M3 x 0.5 Max. screw-in depth l mm Applicable bolts Applicable bolts Model Model M4 x 0.7 1.4 MHK2 -12 MHK2 -12 MHKL2-12 MHK2L-16 MHKL2-16 MHK2L-20 MHKL2-20 MHK2L-25 MHKL2-25 M3 x 0.5 M3 x 0.5 4 0.59 MHK2L-16 MHKL2-12 4 5 0.88 0.74 M5 x 0.8 2.8 M3 x 0.5 0.88 M4 x 0.7 M4 x 0.7

Sine Rodless Cylinder Series REA/REB

10 10 REAH20 16 16 13 13 REAH25 25 M3 REAHT25 W REAHT32 40 W M1 M2 Static Moment Moment generated by the workpiece mass even when the cylinder is stopped Pitch moment M1 = WL Yaw moment M3 = W (L A) Roll moment M2 = WL (mm) Model REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 A 15 17.5 19.5 23.5 0 0 L L A L M2 M1 M3 Since there are 2 guides, the guides central axis and the cylinders

Angular Air Gripper Series MHC2/MHCA2/MHCM2

M3 x 0.5 Finger opening port 4 0.005 0.025 1.6 7 M3 x 0.5 Finger closing port 18 In the case of MHC2-6S, finger opening port is a breathing hole. 8 Series MHC2-6/MHCA2-6 Dimensions MHCA2-6 (Short body) 2-M2 x 0.4 thread depth 4 (Mounting thread) 4-M2 x 0.4 through (Attachment mounting thread) 5 10 Attachment mounting limiting range 16 11 2-M3 x 0.5 through Prepared hole dia. 2.6 through

Made to Order

x 0.5 9.5 3.4 6.5 3.3 5 7 5.5 10.5 26 23 34 15 7.5 M3 3.5 10 M3 x 0.5 11.5 3.4 6.5 3.3 5 7 7 13 33 30 38 15 7.5 M3 3.5 12 M4 x 0.7 18 4.5 8 4.4 4.5 6.5 7.5 14.5 38.5 35.5 53 17 8.5 M4 4.5 14 M4 x 0.7 16.5 6 4 45 14 62 29 14.5 M3 4.5 26 6.5 7 34 3 M5 x 0.8 20.5 7 4 51 17 70 29 14.5 M4 5.5 31 8 8 39 3 M6 x 1 21 7.5 4.5 62.5 22 76 34 17 M5 6.5 41 9.5 10 50 3 M6 x 1 25.5 7.5 7.5 74.5 28 90 39

0.5

/min 0.46 m3/min 0.80 m3/min (Max.) 0.66 m3/min 0.46 m3/min 0.80 m3/min (Max.)

Compressed Air Preparation Filter

Example) AM30-N03BD-6RZ-D q e r t y w Symbol Description w Body size 20 30 40 50 60 AFF Nominal filtration rating: 1 m V V V V V Water droplet removal ratio: 99% AM Nominal filtration rating: 0.1 m V V V V V Oil mist concentration on the outlet side: 1 mg/m3 q Filter type AMD Nominal filtration rating: 0.01 m V V V V V Oil mist concentration on the outlet side: 0.1 mg/m3 + e Thread type

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Body through hole MI W S CEP1 CE1 Max. tightening torque (Nm) Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 Bolt CE2 M2.5 x 0.45 0.5 ML2B M3 x 0.5 0.88 C J G5-S M5 x 0.8 4.3 CV M6 x 1 7.3 MVGQ M8 x 1.25 17.5 Max. tightening torque (Nm) Bolt Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 CC M3 x 0.5 0.88 Caution RB M3 x 0.5 0.88 1.

REA/REB

Max. load weight CX 2 = M/Mmax Review M1, M2, M3. Mmax is the allowable moment. 2. Static moment CY 3 = Me/Memax Review Me1, Me3. Memax is the allowable moment. 3.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Model Specifications AN101-01 AN110-01 AN120-M3 AN120-M5 R R M3 M5 1 8 1 8 Port size (1) Noise reduction (dB (A)) Fluid Max. operating pressure (2) 13 18 16 21 Compressed air 1.0 MPa 5 to 150C (3) Ambient and fluid temperature Effective area (mm2) Weight (g) 20 35 1 5 9.5 20 1 3.3 22.5 38 9 17 11 A B 13 6 8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370

Digital Flow Switches

(Fixed SI unit [l/min, or l, m3 or m3 x 103] will be set for switch types without unit switching function.) Refer to the specifications of display unit for the flow rate value per pulse.

Low Differential Pressure Sensor

Description ZS-28-A Note D Power supply/Output connection cable Mounting screw (M3 x 8L) (accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

PF2A/PF2W

(Fixed SI unit [l/min, or l, m3 or m3 x 103] will be set for switch types without unit switching function.) Refer to the specifications of display unit for the flow rate value per pulse.

Rotary Actuator/Vane Style Series CRB1

(Example) For M3: L1 = 6 Applicable shaft types: S, Y L2 + (3 x P) L1 + ( 3 x P) Q1 = M Y axis S axis (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 L2= 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 Q2 = M M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A33 Machine

Digital Flow Switches, Series PF2A, Series PF2W

(Fixed SI unit [(l/min, or l, m3 or m3 x 103)] will be set for switch type without the unit switching function.) Note 3) The high flow rate type is CE marked; however, the linearity with applied noise is 5% F.S. or less. Note 4) Switch output and accumulated pulse output selections are made using the button controls.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

It is calculated using the following formula. 1 x 105 Kv = Q (8) P 1000 Kv : Flow coefficient [m3/h] Q : Flow rate [m3/h] DP : Pressure difference [Pa] r : Density of fluid [kg/m3] (3) Formula of flow rate It is described by practical units. Also, the flow rate characteristics are shown in Graph (2).

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

x 0.5 3.5 M3 x 0.5 M3 x 0.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 M3 x 0.5 4.8 20 22.5 2H9 2 11 2H9 2 M3 x 0.5 3.5 M4 x 0.7 M3 x 0.5 18 56 13.4 26.2 11.3 28 10 2H9 2 M3 x 0.5 5.3 21 24.5 2H9 2 11.5 2H9 2 M3 x 0.5 3.5 M5 x 0.8 M3 x 0.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 M3 x 0.5 5.3 25 27 2H9 2 13.5 2H9 2 M4 x 0.7 4.5 M6 x 1 M5 x 0.8 23 73.5 15.4 37.4 14.9 34.5 14 3H9 3 M4 x 0.7 6.5 29 32.5

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm. 3 port solenoid valve, direct operated