SMC Corporation of America
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M3 M5 01 N01 R04 R06 IM5 IM5H M5 female M5 female Port size M3x0.5 M5x0.8 R1/8 NPT1/8 M5x0.8 4 6 thread, thread, through M5x0.8 reducer reducer through type (with type mounting hole) Case Resin case: PBT Fitting: C3604BD PBT Resin case: PBT Resin case: PBT Fitting: SUS303 Fitting: A6063S-T5 Material Pressure sensing section Pressure sensor: Silicon, O-ring: NBR Oil resistance vinyl cabtyre

Pressure Sensor Series PSE530 How to Order PSE53 0 M5 Sensor range Option None 0 1 2 3 Positive pressure [0 to 1 MPa] Vacuum [0 to 101 kPa] Low pressure [0 to 101 kPa] Compound pressure [101 to 101 kPa] Nil Port size Sensor cable (3 m) M5 R06 R07 M5 x 0.8 6 reducer 1/4 inch reducer L ZSE ISE Option ZSP Connector for pressure sensor controller (1 pc.) + Sensor cable (3 m) Description Part

(Recommended tightening torque: 0.4 to 0.5 Nm) 2) When piping fittings, etc. are connected to the air pressure supply (P) port (M5) for the single unit type, secure the part provided with the port, tighten it by hand, then additionally tighten by approximately one sixth to one fourth of a turn using an appropriate tool.

01 M5 x 0.8 Rc(PT) 1/8 (port A) VKF332 (with bracket) Body ported (single type) 5 G M5 Body ported (for manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Light/Surge voltage suppressor Valve option Port size For vacuum For low power consumption For vacuum/low power consumption For long loading time 01 Nil V Y Rc(PT) 1/8 (with sub plate) Without sub plate None With surge voltage suppressor

Brown ON 80 mA Max. 24 VDC VS VL OFF White Release output Black ON Timer period Blue 20 to 2,000 ms Note) When power is supplied, release output is performed once for the time period only.

KBV1-M6 KBV2-M5 M5 x 0.8 M6 x 1 M5 x 0.8 M6 x 1 6 KBV2-08 KBV3-08 8 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 1 8 Branch Elbow Module: KBZ Rc Applicable tubing KBV3-10 10 Applicable tubing O.D. 4 6 KBZ2-08 8 KBZ3-10 10 KBZ3-12 12 KBZ4-12 KBV3-12 12 KBV4-12 KBV4-16 Rc 1 4 Model KBZ1-04 KBZ1-06 16 Rc 3 8 Applicable tubing Bulkhead Female Connector: KBE Female Connector Union: KBH T Connection

M1 Weight (g) ASV120F-M3-04 ASV220F-M5-04 ASV220F-M5-06 Model 5 8 9 M3 x 0.5 M5 x 0.8 M5 x 0.8 5.5 8 8 9.3 9.3 11.6 7.2 9.6 9.6 21.4 22.8 23.6 25 27.6 28.4 9.8 11.1 11.1 28.6 31.4 31.4 26.1 28.6 28.6 25.8 27.7 27.7 23.3 24.9 24.9 12.7 12.7 13.5 4 4 6 Reference dimensions of M thread after installation. Inch Size Applicable tubing O.D. d T H D1 D2 L1 L2 L3 L4 A Max. Min. Max. Min.

(mm) <M5> <M5> Weight (g) Applicable tubing KCH04-M5 KCH04-01S KCH06-M5 KCH06-01S KCH06-02S KCH08-01S KCH08-02S KCH08-03S KCH10-02S KCH10-03S KCH12-03S KCH12-04S 2.1 2.6 2.4 M5 x 0.8 9.8 30.8 26.1 32.4 37.4 28.9 42.4 45.7 34 50.5 51.5 54.2 41.6 27.3 22.1 28.9 33.4 22.9 38.4 39.7 27.5 44.5 45 47.7 33.6 18 2.1 2.6 2.4 4 8 1 8 10 11.8 12 14 M5 x 0.8 10 16 14 20 27 25 34 43 48 41 Reference dimensions

Effective area (mm2) Weight (g) A L M Model M5, UNF10-32> AKH04-M5 AKH04-01S AKH06-M5 AKH06-01S AKH06-02S AKH08-01S AKH08-02S AKH08-03S AKH10-02S AKH10-03S AKH10-04S AKH12-03S AKH12-04S 8 10 M5 x 0.8 1/8 M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 30 31.7 21.2 20.6 22.2 22.9 24 27.7 36 35.5 48.3 40.8 41.3 54 46.5 5 10 4 2.8 12.7 Applicable tubing 2.8 6.5 6.5

range: 19 VDC to power supply voltage Current consumption: 5 mA or less Connect with +24V Voltage range: 19 VDC to power supply voltage Current consumption: 5 mA or less Ionizer stop signal Connect with 0V Voltage range: 5 VDC or less Current consumption: 5 mA or less Connect with 0V Voltage range: 5 VDC or less Current consumption: 5 mA or less Input signal Cleaning signal Maximum load

Setting of the response time may improve the condition. -86No.PF-OMX0002-B Error indication Problem Possible causes Investigation method Countermeasure Incorrect power supply Check if the power supply voltage is 24 VDC 10%. Power supply voltage is 24 VDC 10%.

ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1 Series ASN Construction Component

Also, in order to completely prevent the overflow of exhaust air, leave plenty of space between the check valve unit and adjacent ejector to avoid interference from the ejectors exhaust unit. 3.2 (Straight) KJS23-M5 VVQ1000-50A-C3 4 (Straight) KJS04-M5 VVQ1000-50A-C4 6 (Straight) KJS06-M5 VVQ1000-50A-C6 3.2 (Elbow) KJL23-M5 VVQ1000-F1-LC3 4 (Elbow) KJL04-M5 VVQ1000-F1-LC4 !

or less Maximum load current 500 mA AC/DC (resistance load) Minimum load current 5 VDC 10 mA Output voltage 24 VDC 10% 500 mA MAX (No inductive load) Contact output signal To the thermo-chiller Users equipment side 7 24 VDC 6 24 VDC output (500 mA MAX) 5 15 14 24 VCOM output 13 24 VCOM Signal description Default setting 12 4.7 k Contact input signal 2 Circuit diagram 4 1 k 11 Run/stop signal

30 VDC or less Maximum load current 500 mA AC/DC (resistance load) Minimum load current 5 VDC 10 mA Output voltage 24 VDC 10% 500 mA MAX (No inductive load) Contact output signal To the thermo-chiller Users equipment side 7 24 VDC 6 24 VDC output (500 mA MAX) 5 15 14 24 VCOM output 13 24 VCOM Signal description Default setting 12 4.7 k Contact input signal 2 Circuit diagram 4 1 k 11 Run/

Setting of the response time may improve the condition. 65 No.PF-OMU0002-D Error indication Problem Possible causes Investigation method Countermeasure Incorrect power supply Check if the power supply voltage is 24 VDC 10%. Power supply voltage is 24 VDC 10%.

D-sub 25 P type, Female connector Connector type (on this product side) M2.6 x 0.45 Fixing bolt size Photocoupler Insulation method 24 VDC Rated input voltage Input signal 21.6 VDC to 26.4 VDC Operating voltage range 5 mA TYP Rated input current 4.7 k Input impedance Photocoupler Insulation method 24 VDC Rated load voltage Open collector output signal 21.6 VDC to 26.4 VDC Operating load voltage