JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

17 18 115 35 18 108 60 55 15 15 25 to 1400 63 M12 x 1.5 90 165 63 10 27 19 14 43 35 1/2 52 148 18 50 19 20 132 41 19 106 71 65 15 20 25 to 1500 1/4 stroke 80 M16 x 1.5 110 190 80 11 22 22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 80 17 20 25 to 1800 The maximum stroke is 1500mm for series CH2G only. 100 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122

Cylinder with Lock

Bore size E1 L1 MM R1 U1 NDH10 NX NZ Y-03M*1 32 20 30 M10 x 1.25 10 16 10 +0.058 0 14 +0.30 + 0.10 28 0.10 0.30 Y-04M*1 40 22 40 M14 x 1.5 11 19 10 +0.058 0 14 +0.30 + 0.10 28 0.10 0.30 Y-05M*1 50, 63 28 50 M18 x 1.5 14 24 14 +0.070 0 20 +0.30 + 0.10 40 0.10 0.30 Y-08M*1 80 40 65 M22 x 1.5 20 34 22 +0.084 0 30 +0.30 + 0.10 60 0.10 0.30 Y-10M*1 100 40 65 M26 x 1.5 20 34 22 +0.084 0

AC

20 A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140 02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11

CNA

20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 52 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 M8 x 1.25 6 7 7 11 11 14 18 18 22 26 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 9 56.5 M8 x 1.25 11.5 67 M10 x 1.25 13.5 83 M12 x 1.75 13.5 98 M12 x 1.75 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Stroke range (mm) e Bore size

CNA

20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 52 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 M8 x 1.25 6 7 7 11 11 14 18 18 22 26 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 9 56.5 M8 x 1.25 11.5 67 M10 x 1.25 13.5 83 M12 x 1.75 13.5 98 M12 x 1.75 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Stroke range (mm) e Bore size

Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

CM2

10 14 MB +0.070 0 0.1 0.3 12 16 24 50 M14 x 1.5 92 20 14 13 +0.070 0 0.1 0.3 12 16 69 22 24 55 M14 x 1.5 15.5 20 Double Knuckle Joint MB1 Y (Max.)

REA/REB

Speed 600 mm/s REAS25 8 4 7 10 11 6.5 26.4 16 8.5 70 54 40 20 14 REAS32 8 5 7 12.5 14 8 33.6 20 9.5 86 66 46 24 16 REAS40 10 5 10 12.5 14 8 41.6 25 10.5 104 76 57 25 20 J x K HP HS HT L LD M MM N NN Model REAS15 M8 x 1.0 39 15 21 M6 x 1.0 x 9.5 60 5.6 8 M5 x 0.8 7.5 REAS20 M10 x 1.0 45 25.5 10 M6 x 1.0 x 9.5 70 5.6 10 M6 x 1.0 9.5 REAS25 M14 x 1.5 53 23 10 M8 x 1.25 x 10 70 7 10 M6 x 1.0

MXQ

M6 x 18 M5 x 14 7.0 7.0 4.4 M8 x 20 M8 x 18 M6 x 18 18.0 18.0 7.0 Metal Stopper Caution 1.

Electric Actuators

Page 319 Features 14 Single Axis Electric Actuator High Rigidity Direct Acting Guide Series LJ1H Series LJ1H LJ1 LG1 LC1 LX LC6D/LC6C Switches Lead screw lead mm Mounting orientation Series Page Model Motor type Guide type Ground ball screw Rolled ball screw Slide screw 12 10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal

Fieldbus System

14 14 14 14 14 14 D side U side For the I/O Unit part number mounted, refer to the following pages.

Micro Mechanical Valve Series VM1000

EXH.1 (C1) 2 (C2) 4 93.7 23 19 VH 18.5 18.5 12 CYL.2 CYL.1 14 12 21 20 3 (E1) 1 (S) 5 (E2) VHS 0.5 MPa supply 30.5 26.4 3 x 1/4 VHS T.T.

ITV

(For details, refer to page 14-8-11 in Specific Product Precautions.) 26.5 PPA Bushing assembly 2.7 AL Note) For dimensions of the cable connector, refer to single unit on page 14-8-8. 14-8-9 10 Series ITV0 Dimensions Manifold 20 40 20 40 4-M3 x 0.5 thread depth 3 Mounting hole 11 11 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Misc. 14-20-59 How to Order Bowl Assembly 14-20-62 Precautions 14-20-64 Information on Items to be Discontinued and Equivalent Products Auto-Drain Valve, Motor Operated Auto-drain, Heavy Duty Auto-Drain, Pressure Differential Gauge 14-20-49 Related Products Note) It describes the degree of compressed air quality based on ISO8573-1: 1991 and JIS B 8392-1: 2000. 14-20-1

High Purity Fluoropolymer

Model G F B H L E M M H LQ1T2A LQ1T1A 2 1/8" 10 11.5 18.5 8 4 1/2" 3/4" 3/8" 1/2" 1/4" 3/8" 1/8" 3/16" 1/4" LQ1T3B LQ1T3A LQ1T2C LQ1T2B 15 16.5 28 14 12 6 4 25 1 5 Class 6 23 36.5 17 18 9 20 LQ1T4A LQ1T4B 6 28 11 22 21 45 20 LQ1T6B LQ1T6A LQ1T5B LQ1T5A 7 29 39 26 28 14 54 3/4" 1" 8 39.5 49 18 36 36 69.5 14 Series LQ1 Dimensions Panel Mount Union: LQ1P Metric sizes Applicable tubing O.D.

HRX-OM-X084

20. 9-10 9.4.4 HRR010-W-20. 9-10 9.5 Heating capacity . 9-11 9.5.1 HRR010-A-10. 9-11 9.5.2 HRR010-W-10. 9-11 9.5.3 HRR010-A-20. 9-12 9.5.4 HRR010-W-20. 9-12 9.6 Pump capacity. 9-13 9.6.1 HRR010-A/W-10 . 9-13 9.6.2 HRR010-A/W-10-T1 . 9-13 9.7 Required facility water flow (for water-cooled type) . 9-14 9.7.1 HRR010-W-10/20. 9-14 9.8 Types of Hazard Labels . 9-15 9.8.1 Locations of Hazard Labels

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

to 500 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 6 14 9 50 Up to 600 20 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25 7 18 9 63 Up to 600 20 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 7 18 11.5 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 10 22 13.5 100 Up to

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

CY1L15/20/25/32/40 (mm) d B A L JK J HI HG H G FB FA D C Model LD HT HS HP HO HB HA GP EB EA CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 12 9.5 7.5 75 9.5 M6 x 1.0 14 16 40 6.5 6 3 16.6 5 5.6 16 25 39 38 4 6.5 65 13 6 16 9.5 9.5 86 10 M6 x 1.0 16 18 46 8.5 21.6 5.2 5.6 20 31 45 44 10 9 80 16 11 9.5 86 10 M8 x 1.25 21 23 54 8.5 7 4 26.4 6.5 7 20 39 53 52 18 9 90 14 8 20 14 10.5 100 15 M10 x 1.5

Cylinder with Lock Series MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

MU

Part no. +0.058 0 +0.058 0 +0.058 0 +0.070 0 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 25 32 40 50, 63 25 32 40 50, 63 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 RQ MU DU1 R1 NZ NX NDH10 NL NL NO U1 NO NX R1 Applicable pin Part no. Part no.