5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Since terminal numbers are not indicated on the flat cable, use the triangle mark as a reference when wiring. 8 Cassette Type Manifold Series SZ3000 Manifold Electrical Wiring 60PG Flat cable type (20 pins) Without power supply terminals With power supply terminals Positive common Negative common Common 20 20 20 Pos. pin (common) Pos. pin 19 19 19 SOL.B 18 18 Neg. pin Neg. pin (common)

Modular Design with Uniform Body Style

19 19 19 19 19 19 19 9 Pressure can be set higher than the specification pressure in some cases, but use pressure within the specification range. 10 Refer to chemical data on page 109 for chemical resistance of the bowl. 11 A bowl guard is provided as standard equipment (polycarbonate). 12 A bowl guard is provided as standard equipment (nylon). 13 The combination of float type auto

Electric Actuator/Slider Type

30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

35 129 9 9 M6 x 1 depth 13 Rc 1/8 40 150 134 186 170 19 19 84 138 20 47 75 50 134 95 93 50 170 45 152 9 12 M8 x 1.25 depth 16 Rc 1/4 50 160 140 210 190 21 25 94 164 25 58 90 56 152 115 103 55 194 50 182 11 12 M10 x 1.5 depth 21 Bore size (mm) Rod end lock Head end lock Bore size (mm) For lock type For non-lock type Bore size (mm) Z X W HR HN Y Y R Q R Q 157 30 40 25.3 37 20 20 20 107 (115

V

Stations Max) V A LV E S TAT I O N S 02-10 .Double Wiring Specifications 11-20 .Applicable up to 20 Solenoids.

Vacuum System Peripherals:

For vacuum pump servies: Series ZX 13-14-19 3. Series ZM 13-14-20 4.

CJ5-S

23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 1/8 93 143 MK(2) 50 Up to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 109 167 63 Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 109 167 RS Q G 80 Up to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5

CJ5-S

23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 1/8 93 143 MK(2) 50 Up to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 109 167 63 Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 109 167 RS Q G 80 Up to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5

Round Type Low Pressure Hydraulic Cylinder Series CH
M

32 31 f8 to 800 24 50 22 38 16 19 7 9 55 33 72 12 8 53 8 9 40 7.5 M14 x 1.5 13 36 21 40 34 f8 to 800 24 60 24 41 18 21 9 9 66 36 84 14 11 54 10 11 48 7.5 M16 x 1.5 19 44 21 (mm) Bore size (mm) P NB NC NN S ZZ 20 19 15 M22 x 1.5 1/8 81 138 25 19 15 M24 x 1.5 1/8 81 143 32 M30 x 1.5 19 15 1/8 87 159 40 1/4 M33 x 2 24 21 108 183 50 Series CHM Dimensions Rear flange type: CHMG GA N Rc P 2-NN

MXS Series Air Slide Table

Z ZZ (NN-1) x H G H 11 5.5 5.5 11 A B 3.2 6.5 7 7 12 4 NN-M4 x 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5 83.5 99.5 M 42 52 62 84 100 ZZ 48 58

CG5-S

x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 Rc 1/4 109 80 80 to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 Rc 3/8 130 100 100 to 1500 40 37 41 19 M12 x 1.75 24 60 30 38 3 29 20 71 16 10 26 8 M26 x 1.5 Rc 1/2 131 110 M12 x 1.75 depth 23 Install plug bolts, which are included, in any unused mounting holes.

CJ2

(SNJ-016B for 10, SNKJ-016B for 16) A BA BB CA CB F FB FC FT FX FY FZ GA H KA MM NA NB NN Bore size (mm) 10 16 15 15 12 17 14 8 17.5 5.5 2.3 33 20 42 8 28 4.2 M4 x 0.7 12.5 5.5 M10 x 1.0 15 18.3 18.3 20 20 8 19 5.5 2.3 33 20 42 8 28 5.2 M5 x 0.8 12.5 5.5 M12 x 1.0 Dimensions by Stroke Symbol S Z 5 to 15 Bore size (mm) Stroke 76 to 100 101 to 125 126 to 150 76 to 100 101 to 125 126 to 150

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

14 Up to 1000 -X Lube Non-lube Air-hydro 1/2 160 161 212 112 255 16 M14 x 1.5 M30 x 1.5 50 128 15 47 36 90 31 35 59 43 14 19 20 Up to 1000 3/4 180 182 236 118 275 18.5 M16 x 1.5 M36 x 1.5 56 144 17 53 40 36 90 39 59 43 14 19 20 Up to 1200 203/4 200 204 265 132 320 18.5 M18 x 1.5 M40 x 1.5 63 60 162 45 20 41 115 70 39 48 17 24 25 Up to 1200 3/4 1 225 226 280 150 335 18.5 M20 x 1.5 M45 x 1.5

CNA

40 10 95 17 56.5 20 13 15 12 11 Up to 600 200.1 0.3 35 32 86 27 115 1/4 1/4 64 16 25 20 40 10 102 17 67 20 18 12 15 11 Up to 600 0.1 0.3 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 Up to 750 Data 0.1 0.3 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 J KA L MM N P Q H S T U V W Z ZZ K RR 6 M8 x 1.25

CNA

40 10 95 17 56.5 20 13 15 12 11 Up to 600 200.1 0.3 25 35 32 86 27 115 1/4 1/4 64 16 20 40 10 102 17 67 20 18 12 15 11 Up to 600 0.1 0.3 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 Up to 750 Data 0.1 0.3 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 J KA L MM N P Q H S T U V W Z ZZ K RR 6 M8 x 1.25

Floating Joint

-27-200 JAF160-33-200 20 25 32 32, 40 40 32, 40 50 50, 63 80 100 100 125 160 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

1000 20 to 1000 35 32 70 27 81 108 1/4 1/4 52 20 40 95 17 27 59 13 12 11 M8 x 1.25 7 18 80 63 Up to 1000 20 to 1000 35 32 86 27 101 115 1/4 1/4 64 20 40 102 17 26 67 18 15 11 M10 x 1.25 7 18 99 80 Up to 1000 20 to 1000 40 37 102 32 119 129 1/4 1/4 78 25 52 113 21 30 72 23 17 13 M12 x 1.75 10 22 117 100 Up to 1000 20 to 1000 40 37 116 41 133 140 1/4 1/4 92 30 52 124 21 31 76 25 19 16 M12

CA2

27 17 84 2.5 25 146 1/4 up to 600 11 35 32 70 27 52 20 13 40 12 17 58 47.3 61 M8 x 1.25 7 18 11 M18 x 1.5 19 30 17 90 2.5 25 159 3/8 up to 600 11 35 32 85 27 64 20 15.5 40 10 17 58 54.8 68.5 M10 x 1.25 7 18 14 M18 x 1.5 19 31 17 98 4 25 170 3/8 up to 750 13 40 37 102 32 78 25 18.5 52 14 21 71 65.8 80.5 M12 x 1.75 11 22 17 M22 x 1.5 23 37 21 116 4 40 204 1/2 up to 750 16 40 37 116 41 92 30

MHZ

0.020 0.053 MHZL2-20 K 20f8 81.7 19 22 12 D2 0.020 0.053 MHZL2-25 K 25f8 96.2 24 25 15 D1 Other dimensions and specifications correspond to the standard type.

MHZ

0.020 0.053 MHZL2-20 K 20f8 81.7 19 12 22 D2 0.020 0.053 MHZL2-25 K 25f8 96.2 24 25 15 D1 Other dimensions and specifications correspond to the standard type.