CM2 20 75 8 41 20 33.5 5.5 M10 X 1.25 1to450 19.5 17 32 37 6 8 M26 X 1.5 120 40 10 15 30 62 22 13 41 7 4 60 25 75 8 45 26 34.5 37.5 5.5 M10 X 1.25 1to450 19.5 17 32 37 6 8 M26 X 1.5 122 40 12 15 64 22 13 41 7 4 60 32 75 8 45 26 21 47.3 7 M14 X 1.5 21.5 M32 X 2 42.5 46.5 1to500 22 41 8 10 154 52 14 88 24 16 45 7 5 66 40 36 82 11 50 32 With rod boot (mm) ZZ Symbol h l Stroke f e Bore 1 to 50
-05-C6 One-touch fitting (Inch size) Symbol Port size Applicable series One-touch fitting for 5/32" N3 SX3000 One-touch fitting for 1/4" N7 SS5X3-41-05-C6 1 set (Type 41, 5-station manifold base part no.)
D1 D2 L1 L2 M 15 23 15 22 25 17 24 24 27 30 36 31 52 59 58 KQ2F04-01 KQ2F04-02 KQ2F06-01 KQ2F06-02 KQ2F06-03 KQ2F08-01 KQ2F08-02 KQ2F08-03 KQ2F10-02 KQ2F10-03 KQ2F12-02 KQ2F12-03 KQ2F12-04 KQ2F16-03 KQ2F16-04 1 8 1 4 1 8 1 4 3 8 10 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 38 43 11 16 5.6 4 14 17 14 17 19 14 17 19 17 19 4 14 11 13 15 11 13 14 14 15 13.1 10.4 17 12 6 1 8 KQ2F16 26.1
15 20 17 32 32 49 116 Nut 2 pcs. 5 10 15 15 20 20 30 With rubber bumper 7 9 18 31 56 Note) For detailed specifications on auto switch, refer to page 7-9-1.
80 86 Rc(PT)1/4 20 35 7 64 41 50 18 8 6.6 11 Depth 8 0 0.062 63 54 46 14 Depth 10.5 15 47.5 10.5 M10 X 1.5 19 15 93 103 Rc(PT)1/4 20 35 7 77 60 18 8 9 Refer to p.2.3-18 for details of rod end nut and optional brackets.
24 31 34 11 3/8 65 42 16 59 108 139 63 25 to 800 M8 x 1 9 M27 x 2 46 33 12 198 36 77 32 58 36 66 19 30 38 31 13 1/2 69 50 18 74 115 153 80 25 to 800 10.5 M33 x 2 57 32 15 223.5 M10 x 1.25 45 96 41 75 45 74 13 41 35 42 17 1/2 77 60 17 80 133 168 100 25 to 1000 14.5 M42 x 2 58 42 15 257.5 M14 x 1.5 56 115 52 90 56 86 16 50 41 38 19 3/4 79 72 22 97 146 187 Transaxial foot: CHSDLA PJ + Stroke
MXQ8A-15-15Zm-X2192 5 MXQ8A-5-35Zm-X2192 32 6 40 31 31 4 70 55 52.5 52.5 104.5 130 140 280 10 MXQ8A-10-30Zm-X2192 15 MXQ8A-15-25Zm-X2192 20 MXQ8A-20-20Zm-X2192 5 40 15 8 MXQ8A-5-45Zm-X2192 46 6 59 29 29 4 85 55 57.5 62.5 131.5 145 155 330 10 MXQ8A-10-40Zm-X2192 15 MXQ8A-15-35Zm-X2192 20 MXQ8A-20-30Zm-X2192 25 MXQ8A-25-25Zm-X2192 50 * The first stage stroke adjustment cannot be performed.
Compact size (Width: 15 mm) Low power consumption: 1.8 W DC Valve configuration Pilot type 4 port solenoid valve Air 0.15 to 0.7 10 to 50 (No freezing. Refer to page 3-13-4.) 15 or less 15 Refer to the table below.
Description Material Note 15 Cover plate Aluminum alloy Coating No.
(mm) With rod boot Bore size (mm) Stroke range (mm) l B C F GA GB J M NA NB P R S T e f Q 32 58 38 16 32 15 M10 x 1.25 11 37 31 3/8 39 141 11 52 21.5 15 25 to 1400 1/3.5 stroke 40 65 45 12 32 15 M10 x 1.25 11 36 30 3/8 42 141 11 52 12 15 25 to 1400 50 76 52 15 40 19 M10 x 1.25 11 43 35 1/2 46 155 13 55 15 15 25 to 1400 63 90 63 15 42 19 M12 x 1.5 14 43 35 1/2 52 163 15 65 15 20 25 to 1500
For AF/AL For AFM/AFD For AR B340 B240 Mounting thread Model Applicable model A B C D F H J K L M N R t Bracket/ For AF, AL, AFM, AFD, and AR M4 X 8 l AF2000, AL2000 AFM2000, AFD2000 B240A 18 27 8.4 33 3 2.7 27 26 5.4 40 2.3 4.5 14 (Round head Phillips screw) Model File M4 X 8 l (Hexagon socket head cap screw) SAC2000, #15 SAC2503, #15 SAC4000, #15 SAC4006, #15 SAC5000, #15 B240 B340 B440
18 22 34.5 41 51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."
18 22 34.5 41 51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."
M3 x 0.5 (P, R port) 15 (Bracket) 11 10 P R 22.1 6.7 1.2 (PE port) 7 9.2 L plug connector (L): SYJ32-L-M3 M plug connector (M): SYJ32-M-M3 M8 connector (WO): SYJ32-WO-M3 58.5 [60.7] (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5 M8 x 1 15 39.1 [46.1] Approx. 300 (Lead wire length) (2) 48.7 [50.9] 57.6 (2) 50.2 43.7 13.5 13.5 13.5 15 15 15 22.1 22.1 22.1 Refer to page 4-4-61 for dimensions
port 1/8" External pilot port 27.5 27.5 41 41 41 41 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3-position type. 495 Base Mounted Plug-in Unit VQ5000 Series [Option] Note) CE-compliant: For DC only.
41 44 41 41.5 41 41 41 41 41 50 41 52 43 49 83.5 93.5 46.5 43 80 49.5 49 52.5 49 50 49 49.5 49 49.5 49 58 49 58.5 51.5 57.5 92 102 53.5 51 100 56.5 56 61 56 58.5 56 56.5 55.5 57.5 55.5 66 56 66 58.5 68 102.5 112.5 61.5 57.5 Auto switch model D-F5l D-J59 D-F5lW D-J59W D-F5BA D-F59F D-F5NT D-A3lC D-G39C D-K39C D-A44C Bore size Hs Ht Hs Hw Hs Hw 40 38 31.5 73 69 81 69 50 42 35.5 78.5 77 86.5
Applicable pad 06J/B10J/B15J 18 15.5 15.5 4.9 7.7 6.5 6.5 25 R 2.8 6 7 8 10 6.8 2.5 3 9 10 25 2 0.5 6 7 R 11 12 R 2.5 3.8 4.9 ZP2-14J ZP2-B15J ZP2-16J Lock ring Lock ring 13 13 Applicable pad 09J/14J/16J 7 30 R R 24 24 15.5 15 7 8 15 R R 18 6.5 45 1 15 11.8 2.5 15 14 3 17.5 16 7.2 4 2.5 4.5 5 6.6 R 16 17 Applicable pad B25J/B30J ZP2-B25J ZP2-B30J 15 Lock ring 30 R Lock ring 15 R 8 9 R R 45
XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric
50 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) MB MB1 D-H7 D-H7W D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CA2 CS1 D-H7C D-C73C D-C80C 5 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) CS2 D-G5 D-K59 D-B5 D-B64 5 15 75 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 75 + 55 (n 2) (n = 2, 3, 4,
) 5 st 38 41 35 41 45 47 S 15 st 48 56 50 56 60 62 Z S Z 15 st 61 72 66 75 83 89 10 st 43 46 40 46 50 52 5 st 51 57 51 60 68 74 10 st 56 62 56 65 73 79 5 st 38 41 45 51 55 57 10 st 43 46 50 56 60 62 15 st 48 56 60 66 70 72 5 st 51 57 61 70 78 84 10 st 56 62 66 75 83 89 15 st 61 72 76 85 93 99 6 10 16 20 25 32 17 19 Free Mount Cylinder Single Acting, Single Rod, Spring Return/Extend Series