Auto Switch Guide

Auto Switch Internal Circuit D-C73 LED Brown OUT (+) Contact protection box CD-P11 CD-P12 Brown Resistor Reed switch Zener diode OUT () Blue Weight Blue (g) D-C73 D-C76 D-C80 Auto switch model 0.5 3 5 9 46 76 10 50 9 46 D-C76 Lead wire length (m) DC (+) Brown LED (+) Resistor Reed switch Reed switch Load DC OUT Black Reverse current prevention diode Dimensions () DC () Blue D-C80 Contact

Auto Switch Guide

Auto Switch Internal Circuit D-C73 LED Brown OUT (+) Contact protection box CD-P11 CD-P12 Brown Resistor Reed switch Zener diode OUT () Blue Weight Blue (g) D-C73 D-C76 D-C80 Auto switch model 0.5 3 5 9 46 76 10 50 9 46 D-C76 Lead wire length (m) DC (+) Brown LED (+) Resistor Reed switch Reed switch Load DC OUT Black Reverse current prevention diode Dimensions () DC () Blue D-C80 Contact

7

17 20 20 15 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 35 15 18 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 20 20 20 20 57 40 17 17 A 19.5 0.2 0.5 25 15 45 45 60 60 Material: Cast iron Unit: mm Material: Cast iron Part no.

IDG

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Hexagon width across flats 14 Hexagon width across flats 17 IDG3, 5 IDG3H, 5H With fitting for purge air discharge (Option: P) 73 40 Dew point indicator (Option: S) (98) 38 30 Purge air 12 2.3 6 17 22 IN OUT 11 Bracket (Accessory: B) 140 Purge air for dehumidification 118

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Weights (g) Bore size (mm) 10 16 Basic 22 46 Axial piping 22 46 Double clevis (including clevis pin) 24 54 Head-side bossed 23 48 Additional weight per 15 mm of stroke 4 7 Basic weight (When the stroke is zero) Single foot 8 25 Double foot 16 50 Rod flange 5 13 Head flange 5 13 Mounting bracket weight Single knuckle joint 17 23 Double knuckle joint (including knuckle pin) 25 21 Rod end cap

HRX-OM-X037

(Recommended tightening torque178 to 185Nm) Gasket (1) CH1 particle filter Fig. 3-17 CH1 side Installation of particle filter HRL Series 3.3 Installation 3-33 HRX-OM-X037 Chapter 3 Transport and Setting Up 3. Attach the CH1 filter bracket.

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

(max. 20 stations) 3 SX3000 5 SX5000 Connector mounting position Symbol Mounting position U U side D D side Valve stations A, B port size Note Symbol 02 Stations SX3000 SX5000 2 stations Port size 4 One-touch fitting 6 One-touch fitting Mixed Symbol Port size 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Mixed Symbol C4 C6 M Double wiring specification C4 C6 C8 M 08 02 8 stations

VXA21/22

42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 Model KC KA KB KH KW LA LL LW LZ ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 Model KC KA KB KH KW LA LL LW LZ ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13

Compact Cylinder

5.5 1/8 13 63.5 15 63 10 to 50 41.5 33.5 46.5 38.5 15 18 70 10 M10 x 1.5 88 6.5 16 8 56 5.5 1/8 14 76.5 15 80 10 to 50 49 40 55 46 21 22 89 12 M14 x 2.0 113 9 19 9 70 9 1/4 14 98 19 100 10 to 50 56 46 62 52 21 26 109 12 105.5 M16 x 2.0 134 12.5 22 10 85 9 1/4 19 118 19 7 JCQ Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9m

CY1F

9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 LL LW LZ Model KC KA KB KH KW LA ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions R V Front flange type (F)/CJ5FS CA Rod cover side GB Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GA NN MM Cover surface BA

DOC1020530

PA02 . 17 4.3 Absolute position detection systemPr. PA03 . 17 4.4 Function selection A-1Pr. PA04 . 17 4.5 Electric gearPr. PA06, Pr. PA07 . 17 4.6 Auto tuning modePr.PA08 . 18 4.7 Input signal automatic on selectionPD01 . 18 4.8 Parameter setting by MR Configurator2TM . 19 4.8.1 Parameter reading . 20 4.8.2 Parameter setting (Ex. Control mode change) . 20 5.

PF2A/PF2W

Refer to page 16-11-10. 16-11-20 17 Series PF2W Digital Flow Switch For Water Dimensions: Integrated Display Type for Water PF2W704, PF2W720 Internal circuit and wiring example 17 58 67 L 6 to are terminal numbers. 1.6 60 Brown 1 Load Main circuit Main circuit OUT1 4 Load Black FLOW SWITCH UP OUT2 2 + 44 54 ZSE ISE 34 SET White OUT2 OUT1 3 DOWN FOR WATER 12 to 24 VDC Blue PSE PF2W7--27(-

ZX

Blue lead wire 13-2-17 17 Series ZX Vacuum Pressure Switch Unit/Adsorption Confirmation Switch: ZSP1S B Hysteresis How to Set Adsorption Confirmation Needle Hysteresis is the difference in pressure when the output signal is ON and OFF. The pressure to be set is the ON pressure. 4.

HRX-OM-Y098

Following items can be set onContinuous pump operation setting screen: Pump operation sustainable temperature Pump operation sustainable time (1) (2) Setting for continuous pump operation Table 5.4-17 Settings for continuous pump operation No.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Stations D side U side SOL.A 1 ( ) ( + ) Black None SOL.B 14 ( ) ( + ) Yellow Black 1 station 1 14 SOL.A 2 ( ) ( + ) Brown None 2 15 SOL.B 15 ( ) ( + ) Pink Black 2 stations 3 16 4 SOL.A 3 ( ) ( + ) Red None 17 5 SOL.B 16 ( ) ( + ) Blue White 3 stations 18 6 19 SOL.A 4 ( ) ( + ) Orange None 7 SOL.B 17 ( ) ( + ) Purple None 4 stations 20 8 21 SOL.A 5 ( ) ( + ) Yellow None 9 22 SOL.B

VQ5000

Stations D side U side SOL.A 1 ( ) ( + ) Black None SOL.B 14 ( ) ( + ) Yellow Black 1 station 1 14 SOL.A 2 ( ) ( + ) Brown None 2 15 SOL.B 15 ( ) ( + ) Pink Black 2 stations 3 16 4 SOL.A 3 ( ) ( + ) Red None 17 5 SOL.B 16 ( ) ( + ) Blue White 3 stations 18 6 19 SOL.A 4 ( ) ( + ) Orange None 7 SOL.B 17 ( ) ( + ) Purple None 4 stations 20 8 21 SOL.A 5 ( ) ( + ) Yellow None 9 22 SOL.B

Ionizer Nozzle type IZN10 Series IZS

Note 1) 20 16 17 Elbow for piping port/IZN10D B C 180 10 (mm) B Model C 16 D 11.5 IZN10-16 (mm) IZN10-17 (inch) 22 24.5 18.5 12 Female threads for piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5