Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 Model KC KA KB KH KW LA LL LW LZ ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 Model KC KA KB KH KW LA LL LW LZ ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13

Compact Cylinder

5.5 1/8 13 63.5 15 63 10 to 50 41.5 33.5 46.5 38.5 15 18 70 10 M10 x 1.5 88 6.5 16 8 56 5.5 1/8 14 76.5 15 80 10 to 50 49 40 55 46 21 22 89 12 M14 x 2.0 113 9 19 9 70 9 1/4 14 98 19 100 10 to 50 56 46 62 52 21 26 109 12 105.5 M16 x 2.0 134 12.5 22 10 85 9 1/4 19 118 19 7 JCQ Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9m

CY1F

9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 LL LW LZ Model KC KA KB KH KW LA ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions R V Front flange type (F)/CJ5FS CA Rod cover side GB Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GA NN MM Cover surface BA

DOC1020530

PA02 . 17 4.3 Absolute position detection systemPr. PA03 . 17 4.4 Function selection A-1Pr. PA04 . 17 4.5 Electric gearPr. PA06, Pr. PA07 . 17 4.6 Auto tuning modePr.PA08 . 18 4.7 Input signal automatic on selectionPD01 . 18 4.8 Parameter setting by MR Configurator2TM . 19 4.8.1 Parameter reading . 20 4.8.2 Parameter setting (Ex. Control mode change) . 20 5.

PF2A/PF2W

Refer to page 16-11-10. 16-11-20 17 Series PF2W Digital Flow Switch For Water Dimensions: Integrated Display Type for Water PF2W704, PF2W720 Internal circuit and wiring example 17 58 67 L 6 to are terminal numbers. 1.6 60 Brown 1 Load Main circuit Main circuit OUT1 4 Load Black FLOW SWITCH UP OUT2 2 + 44 54 ZSE ISE 34 SET White OUT2 OUT1 3 DOWN FOR WATER 12 to 24 VDC Blue PSE PF2W7--27(-

ZX

Blue lead wire 13-2-17 17 Series ZX Vacuum Pressure Switch Unit/Adsorption Confirmation Switch: ZSP1S B Hysteresis How to Set Adsorption Confirmation Needle Hysteresis is the difference in pressure when the output signal is ON and OFF. The pressure to be set is the ON pressure. 4.

HRX-OM-Y098

Following items can be set onContinuous pump operation setting screen: Pump operation sustainable temperature Pump operation sustainable time (1) (2) Setting for continuous pump operation Table 5.4-17 Settings for continuous pump operation No.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Stations D side U side SOL.A 1 ( ) ( + ) Black None SOL.B 14 ( ) ( + ) Yellow Black 1 station 1 14 SOL.A 2 ( ) ( + ) Brown None 2 15 SOL.B 15 ( ) ( + ) Pink Black 2 stations 3 16 4 SOL.A 3 ( ) ( + ) Red None 17 5 SOL.B 16 ( ) ( + ) Blue White 3 stations 18 6 19 SOL.A 4 ( ) ( + ) Orange None 7 SOL.B 17 ( ) ( + ) Purple None 4 stations 20 8 21 SOL.A 5 ( ) ( + ) Yellow None 9 22 SOL.B

VQ5000

Stations D side U side SOL.A 1 ( ) ( + ) Black None SOL.B 14 ( ) ( + ) Yellow Black 1 station 1 14 SOL.A 2 ( ) ( + ) Brown None 2 15 SOL.B 15 ( ) ( + ) Pink Black 2 stations 3 16 4 SOL.A 3 ( ) ( + ) Red None 17 5 SOL.B 16 ( ) ( + ) Blue White 3 stations 18 6 19 SOL.A 4 ( ) ( + ) Orange None 7 SOL.B 17 ( ) ( + ) Purple None 4 stations 20 8 21 SOL.A 5 ( ) ( + ) Yellow None 9 22 SOL.B

ARM10/11

17 5.

ARM10/11

17 5.

Ionizer Nozzle type IZN10 Series IZS

Note 1) 20 16 17 Elbow for piping port/IZN10D B C 180 10 (mm) B Model C 16 D 11.5 IZN10-16 (mm) IZN10-17 (inch) 22 24.5 18.5 12 Female threads for piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5

Stopper Cylinder

11.5 12 17 9 9 13 13 9 9 9.5 10 15 17.5 18 23 15 7 11 19 7 15 12 12.5 17.5 18 18.5 23.5 15.5 9.5 16.5 10.5 15 21 11 17 12 12.5 17.5 22.5 23 28 20 9.5 21 10.5 15 25.5 11 21.5 5.5 6 11 30.5 31 36 28 3 29 4 8.5 33.5 4.5 29.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

MXU

30 0.115 0.099 0.296 37.5 5 0.115 0.099 0.296 37.5 10 0.153 0.132 0.380 46 15 MXU16 12 0.153 0.132 0.380 46 20 0.190 0.165 0.464 50 25 0.190 0.165 0.464 52.5 30 4.

ZQ-OM01401

(41) 36 (33) 66 0.5 59 (54) 52 (49) 41 (39) 79 0.1 0.2 4 0.3 40 (30) 37 (29) 31 (23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B A B B W A stroke 6 5 to 30 0 13 3.5 3.5 6.5 17 2.5(5) 17 4.5 5 to 20 13 17 17 10 25 3.5 16 7.5 7.5 2.5 20 1.5 20 0.5 30 15 19 (1) 19 5 23 27 27 10 18 22 22 15 23 27 27 16 4 8 8 2 2 0 A B 20 18 22 22 Bore (mm) 6 10 16 25 23 27 27 (0.5) 10 6.9 30 23 27 27 14 8.8 19 13.9 Note 1) Negative figures

S Couplers

Rc 1/4 43.4 36.1 17 -03F 1/4 Rc 3/8 6.9 26.4 18.9 44.4 40.2 19 -04F Rc 1/2 48.6 69.7 T KKA6P-03F Rc 3/8 48.7 84.1 24 -04F 1/2 Rc 1/2 10.0 54.2 20.4 52.9 79.7 -06F Rc 3/4 30 54.6 123.8 KKA7P-04F Rc 1/2 67.7 217.1 32 -06F 3/4 Rc 3/4 13.5 99.6 27.6 69.4 196.8 L2 H -10F Rc 1 72.4 325.9 L1 KKA8P-06F Rc 3/4 41 82.0 420.5 -10F 1 Rc 1 17.5 168.3 35.6 85.0 391.3 -12F Rc 1 1/4 50 87.3 552.8 KKA9P-

AC Servo Motor Driver (Pulse input type/Positioning type)

List of Parameters for each Mode .16 4.1 Parameters common to each mode . 16 4.2 Position control mode . 16 4.3 Speed control mode . 17 4.4 Torque control mode . 17 4.5 Positioning mode . 18 5.