KA

KAL23-M5 15 9.6 16 15.5 M5 X 0.8 M6 X 1.0 7 6 8 8 15.5 19.5 21 3.4 2.9 8 4 5 3.2 17.5 1 8 KAL23-M6 KAL23-U01 10 10 15.5 KAL04-M5 M5 X 0.8 M6 X 1.0 8 16 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 20 20.5 KAL04-U01 4.2 4.2 8 14 10 10 1 4 KAL04-U02 22 21.5 14 16 KAL06-M5 9 5 6 M5 X 0.8 M6 X 1.0 18 3.5 3.5 8 8 KAL06-M6 16.5 17 1 8 20 3 8 KAL06-U03 24 23 21.5 14 12.8 KAL06-U01 10 6 23.5

Antistatic One-touch Fittings Series KA

M5, M6 M5, M6 KAL23-M5 15 9.6 16 15.5 M5 0.8 M6 1.0 7 6 8 8 15.5 19.5 21 3.4 2.9 8 4 5 3.2 1 8 KAL23-M6 KAL23-U01 10 17.5 10 KAL04-M5 15.5 M5 0.8 M6 1.0 16 8 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 KAL04-U01 20 20.5 4.2 4.2 8 14 10 10 1 4 KAL04-U02 22 21.5 14 KAL06-M5 16 M5 0.8 M6 1.0 9 5 6 18 8 3.5 3.5 8 KAL06-M6 16.5 Uni thread 17 1 8 KAL06-U01 3 8 KAL06-U03 24 23 21.5 20 14 12.8 6 10 23.5

AS-FG/ASD-FG

Min. d T H D1 D2 D3 L1 L2 L3 Model 4 17.5 29.4 9.3 ASD230FG-M5-04 12.9 9.6 10 28.3 25.5 28.6 25.8 8 M5 x 0.8 11.7 25 7.8 22.2 6 20.6 32.5 11.6 ASD230FG-M5-06 13.7 39.6 34.6 6 14 22.9 38.5 11.6 ASD330FG-01-06S 13.7 14.2 11.8 36.1 31.1 12 R(PT) 1/8 32.1 10.6 27.1 38.9 33.9 8 15.8 28.2 44.8 15.2 ASD330FG-01-08S 18.5 6 25.2 43.5 12.8 17 ASD430FG-02-06S 18 18.5 15 41.7 36.7 40.4 35.4 8 17 R(PT

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-9-45 4 Series AS-FG Construction: Universal Type Meter-out type M5 type U10/32 type AS3301FG-02 Meter-in type M5 type U10/32 type AS3311FG-02 Component Parts No.

MHF2

18 4.5 18 4.5 1.7 4 2-M4 x 0.7 thread depth 5 Mounting thread 3.3 3 15 Groove for auto switch mounting 90 14 Series MHF2 Dimensions MHF2-16D Scale: 50% 4H9 +0.030 0 depth 3 38 4H9 +0.030 0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 57.5 5 M5 x 0.8 Finger closing port 50 72 2-M5 x 0.8 thread depth 5.5 Mounting thread 26 52 10.6 E 20 20 24 33 E 0 -0.1 2-4.3 through (mounting hole

Prevents Micro-Bubbles

x 0.8 46.5 31 67.5 67 19 41.5 13 18 36.5 11.5 19 34 M4 5.5 219 266 313 360 47 36.5 93.5 76 27.5 57.5 17.5 39 53.5 24 27.5 47 M5 6.5 118 177 236 295 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 LLC5A 60 47 111.5 95 33.5 70.5 18 50 63.5 29 33.5 56 M6 7.5 130 189 248 307 75 59 131 114 33.5 70 27.5 62 64 34.5 27.5 56.5 M6 7.5 240 299 358 417 17-5-14 12 Series LVC 3 Port Standard Specifications Model LVC200

CG1

22 26 M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 24 29 M5 X 0.8 M5 X 0.8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 69 (77) 11 11 11 12 13 13 M5 X 0.8 106 (114) 16 16 16 16 18 18 22 22 15 (16) Up to 200 201to350 23 30 19.5 10 (12) 40 69 (77) 111 (119) 15 (16) 16.5 20 26 32 38 50 60 M5 X 0.8 Depth 7.5 5.5 M6 X 0.75 Up to 300 301to400

Series AS-FM/AS-M/ASD-FM

M5 x 0.8 AS120M-M5 9 9 8 10 28.2 24.8 10.3 29.8 33.2 10-32UNF AS120M-U10/32 AS220M-01 12 Rc1/8 R1/8 14.3 14.6 18 31.4 27.4 14.1 32.4 36.4 NPT1/8 AS220M-N01 12.7 AS220M-02 17 Rc1/4 R1/4 18 19.5 27.2 35.9 29.9 18 34.9 39.9 NPT1/4 AS220M-N02 17.5 Dimensions for R and NPT threads after installation 8 Speed Controller for Low Speed Operation Series AS-FM In-line Type Models Applicable tubing

E-P HYREG

Description 0 1 0 1 VY110 0 1 VY120 0 1 VY130 0 1 0 1 0 1 VY140 VY170 0 1 VY190 0 1 VY1D00 VY150 VY1B0 VY1A0 ITV B F G N AN120-M5 VEXA-18-2A VEX1-18-1A VEX3-32A VEX5-32A VEX7-32A VEX9-32A Bracket (With bolt, washer) IC VEXA-18-3A VEX1-18-2A G27-10-01 AN120-M5 G36-10-01 AN101-01 AN120-M5 G46-10-01 AN210-02 G27-10-R1-X207 Pressure gauge ITVH Pilot EXH port silencer ITVX Sub-plate and Base Gasket

Sine Cylinder Series REC

Y-020B Y-032B Y-040B Size 0.2 0.1 9 Type C9 for shaft 46 16 20 25 36 M8 x 1.25 9 18 5 14 CDP-1 0.2 0.1 9 Type C9 for shaft 48 18 20 25 38 9 18 5 14 M10 x 1.25 MQ CDP-1 0.3 0.1 16 3 x 18 l 68 22 24 55 12 38 13 25 49.7 M14 x 1.5 CDP-3 Knuckle pins and retaining rings (cotter pins for 40) are included.

Sine Cylinder Series REC

Y-020B Y-032B Y-040B Size 0.2 0.1 9 Type C9 for shaft 46 16 20 25 36 M8 x 1.25 9 18 5 14 CDP-1 0.2 0.1 9 Type C9 for shaft 48 18 20 25 38 9 18 5 14 M10 x 1.25 MQ CDP-1 0.3 0.1 16 3 x 18 l 68 22 24 55 12 38 13 25 49.7 M14 x 1.5 CDP-3 Knuckle pins and retaining rings (cotter pins for 40) are included.

SMC Electronic Switch Series Variations

0 to 100kPa R(PT) 1/8, M5 X 0.8 L NPTF 1/8, M5 X 0.8 Note) M5 X 0.8 (female) thread.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Min. d T H D1 D2 D3 L1 L2 L3 Model AK 4 ASD230FG-M5-04 17.5 12.9 12 29.4 9.3 28.3 25.5 28.6 25.8 9.6 10 11.7 8 M5 x 0.8 25 22.2 7.8 6 ASD230FG-M5-06 20.6 13.7 13 32.5 11.6 VCHC 39.6 34.6 14 6 ASD330FG-01-06S 22.9 13.7 29 38.5 11.6 35.2 30.2 14.2 11.8 12 R 1/8 32.1 27.1 10.6 38.9 33.9 15.8 8 ASD330FG-01-08S 28.2 18.5 31 44.8 15.2 ASR ASQ 6 ASD430FG-02-06S 25.2 17 53 43.5 12.8 18 41.7 36.7

MQQ

x 0.8 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13

XL

Port S (10) remains pressurized and valve S (18) remains open.

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

) P=10.5 13.5 (L3) 3 L2 6 .5 L1 2 1 16 .5 Station 5.5 D side 2.3 2-M5 X 0.8 External pilot port (Only external pilot style(R)) 7.8(C3, C4, C6) 21.6 (M5: 5.7) 35 5.5 53 300 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (Top piping) 39.5 7.8 42.5 P R 1 3 15 8 2-M5 X 0.8 PE port 13.4 2-Rc(PT)1/8 R(EXH) port 16.3 The broken line indicates DIN rail mounted style [-D]. 41.2 2-Rc(PT)1/8 P(SUP)

High Vacuum Angle Valve, XL Series

Port S (10) remains pressurized and valve S (18) remains open.

CHKD/CHKG

(mm) Rod end male threads Water resistant type (mm) a b c e f g h Bore size (mm) B C N S g h A Bore size (mm) 20 20 12.5 15 M10 x 1.25 6 10 23 66 61 43 18 26.5 6 33 76 25 25 15.5 18 M12 x 1.25 6 12 26 71 63 45 18 30 6 36 81 32 32 22 25 M16 x 1.5 7 14 35 86 71 51 20 38 7 45 96 40 40 27 30 M20 x 1.5 7 19 40 95 75 55 20 45 7 50 105 50 50 32 35 M24 x 1.5 8 24 46 106 81 60 21 55 7 56 116 63 63

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

How to Order Manifold Assemblies (Example) Double solenoid (24VDC) SY3260-5G-C6 (2 sets) Cylinder port size M5: M5 x 0.8 Example Single solenoid (24VDC) SY3160-5G-M5 (2 sets) Cylinder port size C6: With 6 One-touch fitting Manifold base (4 stations) SS5Y3-60-04U R D side Port R C8: With 8 One-touch fitting P Stations 1 2 n Port P C8: With 8 One-touch fitting U side SS5Y3-60-04U 1 set (type