2/3 Port Valve

20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 1 4 3 8 4.1-71 Direct Air Operated 3 Port Valve/Manifold Series VVXA31/32 For Air, Gas, Vacuum and Oil Compatible with a wide variety of fluids.

EXxx-OMN0035CN

) ST(I) (07 ) ST(O) ON/OFF (07 ) ST(I) ON/OFF (07 ) ST(O) (07 ) (SI ) -52No.EX-OMN0035CN-A OFF (LED 0707) ON (LED 07) ()07 ON (LED 07) ()07 (SI ) -53No.EX-OMN0035CN-A EX600-DMPE EX600-DMNE EX600-DMPF EX600-DMNF PNP NPN PNP NPN D-sub(25 ) No.4-40 UNC (32 ) 8 () DC24 V Class22 A 2 A/ 0.5 A/ 2 A/ 4.7 k 5 mA ON /ON 17 V /3 mA (NPN 24 V ) (PNP 0 V ) OFF /OFF 5 V /1 mA (NPN

LEC-OM02704CN

DC24V 2. 20 3. 4. 5. 6. 7. 8.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings) With flow rate adjustment (Max.

One-touch Fittings Series KQ2

D1 D2 L M A Nylon Urethane M5, M6 KQ2S04 to 12 KQ2S16 M5 0.8 M6 1.0 KQ2S04-M5 KQ2S04-M6 KQ2S04-01S KQ2S06-M5 KQ2S06-M6 KQ2S06-01S KQ2S06-02S KQ2S08-01S KQ2S08-02S KQ2S08-03S KQ2S10-01S KQ2S10-02S KQ2S10-03S KQ2S10-04S KQ2S12-02S KQ2S12-03S KQ2S12-04S KQ2S16-03S KQ2S16-04S 2.7 2.8 8 3.3 3.4 9 15 12 11 24 18 12 19 35 23 18 30 42 34 15.6 14.1 19 16.4 15 20 20 24 19.5 21 26 21.5 21 20 27.5 22.5

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Recommended flow rate Note) (l/min (ANR)) Internal capacity (cm3) 1.7 Mass (g) ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 1.7 4.3 ZR Metric size Easy installation

LEC-OM07605CN

(b) OFF ON OFF 63.4% CDT = 100 ms 100 50 100 4.00 10.00 4.00 120 84 120 3000 4000 3000 20 50 20 1 50 60 50 1 50 60 50 1 0.20 0.15 0.20 1 0.20 0.15 0.20 2 20 30 20 2 20 30 20 2 0.10 0.05 0.10 2 0.10 0.05 0.10 (2) (a) PB06 GD2 4.00 [] PB08 PG2 120 [rad/s] PB09 VG2 3000 [rad/s] PB10 VIC 20 [ms] PB29 GD2B 10.00 [] PB30 PG2B 84 [rad/s] PB31 VG2B

JXCx-OMT0061CN

5.4 CN5: . 20 6.

Piping: Base Mounted Common SUP Individual EXH, Flat Cable, Stations: 7 Stations, A, B Port: ø4 One-touch Fitting

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: M5 (M5X0.8)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: M5N (Base Mounted M5X0.8 NPT)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: 01 (Rc1/8)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: 01T (NPTF1/8)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: C6 (ø6 One-touch Fitting)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: N7T (1/4" One-touch Fitting)

Piping: 43 (Base Mounted Common SUP Individual EXH), Stations: 7 Stations, A B Port Size: N3T (5/32" One-touch Fitting)