5 Port Solenoid Valve

Insulation resistance MW/km, 20C 5 or more 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 Note) The minimum bending radius for D-sub connector cables is 20 mm.

Modular/F.R.L. Units Series AC

) Note 14) Note 14) Note 14) Note 14) Note 14) Note 14) Note 10) Metal bowl: The combination of 2 and 8 is not possible.

Guide Cylinder Series MGG

Bore size (mm) For lock type For non-lock type Bore size (mm) Rod end lock Head end lock Bore size (mm) 20 25 32 40 50 W X Z HN HR Q Y R Y R Q 20 25 32 40 50 20 25 32 40 50 40 39 157 38.5 12(14) 98(106) 12 37 25.3 11 95 46 46 175 39 12(14) 98(106) 12 40 28.3 11 95 52 46 201 40 12(14) 101(109) 12 43 31.3 11 97 62 56 238 41 12(15) 109(118) 13 52.5 38.3 11 111 75 67 285 47 14(16) 125(137) 14

Valve Single Unit

20 00N 20 stations NPT SS5X3-20-05 (5 stations) NPTF 00T Stations3 2 1 Connector assembly for L and M types Refer to page 1-6-8.

5 Port Solenoid Valve Series VQZ1000/2000/3000

(L) L1 26 (Station 1) (Station n) 8 140 [144.4] R2 3 P 1 5 R1 127 [131.4] 37.4 1 0 PWR 7 6 20 20 66.5 14 9 8 COM 15 16 58.1 [60.3] X Connector locking pin (Remove before wiring the connector assembly.)

7.5

) SOL.a (14) SOL.a (14) SOL.a (14) SOL.a 22.5 90.5 22.9 56.2 Note) Reduces supply pressure from the D side of manifold.

Fieldbus System

14 14 14 14 14 14 D side U side For the I/O Unit part number mounted, refer to the following pages.

Air Cylinder

(mm) Bore size Stroke range CDH10 CX (mm) A AL B B1 C CZ D E F G H1 J K KA L (mm) 40 50 63 80 +0.3 +0.1 10 12 16 20 25 +0.084 +0.058 0 15 18 25 Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41 44 52 64 78 92 29.5 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 8 M8 x 1.25 M8 x 1.25 6 7 7 14 18 18 22 26 30 35 40 48 58 +0.3

Micro Mechanical Valve Series VM1000

EXH.1 (C1) 2 (C2) 4 93.7 23 19 VH 18.5 18.5 12 CYL.2 CYL.1 14 12 21 20 3 (E1) 1 (S) 5 (E2) VHS 0.5 MPa supply 30.5 26.4 3 x 1/4 VHS T.T.

Programless Controller Series LECP1

Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) Cable length (L)[m] 1 3 5 8 A B C (17.7) (17.7) 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 10 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 15 (14.2) Connector C (Terminal no.) 1 2 5 6 20 (5.5) (6.3) Actuator side (14) (18) (Terminal

ITV

(For details, refer to page 14-8-11 in Specific Product Precautions.) 26.5 PPA Bushing assembly 2.7 AL Note) For dimensions of the cable connector, refer to single unit on page 14-8-8. 14-8-9 10 Series ITV0 Dimensions Manifold 20 40 20 40 4-M3 x 0.5 thread depth 3 Mounting hole 11 11 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Misc. 14-20-59 How to Order Bowl Assembly 14-20-62 Precautions 14-20-64 Information on Items to be Discontinued and Equivalent Products Auto-Drain Valve, Motor Operated Auto-drain, Heavy Duty Auto-Drain, Pressure Differential Gauge 14-20-49 Related Products Note) It describes the degree of compressed air quality based on ISO8573-1: 1991 and JIS B 8392-1: 2000. 14-20-1

CNA

40 10 95 17 56.5 20 13 15 12 11 to 600 35 32 86 27 115 1/4 1/4 64 16 25 20 40 10 102 17 67 20 18 12 15 11 to 600 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 to 750 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25 20 19 16 to 750 (mm) Bore (mm) 40 50 63 80 100 K J KA L MM N P Q H S T U V W Z ZZ RR 6 M8 X 1.25 14 30 M14 X 1.5 27 1/4 37 to 39.5 51 10 153

HRX-OM-X084

20. 9-10 9.4.4 HRR010-W-20. 9-10 9.5 Heating capacity . 9-11 9.5.1 HRR010-A-10. 9-11 9.5.2 HRR010-W-10. 9-11 9.5.3 HRR010-A-20. 9-12 9.5.4 HRR010-W-20. 9-12 9.6 Pump capacity. 9-13 9.6.1 HRR010-A/W-10 . 9-13 9.6.2 HRR010-A/W-10-T1 . 9-13 9.7 Required facility water flow (for water-cooled type) . 9-14 9.7.1 HRR010-W-10/20. 9-14 9.8 Types of Hazard Labels . 9-15 9.8.1 Locations of Hazard Labels

High Purity Fluoropolymer

Model G F B H L E M M H LQ1T2A LQ1T1A 2 1/8" 10 11.5 18.5 8 4 1/2" 3/4" 3/8" 1/2" 1/4" 3/8" 1/8" 3/16" 1/4" LQ1T3B LQ1T3A LQ1T2C LQ1T2B 15 16.5 28 14 12 6 4 25 1 5 Class 6 23 36.5 17 18 9 20 LQ1T4A LQ1T4B 6 28 11 22 21 45 20 LQ1T6B LQ1T6A LQ1T5B LQ1T5A 7 29 39 26 28 14 54 3/4" 1" 8 39.5 49 18 36 36 69.5 14 Series LQ1 Dimensions Panel Mount Union: LQ1P Metric sizes Applicable tubing O.D.

Free Mount Cylinder Series CU

(mm) D-A9, D-A9V D-M9, D-M9W D-M9V, D-M9WV Bore size (mm) A B W A B W A B W 6 10 16 20 25 32 13.5 5.5 3.5 (1) 17.5 9.5 0.5 17.5 9.5 1.5 12.5 9.5 7.5 (5) 16.5 13.5 3.5 16.5 13.5 5.5 16 11.5 9.5 (7) 20 15.5 5.5 20 15.5 7.5 20 15 24 19 9 24 19 11 13 (10.5) 22.5 16 26.5 20 10.5 26.5 20 12.5 14.5 (12) 23.5 18.5 27.5 22.5 12.5 27.5 22.5 14.5 16.5 (14) Note 1) Figures in the table above are used

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

CY1L15/20/25/32/40 (mm) d B A L JK J HI HG H G FB FA D C Model LD HT HS HP HO HB HA GP EB EA CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 12 9.5 7.5 75 9.5 M6 x 1.0 14 16 40 6.5 6 3 16.6 5 5.6 16 25 39 38 4 6.5 65 13 6 16 9.5 9.5 86 10 M6 x 1.0 16 18 46 8.5 21.6 5.2 5.6 20 31 45 44 10 9 80 16 11 9.5 86 10 M8 x 1.25 21 23 54 8.5 7 4 26.4 6.5 7 20 39 53 52 18 9 90 14 8 20 14 10.5 100 15 M10 x 1.5

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

to 500 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 6 14 9 50 Up to 600 20 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25 7 18 9 63 Up to 600 20 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 7 18 11.5 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 10 22 13.5 100 Up to

Cylinder with Lock Series MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Station 20 24 11 24 24 SOL.a 3 SOL.b Station 5 3 SOL.b Station 5 SOL.a Station 4 15 SOL.a Station 4 15 Station 2 SOL.b 15 2 SOL.a Station 3 2 SOL.a Station 3 SOL.a 2 SOL.a Station 2 14 SOL.a Station 2 14 Station 1 SOL.b 14 1 SOL.a Station 1 1 SOL.a Station 1 SOL.a 1 The common polarity should be the same as the common specifications of the valve to be used.