CE2

58 0 254 3/8 187 334 31 M18 x 1.5 stroke 80 12.5 65 372 71 0 284 1/2 205 37 381 M22 x 1.5 81 14 65 389 72 0 300 1/2 214 398 40 M26 x 1.5 Foot style LS + Stroke ZZ + Stroke LD ZZ Y X LX LS LH B Bore size (mm) 40 50 63 80 100 9 309.5 13 27 42 272.5 40 58.5 9 333.5 13 27 50 289.5 45 68.5 11.5 362 16 34 59 322 50 83 13.5 415 16 44 76 372 65 100 13.5 432 17 43 92 386 75 114 10-12-50 8 Stroke

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100

Compact Manifold Regulator

100 150 Flow rate L/min (ANR) Flow rate L/min (ANR) Condition: Inlet pressure 0.7 MPa ARM11AA1-310-1 (One-touch fittings: IN 8, OUT 6) Condition: Inlet pressure 0.5 MPa ARM11AA1-310 (One-touch fittings: IN 8, OUT 6) 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.00 0 0 50 100 150 200 0 50 100 150 200 250 300 Flow rate L/min (ANR

Compact and Lightweight

Refer to back page 50 for Safety Instructions and pages 49 to 51 for Vacuum Equipment Precautions. Mounting Caution Caution ZK2 1.

P

Adaptor connection thread Symbol Pad dia. 1 02 to 08 B5 2 10 to 16 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [qAdaptor] R S ZP 04 A5 [wR type adaptor] Symbol S Pad dia. 02 to 16 L 20 to 50 With Buffer ZP R 16 K20 A10 06 UGN [Pad model no.]

ARM10/11

If vibration is applied, malfunction or setting errors may result. 14-4-50 33 F.R.L.

ARM10/11

If vibration is applied, malfunction or setting errors may result. 14-4-50 33 F.R.L.

SYJ300-OMU0003

(-Q) SYJ700 SYJ700 M3 : 0.8N.m O 21 No.SYJ300-OMU0003 Assy SYJ72(R)(-Q)) (SYJ74(R)(-Q)) SYJ700-10-1A M3 : 0.8N.m :SYJ700-10-2A , (SYJ700-5-3) SYJ700-10-1AAss'y CE SYJ700-10-2A-1-Q SYJ700-10-2A-2Q 22 No.SYJ300-OMU0003 Assy 5 G V111 T S (DC24V,12V) Z *W R () U () 5 DC24V *AC S *RU DC *Z 6 DC12V V DC6V S DC5V G 300m R DC3V H 600m 1 AC100V50/60Hz )V111 CE L -Q 2 AC200V50/60Hz

Model: 2000 (VQC2000), Supply / Exhaust Port Entry: 1 (Cylinder Port Side), Port Size: C10 (10mm), Option: S (Direct EXH Outlet w/ Silencer)

Model: VQC2000, Supply / Exhaust Port Entry: Branch Type, VQC2000 Only, Port Size: 10mm, Option: External Pilot

Model: VQC2000, Supply / Exhaust Port Entry: Branch Type, VQC2000 Only, Port Size: 10mm, Option: Direct EXH Outlet w/ Silencer

Model: VQC2000, Supply / Exhaust Port Entry: Cylinder Port Side, Port Size: 10mm, Option: Direct EXH Outlet w/ Silencer

Model: VQC2000, Supply / Exhaust Port Entry: Cylinder Port Side, Port Size: 10mm, Option: External Pilot

Model: 2000 (VQC2000), Supply / Exhaust Port Entry: 1 (Cylinder Port Side), Port Size: C10 (10mm), Option: R (External Pilot)

Model: 2000 (VQC2000), Supply / Exhaust Port Entry: 2 (Branch Type, VQC2000 Only), Port Size: C10 (10mm), Option: S (Direct EXH Outlet w/ Silencer)

Model: 2000 (VQC2000), Supply / Exhaust Port Entry: 2 (Branch Type, VQC2000 Only), Port Size: C10 (10mm), Option: R (External Pilot)

E-P HYREG

Proper tightening torque (Nm) Connection thread size (R, NPT) 3 to 5 8 to 12 15 to 20 20 to 25 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 1 8 1 4 3 8 1 2 3 4 Ground nut 1 1 1 2 Washer Retaining screw 1 4 1 2 Grommet (Rubber) Housing Operating Fluid Caution 1.

VQZ100/200/300

Coil voltage 1 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others When requiring AC specification of grommet or special voltage, consult SMC. 2 3 4 5 6 9 2.10-5 VQZ100/200/300 Body Ported Standard Specifications Seal Metal seal Rubber seal Air, Inert gas Fluid 0.7MPa (High pressure style: 1.0MPa) 0.7MPa Max.operating pressure 0.1MPa 0.15MPa

CM2

301 to 400 156 160 160 165 401 to 500 181 185 185 190 20 25 32 40 30 32 32 41 36 36 36 46 24 24 24 25 With Rod Boot l ZZ Symbol Z 1 to 50 143 147 149 181 Stroke Bore size (mm) 1 to 50 12.5 12.5 12.5 12.5 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 301 to 400 100 100 100 100 401 to 500 125 125 125 125 1 to 50 63 67 67 71.5 51 to 100 76

CG5-S

14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 80 22 234 14 23 6 40 80 87.2 57 9 144.5 120 80 291 257 CG-E080SUS 100 22 235 14 23 6 40 80 87.2 57 9 144.5 120 80 292 258 CG-E080SUS Plug bolts are installed before shipment from factory.