CG1

CS1 Trunnion (mm) Stroke range Bore (mm) TV TT TS TR TH TF B TDe8 TE Front Rear 0.025 0.047 0.025 0.047 0.032 0.059 0.032 0.059 0.032 0.059 0.032 0.059 20 25 32 40 50 63 3.2 3.2 4.5 4.5 6 8 28 33 40 49 60 74 39 43 54.5 65.5 80 98 25 30 35 40 50 60 5.5 5.5 6.6 6.6 9 11 Up to 200 Up to 200 8 10 12 14 16 18 35.8 39.8 49.4 58.4 72.4 90.4 38 45.5 54 63.5 79 96 10 10 10 10 20 20 Up to 300 Up to

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concentration (Particles/ft3) 10 10 Speed: 500mm/s 10 Speed: 1000mm/s 200 150 100 50 25 Vacuuming flow (l/min ANR) Test environment: Nippon Airtek: VS-1603L W x L x H = 620mm x 1550mm x 730mm Fed-st class 10 Approx. 0.3m/s Grease Application Areas Test equipment: Laser particle counter Hitachi Electric Engineering: TS

Electric Actuators

concentration (Particles/ft3) 10 10 Speed: 500mm/s 10 Speed: 1000mm/s 200 150 100 50 25 Vacuuming flow (l/min ANR) Test environment: Nippon Airtek: VS-1603L W x L x H = 620mm x 1550mm x 730mm Fed-st class 10 Approx. 0.3m/s Grease Application Areas Test equipment: Laser particle counter Hitachi Electric Engineering: TS

LJ1H

concentration (Particles/ft3) 10 10 Speed: 500mm/s 10 Speed: 1000mm/s 200 150 100 50 25 Vacuuming flow (l/min ANR) Test environment: Nippon Airtek: VS-1603L W x L x H = 620mm x 1550mm x 730mm Fed-st class 10 Approx. 0.3m/s Grease Application Areas Test equipment: Laser particle counter Hitachi Electric Engineering: TS

AS-FPQ/AS-FPG

ASF Recommended Applicable Tubing Tubing material Clean series polyurethane tubing: Series 10 Tubing O.D. 4, 6, 8, 10, 12 Polyurethane tubing: Series TU, Nylon tubing: Series T and Soft nylon tubing: Series TS can also be used. However, the degree of clean performance will decline. Relation between Operating Temp. and Max.

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ASF Recommended Applicable Tubing Tubing material Clean series polyurethane tubing: Series 10 Tubing O.D. 4, 6, 8, 10, 12 Polyurethane tubing: Series TU, Nylon tubing: Series T and Soft nylon tubing: Series TS can also be used. However, the degree of clean performance will decline. Relation between Operating Temp. and Max.

“Going to

Other Standard SMC Tubing Products: Catalog N500 Catalog N501 Series TU & TIUB Polyurethane Tubing Series TUH Hard Polyurethane Tubing Series TUS Soft Polyurethane Tubing Catalog ES50-17 Series TCU Polyurethane Coiled Tubing Series TPH & TPS Polyolefin Tubing Series TFU Flat Polyurethane Tubing Catalog ES70-17 Series T & TIA Nylon Tubing Series TL & TIL High Purity Fluoropolymer Series TS

TUH Series

(D2) TUH/High pressure type TU 8 2.5 4 5 6.5 1in = 25.4mm Operating pressure 1.0MPa (at 20C) [145 psi @ 68F] TUH/High Pressure Type Same operating pressure as series TS soft nylon tubing, and a bending radius equivalent to series TU polyurethane tubing. Can be restored even after folding Restoration is outstanding compared to nylon tubing, leaving no creases from folding.

Microspeed Cylinder

Measuring conditions 10-CQSXB20-50D Chamber volume Cleanliness of air supplied to chamber 15l (0.53ft3) Same quality as supply air Hitachi Electronics Engineering Corporation TS-6200 Min. measurable particle dia. 0.1m Intake rate 28.3l/min (0.99CFM) Sampling time: 5min Interval time: 55min Operation frequency: 30cpm Average piston speed: 100mm/s (3.9inls) Mounting: Horizontal no-load Supply

AS-FPQ/AS-FPG

Recommended Applicable Tubing Tubing material Clean series polyurethane tubing: Series 10 Tubing O.D. 4, 6, 8, 10, 12 Polyurethane tubing: Series TU, Nylon tubing: Series T and Soft nylon tubing: Series TS can also be used. However, the degree of clean performance will decline.

VT317

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil no. PVT317-001GBPVT317-G PVT317-001GB-L06 PVT317-G-06 PVT317-001CBPVT317-C Coil assembly with terminal part no.

VT325

Air flow direction: z Block, x c Conduit terminal (TS) Coil When the coil y is energized the plunger u is pulled down depressing the spool e via the overtravel assembly i and the air passage between port z and port x is opened and port c is blocked.

Body Size: 20 (ø20mm), Body Material: S (Stainless Steel), Mounting Plate: TS (With mounting plate - Stainless-steel), Attachment: VS (with Vibration Suppression Cover; Stainless Steel), Pressure Sensor: S (with Pressure Sensor; Part Number PSE541-M5-X2)

Air Cylinder CP Series Cylinder Positioner Assembly

o59) 2.24 (s) 2.05 (52) 0.59 (1s) 2.60 (66) s T o 167 '1.22 {40) o 6 7 tlr) M10x1.25 0.24 (7) (14) M18x1.5 (31) 3.86 (98) 3.39 (86) 0.,15 0 5 9 (15) 4 . 1 3 (1051 2.42 (59) 5 . 1 2 1130) 224 (58) 6.69 (170) 2.24 (58i (52) 0 6 9 r7.5) e.60 (66) 1 m 1 3 8 {35) 3.98 o 0 1 ) 3.35 (85) 2.52 (64) 0.79 (20) 1 5 7 1.57 (40) 4 6 9 ( 1 1 9 ) a 0 2 (102) 3.07 (73) 0.94 (251 2.05 (52) 0.83 121) M12x1.Ts

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Recommended Applicable Tubing Tubing material Clean series polyurethane tubing: Series 10 Tubing O.D. 4, 6, 8, 10, 12 Polyurethane tubing: Series TU, Nylon tubing: Series T and Soft nylon tubing: Series TS can also be used. However, the degree of clean performance will decline.

Microspeed Cylinders CJ2X/CUX/CQSX/CQ2X/CM2X

Measuring conditions 10-CQSXB20-50D Chamber volume Purity of air supplied to chamber 15l Same quality as supply air Evaluation of air purity inside chamber 100 Particle concentration (particles/cf) Hitachi Electronics Engineering Corporation TS-6200 Min. measurable particle dia.: 0.1m Intake rate: 28.3l/min 10 Laser dust monitor 1 Sampling time: 5min Interval time: 55min Operation frequency

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

concentration (Particles/ft3) 10 10 Speed: 500mm/s 10 Speed: 1000mm/s 200 150 100 50 25 Vacuuming flow (l/min ANR) Test environment: Nippon Airtek: VS-1603L W x L x H = 620mm x 1550mm x 730mm Fed-st class 10 Approx. 0.3m/s Grease Application Areas Test equipment: Laser particle counter Hitachi Electric Engineering: TS

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

The difference belwen the operaling position (ON) ol switch and lhe rtuming posllion (OFF) is .08 in. or less in a feed switch and .M in. or less in a solid stale Contact protective box/lnternal circuit CD"P11 cD-Pl2 Contact protective bo)dDimensions Inch (1Jlg,ll ts 3ffiffi Rlr._*r:i --]j.

Air Pilot Operated Series NVSA

Th pilot prossure r6quired ts atways constant, regardt6ss of the pre;sure In lhe maln passages. This leaturo makes the valvos the ideat companton fo, atr togic sy6tems, aagunng aconstant response from cycl to cycle. No oth6rtype ol valve actlon pbvldes this constant relpons. Th standard outpt t prssua tor moving part air togic i3 50 pslc. (3.4 i::l1*IHlT, fr 'l"JiT:",,K'::l';"".J,1"1^"?

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

Lubricant Table ttanuf9ctuf's I LuDrrcrm BP THB 32 Castrol Perfecto T32 ESSO/Exxon TERESSO 32 Mobil DTE Lig ht Shell Turbo T32 @ 4 Port Solenoid Yalve NVZlOOO Symbol NVZ1120 A B NVZ1120-OG-t\,ts-F NVZlI2GOG.M5 Model o.2 (90) Spec ifications Air, Inert gases Operating Pressure range 20-1ooPst(1.5Ambient and fluid Max.120'F(50"C) Response time 15 ms or less (atTOPSI) Max.operating 900 cpm