Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible / Lubrication Free / Copper-Free Fluoropolymer Material / Low Current, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5), Option: F (Bracket)

Function: 3 (3 Position Closed Center), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5), Option: F (Bracket)

Function: 2 (2 Position Double), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5), Option: F (Bracket)

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5), Option: F (Bracket)

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: Standard, Rated Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: None, Port Size: M3 (Body Ported M3X0.5), Bracket: F (Bracket)

Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Surge Suppressor: Surge Suppressor w/Light Non-polar, Manual Override: Non-locking Push Type, Port Size: Body Ported M3X0.5, Option: Bracket, CE Marked: -

Function: 3 Position Closed Center, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Surge Suppressor: Surge Suppressor w/Light Non-polar, Manual Override: Non-locking Push Type, Port Size: Body Ported M3X0.5, Option: Bracket, CE Marked: -

Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Surge Suppressor: Indicator Light w/Surge Suppressor Non-polar, Manual Override: None, Port Size: 1/4" One-touch Fitting, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -

Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Surge Suppressor: Indicator Light w/Surge Suppressor Non-polar, Manual Override: None, Port Size: ø4 One-touch Fitting, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -

Function: Normally Closed, Piping: Body Ported, Body Option: Individual EXH, Specifications: Standard, Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Surge Suppressor: Surge Suppressor w/Light Non-polar, Manual Override: Non-locking Push Style, Port Size: Base Mounted w/Sub-plate 1/8, Body Ported 1/8, Thread: NPT, Bracket: Bracket, CE-Compliant: -

Function: Normally Closed, Piping: Body Ported, Body Option: Individual EXH, Specifications: Standard, Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Surge Suppressor: Surge Suppressor w/Light Non-polar, Manual Override: Non-locking Push Style, Port Size: Base Mounted w/Sub-plate 1/8, Body Ported 1/8, Thread: Rc, Bracket: Bracket, CE-Compliant: -

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Lightweight: Max. 21 g lighter (When an M5 female thread is used.) ZSE20(F)/ ISE20 ZSE30A(F)/ ISE30A 17.5 mm (20/20A) ZSE20(F)/ISE20 M5 female thread ZSE30A(F)/ISE30A M5 female thread Improved Installability Enclosure Grommet type Connector type Wiring is possible after piping has been connected.

Proposals for Energy Saving

VM-33A Push button (Flush) VM130-01-33 VM132-M5-33 VM-34AR Red VM130-01-34R VM130-01-34B VM130-01-34G VM130-01-34Y VM132-M5-34R VM132-M5-34B VM132-M5-34G VM132-M5-34Y Selector (2 position) VM-34AB Black VM-34AG Green VM-34AY Yellow VM-36A Key selector (2 position) VM130-01-36 VM132-M5-36 Red VM151-01-35R VM151-01-35B VM151-01-35G VM151-01-35Y VM153-M5-35R VM153-M5-35B VM153-M5-35G VM153-M5

Table of Contents

/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only 1 2 AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F Caution Be sure to read before handling.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

) 23 7 2.3 R P Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 11 11.5 M plug connector (M): 10-SYJ52M-M-M5 (-F) DIN terminal (D,Y): 10-SYJ52MD Y-M5 (-F) M8 connector (WO): 10-SYJ52M-WO-M5 (-F) L plug connector (L): 10-SYJ52M-L-M5 (-F) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 65.5 [67.7] 60.9 28.1 [35.1]

MY1

NH NC DTT UU TT UU Auto switch magnet holder M5 x 0.8 (Port) -X GA GA 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) Cushion needle G G 20GB M5 x 0.8 (Hexagon socket head plug) N A M5 x 0.8 (Port) Data Z + Stroke M5 x 0.8 (WW) (WW) (Hexagon socket head plug) 2 x 2-J depth K M5 x 0.8 (Hexagon socket head plug) XX XX M5 x 0.8 (Port) VV VV 2-M5 x 0.8 (Hexagon socket

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

•

"F: 1 , 0 F . Model M' ;8 C R ~ !F. G ;K '.

A

Bore size A B C DA DB E F G GA GB H J K L MM ML NN P PW 12 39 39 29 6 8 0 8 29 11 7.5 58 16 13 18 M4 x 0.7 10 M4 x 0.7 M5 7 16 43 43 33 8 10 0 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 5 20 47 47 37 10 12 0 8 36 10.5 8.5 74 19 17 26 M5 x 0.8 13 M5 x 0.8 1/8 7 S L I D E B E A R I N G 25 47.5 47.5 37.5 12 16 0 8 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 1/8 8 32 71.5 47.5 37.5 16 20 24