VQ5000 position D side U side TD TU Terminal block box 2 to 12 stations IP65 compatible 2-6-8 9 Base Mounted Series VQ5000 Plug-in Unit Manifold Specifications Porting specifications Maximum applicable stations Applicable solenoid valve 5 station weight (kg) 4(A), 2(B) port location Note) Series Base model Type of connection Port size 1(P) , 5(R1) , 3(R2) 4(A), 2(B) F, L, T1 kits 12 stations F
40 24.5 1/4 32 35 52.5 28 69.5 57.5 104.5 73.5 XSA3-32V 56 XSA3-43S 64.5 31 3/8 XSA3-43V 67 82.5 72 58.5 66 72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting size 2 1 Q B 2 x M5 thread depth M A Q Grommet: GS Flat terminal: F Conduit: C 11 G F 300 G F 280 G F Terminal part Flat terminal
Bore size (mm) 12 16 20 25 32 40 Distance between guide rods GP 50 65 80 90 110 130 GP > 0.5 Calculation of load ratio to the theoretical output of cylinder = f / F Horizontal mounting: f = x W Inclined mounting: f = x Wcos + Wsin (Refer to the figure on the right.)
VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.
5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.
Vertical mounting: f=W =0.3(Slide bearings) =0.1(Ball bushing bearings) MGC W MGF b 0.5 q CY1 q MY1 NO Confirmation of adjusting bolt capacity W WA Determine the movable weight WA which can be operated only by adjusting bolts.
0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !
2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.
IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.
(N) Allowable end load F (N) Allowable end load F (N) MGCM40Stroke -R (Slide bearing type) St: Stroke (mm) Allowable end load F (N) MGCM50Stroke -R (Slide bearing type) St: Stroke (mm) Allowable end load F (N) 8-22-8 9 Series MGC Guide Cylinder Compact Type Ball Bushing Bearing Allowable End Load and Deflection MGCL20Stroke -R MGCL25Stroke -R MGCL32Stroke -R (Ball busing bearing type) (Ball
H J K u 1 5 7 {40) 1 1 8 1 0 0 0 8 ( 3 0 1 0 2 ) 1 8510008 (47 lO 2t 1 3 2 {33 5) ) 7 1 I t a t 0 9 6 t24 E\ r 1 8 t30l 1 3 0 7 5 ) 0 7 5 fi9 0 008 o2l , 2 C (s) 224 157) Millimeters in Parentheses Millimeters in Parentheses NVM830-N01-13 Nylon Roller Loosen hex socket screw and adjust NVM830-N01-14 Rod may b6 bent: bending is 0 39" {1 omm) I I J F O F 0 5 1 l b s ( 0 2 3 k q ) F O F ' 4
H J K u 1 5 7 {40) 1 1 8 1 0 0 0 8 ( 3 0 1 0 2 ) 1 8510008 (47 lO 2t 1 3 2 {33 5) ) 7 1 I t a t 0 9 6 t24 E\ r 1 8 t30l 1 3 0 7 5 ) 0 7 5 fi9 0 008 o2l , 2 C (s) 224 157) Millimeters in Parentheses Millimeters in Parentheses NVM830-N01-13 Nylon Roller Loosen hex socket screw and adjust NVM830-N01-14 Rod may b6 bent: bending is 0 39" {1 omm) I I J F O F 0 5 1 l b s ( 0 2 3 k q ) F O F ' 4
6 @5 #5 q #9 #4 !3 #2 !2 @1 !0 @2 @6 #6 #3 @8 #1 @4 o #8 !
Ethylene-Propylene Rubber Elastomer Oil Resistance Excellent Excellent Good up to Fails up to 225 F. up to 400 F. 225 F. Water Resistance Excellent Good up to Good up to Excellent up to 150 F. 180 F. 150 F. 210 F. Air Resistance Excellent Excellent Excellent Good (no oi) up to 180 F. up to 350 F. up to 180 F. up to 180 F.
0.31 0.28 0.31 0.28 U W M5 x 0.8 U W 597 4 Port Direct Operated Poppet Solenoid Valve 10-VQD1000 Dimensions L plug connector: 10-VQD1121-L-M5 M plug connector: 10-VQD1121-M-M5 Directional Control Valves Air Grippers Modular F.
9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting, Spring extend (TL, TM) Double acting with spring (BL, BM) r $0 !1 !2 #7 #4 #7 @2 e #5 #3 @8 #7 #7 #1 @8 w 10-9-6 6 Heavy Duty Stopper Cylinder Series RSH/RS1H Construction Component Parts (For single acting) No.
MK(2) Resistance RS Q G Adjustment dial RS H A RZQ Adjustment dial rotation angle MI W S 90 CEP1 Stopper direction can be changed within 90 CE1 CE2 The stopper lever can be rotated 90.
H S + Stroke F Rail mounting (A) Band mounting (B) Without magnet ZZ + Stroke With rod boot (Wh) Width across flats K 8 8 l C e (JH) h AM f KK (JW) Dimensions [mm] Bore size AM BE C EE F G1 G2 H (HR) K KK KV KW NA ND S SW (WH) ZZ 8 12 M12 x 1.25 4 M5 x 0.8 12 7 5 28 13.4 M4 x 0.7 19 6 15 12 46 7 16 86 10 12 M12 x 1.25 4 M5 x 0.8 12 7 5 28 14.2 M4 x 0.7 19 6 15 12 46 7 16 86 12 16 M16 x
AXT662-1(1: M5, 2: M3) 1 2 Sub-plate Optional parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws. Purchasing order is available in units of 10 pieces. 4-12-9 10 Series VQ100 How to Order Valves VQ1 1 0 5 L M5 Series VQ Compact 3 port valve Port size Type of actuation Without sub-plate With sub-plate With sub-plate Nil M3 M5 1 N.C. (Normally closed) N.O.
AXT662-1(1: M5, 2: M3) 1 2 Sub-plate Optional parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws. Purchasing order is available in units of 10 pieces. 4-12-9 Series VQ100 How to Order Valves VQ1 1 0 5 L M5 Series VQ Compact 3 port valve Port size Type of actuation Without sub-plate With sub-plate With sub-plate Nil M3 M5 1 N.C. (Normally closed) N.O.