Free Mount Cylinder

6 Seal kit includes !4, !5, !6.

Electric Actuator/Slider Type

0 #3 @3 @6 @7 @9 @4 #8 o t @0 @2 !6 !5 w r e #7!3!4 !7 #1 !8 #0 @5 @1 @8 !9 #6 #5 #2 Motor details Component Parts No. Description Material Note No.

Battery-less

6 !

SQ1000/2000

A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

CM2

, refer to pages 6-4-21 to 6-4-22.

CA2

6 !7 !8 !

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

6 !7 !

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 6 CY1H D-Y5/Y6/Y7 6 5 5 5 D-Z7/Z80 6 9 A B CY1HT D-Y5/Y6/Y7 5 6 Some switches cannot be mounted.

Vacuum Pad

2.5 3 6 2.5 3 6 2.5 3 11.5 11.5 11.5 0.8 0.5 0.8 1.2 1.8 1.8 6 8 4 4.5 6.5 8.5 ZP3-T04UM;-B5 [Weight: 2.3 g] ZP3-T06UM;-B5 [Weight: 2.3 g] ZP3-T08UM;-B5 [Weight: 2.3 g] M5 x 0.8 M5 x 0.8 M5 x 0.8 Width across flat 7 Width across flat 7 Width across flat 7 5 0.8 5 0.5 5 0.8 13.5 13.5 13.5 6 6 6 1.8 1.2 1.8 4 6 8 6.5 8.5 4.5 5 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter

C85

6 !

ISO Cylinder

15 12 10 7 6 16 10 12 M12 x 1.25 4 4 M5 x 0.8 8 12 5 28 14.2 M4 x 0.7 19 6 15 12 10 7 6 16 12 16 M16 x 1.5 6 6 M5 x 0.8 12 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 14 10 9 22 16 16 M16 x 1.5 6 6 M5 x 0.8 12 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 13 10 9 22 20 20 M22 x 1.5 8 8 G1/8 16 20 8 44 17 6 M8 x 1.25 32 11 24 22 11 13 12 24 25 22 M22 x 1.5 10 8 G1/8 16 22 8 50 20 8 M10 x 1.25 32 11 30 22 11

Made to Order

to 29 6 to 29 6 to 49 6 to 49 6 to 99 6 to 99 11 to 99 11 to 99 (mm) ( ): Denotes the dimensions of auto switch type.

MB

(Refer to page 6-6-6.)

CY1

Auto switch operating range (mm) D-F7/J79 D-J79C D-F7V D-F7NTL D-F7W/J79W D-F7WV D-F7BAL Auto switch model D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7LF D-F79F Bore size (mm) 6 6 3 4.5 10 6 3 4.5 15 6 4 4.5 20 6 3 4.5 25 6 3 4.5 32 6 3 4.5 40 6 3.5 4.5 Note) Operating ranges are standards including hysteresis, and are not guaranteed.

High Purity Fluoropolymer

Class Size combination Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Connection threads Symbol 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Connection threads A A B C D E F A B C D A B C D A B C D A B C D Applicable tubing size (inch) No.

Table of Contents

AD48 AD48N(6) AD47 AD47N(6) AD48 AD48N(6) AD38 AD38N(6) (5) N.O.

CV/MVGQ

6 !7 !8 !

CV/MVGQ

6 !7 !8 !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(D, Y) Manual override (Non-locking) Double Single VK 197.5 (3 position: 226.5) Y: 217.5 (3 position: 246.5) D: 218.5 (3 position: 247.5) 218.5 (3 position: 247.5) Y: 108.5 (3 position: 123) D: 109.5 (3 position: 124) (3 position: 124) (3 position: 113.5) VZ (Pitch) (Mounting hole) VF 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) (With individual EXH

LEC-OM07605CN

(2) LECSS2-T8 [:mm] 40 6 (80) 170 6 6 CNP1 CNP2 161 156 168 CNP3 6 (21) LEC-MRBAT6V1SET (69.3) 6 PE (38.5) LEC-MR5 BAT6V1SET 1.0 [kg] M5 CNP1 CNP2 CNP3 3.24 [N m] L1 P+ U (40) 2-M5 6 C D V L2 (6 ) L3 W NP3 L11 L21 P4 1560.5 (168) PE M4 1.2 [N m] (6) 9 3 9.