Series VFM is a 5 port, compact, mechanical valve available in a rubber (VFM300) or metal (VFM200) seal style. This series has a large flow capacity (Cv 1.0) and a high cycle rate. The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 0.15 to 0.9MPa, Effective area (Cv): 18mm 2 (1.0), Maximum frequency

Series VFM is a 5 port, compact, mechanical valve available in a rubber (VFM300) or metal (VFM200) seal style. This series has a large flow capacity (Cv 1.0) and a high cycle rate. The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 0.15 to 0.9MPa, Effective area (Cv): 18mm 2 (1.0), Maximum frequency

Series VFM is a 5 port, compact, mechanical valve available in a rubber (VFM300) or metal (VFM200) seal style. This series has a large flow capacity (Cv 1.0) and a high cycle rate. The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 0.15 to 0.9MPa, Effective area (Cv): 18mm 2 (1.0), Maximum frequency

Series VFM is a 5 port, compact, mechanical valve available in a rubber (VFM300) or metal (VFM200) seal style. This series has a large flow capacity (Cv 1.0) and a high cycle rate. The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 0.15 to 0.9MPa, Effective area (Cv): 18mm 2 (1.0), Maximum frequency

Series VFM is a 5 port, compact, mechanical valve available in a rubber (VFM300) or metal (VFM200) seal style. This series has a large flow capacity (Cv 1.0) and a high cycle rate. The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 0.15 to 0.9MPa, Effective area (Cv): 18mm 2 (1.0), Maximum frequency

Series VFM is a 5 port, compact, mechanical valve available in a rubber (VFM300) or metal (VFM200) seal style. This series has a large flow capacity (Cv 1.0) and a high cycle rate. The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 0.15 to 0.9MPa, Effective area (Cv): 18mm 2 (1.0), Maximum frequency

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33 !4 !5 !

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Bore size (mm) 80 NLP-80A PDU-25Z PSD-33 x 25 P75 DSM-30 CA80-1609 CA80-1604 P5 No.

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Port size 01 02 03 Dimensions Rc 1/8 (VXV31) Rc 1/4 (VXV31, 32, 33) Rc 3/8 (VXV32, 33) The single dimension is the same as a series of VX31, 32, 33 in page 17-3-85. Manifolds can also be manufactured with the same specifications. 17-3-86 1 The VX series will be revised shortly.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

33 33 33 11.5 11.5 13.5 13.5 11.5 11.5 13.5 13.5 26.5 26.5 26.5 26.5 Note) Refer to page 340 for dimensions of connector types. 139 Series SY3000/5000/7000/9000 Dimensions: Series SY7000 [ ]: AC 3 position closed center / exhaust center / pressure center Grommet (G), (H): SY7 40(R)G H 02 03 3 4 5 (A, B port) 3/8,1/4 21 13.5 (Light/surge voltage suppressor) 43.1 (For mounting) 2 x 4.3 61

Made to Order

) 29.5 (39.5) 30.5 (40.5) 36 (46) 43.5 (53.5) 53 (63) 33 (33) 39.5 (39.5) 40.5 (40.5) 46 (46) 53.5 (53.5) 63 (63) 54.5 (54.5) 64 (64) 66.5 (66.5) 68 (68) 81 (81) 94.5 (94.5) 25.2 (32.4) 26 (36) 26 (38) 29 (39) 30.5 (40.5) 40 (50) 40.5 (50.5) 42 (52) 51 (61) 60.5 (70.5) 40.5 (40.5) 50 (50) 50.5 (50.5) 52 (52) 61 (61) 70.5 (70.5) 32.2 (39.4) 33 (43) 35 (47) 39 (49) 44.5 (54.5) 54 (64) 56.5

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(26) 31 (27) ZPY10 33 (25) 32 (25) 33 (25) 32 (25) 33 (25) 33 () (25) ZPY13 38 (27) 32 (27) ZPY16 ZPY20 38 (30) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K L M C D E H I A A B F 5.5 P M5 x 0.8 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 14 7 34 33 Rc 1/8 7.5 10.5 13 16 45 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 14 7 40 Rc 1/8 8 11 13 16 52 69 11 8 M10 x 1.5 50 Rc 1

Air Slide Table

MXQ 12C-mm5 With buffer, axial piping (12) Pilot port M5 x 0.8 (OUT) 12 33 2 Pilot port M5 x 0.8 (IN) 17 8.4 Pilot port M5 x 0.8 (IN) Symmetric type 33 12 41.4 27 Dimensions [mm] Model Standard type Shorter total length type ZZ M M MXQ12C-10Zl5 103.5 93 96 MXQ12C-20Zl5 113.5 103 98 MXQ12C-30Zl5 123.5 113 108 MXQ12C-40Zl5 141.5 131 126 MXQ12C-50Zl5 151.5 141 136 MXQ12C-75Zl5 195.5 185 180

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Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Pitch) P = 33 (Pitch) P = 33 Manual override (Non-locking) Stations D side Exhaust cleaner (Option) U side Exhaust cleaner (Option) U side mounting 2-Rc 1/8 (X port) 2-Rc 1/8 (PE port) 6-Rc 1/2 Stations n: Station Formula L1 = 33 x n + 63 L2 = 33 x n + 75 2 129 141 3 162 174 4 195 207 5 228 240 6 261

CQ2

FZ FX FV FT FD M A 40 50 46.5 56.5 48.5 58.5 B 23 33 29.5 39.5 30.5 40.5 A B 17 65 56 48 8 5.5 34 50 33 38.5 32 17 72 62 54 8 5.5 40 56.5 39.5 38.5 40 18 89 76 67 9 6.6 50 58.5 40.5 43.5 50 CU CQS CQ2 MU Rear flange (mm) Rear flange/CQ2G, CDQ2G All dimensions except A, L and L1 are same as rod side flange mounting type.

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Standard stroke Refer to Standard Stroke on page 8-15-33. For 6, 10 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

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SB, counterbore depth SC P.C.D.R (Mounting hole) Auto switch mounting groove dimentions (2 locations) MHS3-16D MHS3-20D MHS3-25D 5 6 4 54 54 5 4 6.5 54 4 5 3 3 3 5 5 33 33 33 (mm) I G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 5 6 7 EO 7 8 10 NB 0 0.030 0 0.030 0 0.030 DC 15 18 21 NA 8 10 12 DO 17 20 24 K 4 5 6 B 30 36 42 R 25 29 34 J 10 12 14 AA 35 38 40 AB 32 35 37 O

ZP

44 50 60 11 14.5 20.5 13.8 15.1 17.5 26.5 29 33 44 50 60 11 14.5 20.5 14.0 15.3 17.7 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

F

40.5 33 24 71 1/2 1/4 KQT13-U02 17.46 21.7 17 28 28.5 33 22 9 16 12 KQT16-U04 22 26.5 21 33 40.5 35 24 100 1/2 3/8 KQT13-U03 17.46 21.7 17 28 28.5 33.5 22 9.6 H: Width Across Flats 1/2 1/2 KQT13-U04 22.23 21.7 17 28 32 35 22 9.6 H: Width Across Flats Courtesy of Steven Engineering, Inc. !