Solenoid: No.2 Solenoid, Body Option: 25A, Style: Energized Open/N.C., Option: Stainless Steel Body & Shading Coil, FPM Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: NPT, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Bracket: -

Solenoid: No.2 Solenoid, Body Option: 25A, Style: Energized Open/N.C., Option: Stainless Steel Body & Shading & Coil, EPR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: NPT, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Bracket: -

Solenoid: No.2 Solenoid, Body Option: 25A, Style: Energized Open/N.C., Option: Stainless Steel Body & Shading Coil, PTFE Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: NPT, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Bracket: -

Solenoid: No.2 Solenoid, Body Option: 25A, Style: Energized Open/N.C., Option: Brass or BC6, Copper Body & Shading Coil, EPR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: NPT, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Bracket: -

Solenoid: No.2 Solenoid, Body Option: 25A, Style: Energized Open/N.C., Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: NPT, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Bracket: -

Solenoid: No.2 Solenoid, Body Option: 25A, Style: Energized Closed/N.O., Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: NPT, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Bracket: -

Solenoid: No.2 Solenoid, Body Size: 25A, Style: Energized Open/N.C., Option: BC6, Copper Body & Shading Coil, FPM Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: NPT, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor

Solenoid: No.2 Solenoid, Body Size: 25A, Style: Energized Closed/N.O., Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: NPT, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor

Function: 3 (3 Position Closed Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 5 (24 VDC), Lead Wire: D (DIN Terminal), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Port Size: 10 (1), Thread: N (NPT)

Function: 5 (3 Position Pressure Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 5 (24 VDC), Lead Wire: D (DIN Terminal), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Port Size: 10 (1), Thread: N (NPT)

Function: 4 (3 Position Exhaust Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 5 (24 VDC), Lead Wire: D (DIN Terminal), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Port Size: 10 (1), Thread: N (NPT)

Function: 3 (3 Position Closed Center), Model: 1 (Non Plug-in), Body Option: 1 (Direct Manual Override), Voltage: 5 (24 VDC), Lead Wire: D (DIN Terminal), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Port Size: 10 (1), Thread: N (NPT)

XM, XY

XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3 S1

Digital Gap Checker

This reduces noise considerably compared with A much lower air consumption is required than the current model. the current model. 1: Conditions: Unseated for 5 seconds and seated for 20 seconds (For G type) Comparison of detection circuit ISA3 New New Current model (ISA2) A B EXH port EXH port P1 Sensor Sensor SUP port S1 S3 SUP port S2 Sensor S1 S4 S2 Detection port P2 Detection port C D

Table of Contents

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

Dedicated Controller

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

Electric Actuator with Integrated Guide

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

Lubrication Equipment

AL How to Order ALD600 ALD 20 B 9 00 S1 Float switch Style None ALD ALDU D.P. Lube (Single unit) D.P.

Proposals for Energy Saving

Large diameter piping Small diameter nozzle S1 Pressure loss: Small With nozzle S2 Effective area ratio 2:1 6 Pump capacity Previous rate Pressure Pump head (electric power) Pressure loss: Small P Pump outlet Nozzle outlet Discharge rate Main Points Improve pressure loss. Improve the effective area ratio with the upstream side by using a small diameter nozzle.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1