&snac

Z b K g ( ! ' / i t h A u t o D r a i n : 1 . 3 5 k S ) _ M A S S k s 0 . 2 5 k s ( ! / i t h B r a c k e t : 0 . 3 1 k s ) D i m e n s i o n s 0 n e t o u c h f i t t i n s f o r P u r g e a i r e x h a u s t ( 0 P t i o n : P , P s ) c h e c k e r 9 8 d i a m e t e r i n c h ) p u t ' g i n o a i r D e w p o i n t l n o u t e r 8 rn m(5/16 D l i 0 n : .!.

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

) Symbol Description Applicable size 10 15 20 30 40 Description Shaft type Applicable size 10 15 20 30 40 Shaft type Symbol XA39 Shaft through-hole Shaft through-hole Shaft through-hole S, Y K, T J S, Y K, T J Y K J J XA31 XA33 XA37 XA45 XA47 XA48 XA51 S, Y J, K, T J, K, T J, K, T J, K, T S, Y J, K, T Shaft-end female thread Shaft-end female thread Stepped round shaft Middle-cut chamfer

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination between -X and -X (S, W, X, Y, Z, T, J, K shaft) 20Shaft type Combination Applicable size Part no.

5

S 1 pc. n n pcs.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination between -X and -X (S, W, X, Y, Z, T, J, K shaft) 20Shaft type Combination Applicable size Part no.

ZP3

L N S U F GN GS 02 13 5.5 2 KQ2H02-M3G Width across flats K ZP3 T 015 02 035 U J K 3 6 1.2 04 14.5 8 4 KQ2H04-M3G J Dimensions Per Vacuum Inlet: Barb Fitting Model J K Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Table of Contents

Fixed 4% F .S.

Modular F.R.L. Unit

Attachment Port size for intermediate air release Applicable models Attachment mounting position Description Symbol None Nil AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve Thread type AW + [K] + AL AC20A to 40A Metric system thread (M5) Rc NPT G AF + AR + [S] + AL AC20 to 60 Nil AW + [S] + AL AC20A to 40A N Note 1) S Pressure switch AF + [S] + AR AC20B

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

3 CQ2B16-T-PS CQ2B16-S-PS 16 CQ2B20-T-PS CQ2B20-S-PS 20 Port size Rc 1/8, 1/4 CQ2B25-T-PS CQ2B25-S-PS 25 Port size M5 x 0.8 Nickel plated 20 to 50, Anodized 32 to 50 CQ2B32-T-PS CQ2B32-S-PS 32 CQ2B40-T-PS CQ2B40-S-PS 40 CQ2B50-T-PS CQ2B50-S-PS 50 A set includes !4. Note Kits include items !4, !5, !

XL

Port S (10) remains pressurized and valve S (18) remains open.

CV/MVGQ

B1 Axis d9 REC CX CY MQQ M S + Stroke Z + Stroke ZZ + Stroke RHC MK(2) Single acting, Spring extend: CVM3D T Bore size Stroke RS Q G RS H A RZQ MI W S CEP1 CE1 H + Stroke CE2 Z + 2 x Stroke ZZ + 2 x Stroke ML2B AL D CZ H1 MM NN CX H L U CD HX A B1 Eh8 F I K N NA RR Bore size (mm) 20 25 32 40 C J G5-S 8 19 10 41 30 14 9 18 13 5 9 15.5 13 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 20 0 0.033 26

CV/MVGQ

19 23 28 36 10 12 16 20 25 8 8 8 0 0 RZQ MI W S CEP1 Double Clevis Style: CVS1D CE1 Lube type (CVS1D), Non-lube type (CVS1DN) CE2 ML2B With rod boot C J G5-S Width across flats B1 CV Rod d9 MVGQ CC Connection port A ZZ + l + Stroke Z + l + Stroke h + l RB S + Stroke Z + Stroke ZZ + Stroke J Bore size (mm) Stroke range (mm) 40 50 63 80 100 DA AL B B1 C D E F H1 HX CX CDH10 CZ J K L 32 40 40

High Vacuum Angle Valve, XL Series

Port S (10) remains pressurized and valve S (18) remains open.

NCA1

A U T O S W I T C H E S R E E D T Y P E O P T I O N S M O U N T I N G B R A C K E T S F O R S W I T C H E S O P T I O N S A U T O S W I T C H E S S O L I D S T A T E T Y P E MODEL OPERATING MAX CURRENT OR INDICATOR MODEL OPERATING MAX CURRENT OR INDICATOR NUMBER VOLTAGE OPERATING CURRENT LIGHT / WIRE NUMBER VOLTAGE OPERATING CURRENT LIGHT / WIRE MODEL BORE SIZE RANGE (MA) OUTPUT RANGE (MA

Air Cylinder NCA1 Series

A U T O S W I T C H E S R E E D T Y P E O P T I O N S M O U N T I N G B R A C K E T S F O R S W I T C H E S O P T I O N S A U T O S W I T C H E S S O L I D S T A T E T Y P E MODEL OPERATING MAX CURRENT OR INDICATOR MODEL OPERATING MAX CURRENT OR INDICATOR NUMBER VOLTAGE OPERATING CURRENT LIGHT / WIRE NUMBER VOLTAGE OPERATING CURRENT LIGHT / WIRE MODEL BORE SIZE RANGE (MA) OUTPUT RANGE (MA

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

0.43 0.73 0.63 0.73 0.2 JSX21-S Cm503 320 360 7.1 3.15 0.44 0.88 0.76 0.88 0.1 JSX21-S Cm703 320 360 3/8 1/4 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm402 450 490 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm502 450 490 7.1 3.15 0.44 0.88 0.76 0.88 0.2 JSX31-S Cm702 450 490 30 3/8 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm403 450 520 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm503 450 520

Series KDM Rectangular Multi-connector

D K 8 8 0 P 0 1 M D K 9 0 S 0 1 M D K KDM20 8 / 1 1 0 P 0 2 M D K 1 0 S 0 2 M D K 2 . 3 3 2 P 0 2 M D K 1 0 S 0 2 M D K e u l B 2 3 / 5 3 0 P 0 2 M D K 3 0 S 0 2 M D K 4 4 0 P 0 2 M D K 3 0 S 0 2 M D K 0 2 d e R 4 / 1 7 0 P 0 2 M D K 7 0 S 0 2 M D K 6 6 0 P 0 2 M D K 7 0 S 0 2 M D K 6 1 / 5 9 0 P 0 2 M D K 9 0 S 0 2 M D K 8 8 0 P 0 2 M D K 9 0 S 0 2 M D K Applicable Tube Material

Air Cylinder

Technical Data 305 CG1 Series Clevis: CG1DN (20 to 63) S + Stroke MM AL A H GA GB L RR F K C CZ TT 2 x P (Rc, NPT, G) CDH10 (Hole dia.) d9 (Shaft dia.)

F

G A S K E T C O N S T R U C T I O N A g a s k e t m a d e o f s t a i n l e s s s h e e t c o v e r e d w i t h l a m i n a t e d N B R o n b o t h s i d e s i s s e a t e d o n t h e chamfer of a female thread to materialize a perfect sealing construction irrespective of the difference in thread diameters due to the difference in the types of female threads, variation in tolerance, difference