VCC

Qty. 1 6 11 2 7 12 3 8 13 4 9 14 5 10 15 2 port valve is specified for the gate valve and the cleaning valve. 7 valves + 1 valve + 4 valves = 12 valves 668

Sine Cylinder Series REC

45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Sine Cylinder Series REC

45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

CXT

Stroke 12 16 20 25 32 40 19 21 24 26 29 32.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 17 19 22.5 24.5 27 30.5 0 0 3.5 5.5 5 7.5 1.5 2 6 7 8 12 Bore size (mm) Long Stroke 12 16 20 25 32 40 19 21 24 26 29 32.5 11 10.5 16 18 20.5 26.5 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 17 19 22.5 24.5 27 30.5 9 9.5 13 14 12.5 16 Bore size (mm) Reed switch Solid state switch HS A B D-F7V D-J79C D-F7WV

MHF2

9 Mounting screw 12-3-11 12 Series MHF2 Dimensions MHF2-8D 2.5H9 +0.025 0 depth 2.5 16 2.5H9 +0.025 0 depth 2.5 2-M3 x 0.5 thread depth 7 Mounting thread 3 28.3 3.4 36 32 2-M3 x 0.5 thread depth 4 15.8 22 Mounting thread 5.9 E 11 11 14 19 E 2-2.6 through (Mounting hole) M3 x 0.5 Finger opening port M3 x 0.5 0 -0.1 17 12 12 Finger closing port 2-4.5 0.8 0.8 E-E +0.1 0 Close: 0 Open: 81 Use

MHF2

"Runoff" 12-3-25

MB1

Without air cushion Foot type/ (L) Bore size (mm) Cushion valve Port LS ZZ 32 40 50 63 80 100 134 138 156 156 184 188 168 176 198 201 240 244 LH LY 4-LD LT (mm) Foot type ZZ + Stroke LS + Stroke X Y X Y LX Bore size (mm) Stroke range X Y LD LH LS LT LX LY LZ ZZ LZ 32 40 50 63 80 100 700 800 1000 1000 1000 1000 9 11 11 14 14 16 22 24 27 27 30 32 7 9 9 12 12 14 30 33 40 45 55 65 128 3.2 3.2

Thermo-chiller/Rack Mount Type

, Bronze*17, SiC, Alumina ceramic, Carbon, PP, PE, POM, PA, FKM, EPDM, PVC, PPS, AS, Fluoropolymer*12, Ion exchange resin*12 Temperature range [C] 5 to 40 Pressure range [MPa] 0.3 to 0.5 Required flow rate (50/60 Hz)13 [L/min] 8 12 Facility water system Inlet-outlet pressure differential of facility water [MPa] 0.3 or more Port size Rc3/8 Fluid contact material Stainless steel, Copper (Heat

HRX-OM-R005

Centigrade(oC) Fahrenheit(oF) 5.13 11 Changing temp. unit 12 Changing pressure unit Pressure unit can be changed.

MY1

, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 E 14.6 20 24 29 35 40 52 EY 39.5 45.5 53.5 67 83 106 129 EC 5.8 5.8 6.5 8.5 10 14 14 EB 30 32 38 50 57 66 77 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 F 4 4 6 6 6 6 6 T 6 6 7 12 12

SMC Pneumatic Clean Series

Series 10-/11-/12-/13Clean Series Available for clean environment. Particle generation in a clean room can be prevented.

VQ7-6/7-8

2.4 0.18 10 Metal seal 40 or less 0.64 Single 2 position 3 position VQ7-8-FG-S-R 3.3 0.27 13 3.0 0.24 12 Rubber seal 45 or less VQ7-8-FG-D3.0 0.24 12 2.4 0.18 10 Metal seal 15 or less 0.70 Double VQ7-8-FG-D-R 3.3 0.27 13 3.0 0.24 12 Rubber seal 20 or less VK VQ7-8-FHG-D2.4 0.24 10 2.4 0.28 10 Metal seal 45 or less Closed center 0.75 VQ7-8-FHG-D-R 2.8 0.27 11 2.8 0.25 11 Rubber seal 50 or

3 Port Solenoid Valve Series VQ100 1

For DIN rail model number, refer to page 4-12-12.

HRX-OM-R016

Fig. 3-11 Tightening of piping Recommended piping circuit Fig. 3-12 Recommended piping circuit No. Description Size Recommended part no.

Vacuum

Voltage output Output voltage: I to 5V 12 5% F.S. or less (with rated pressure range) Linearity: 11% F.S. or less; Output impedancei Approx 1ko Outpul current: 4 to 20mA; t2 5% F.S. or less (wilh rated pressure range) Linearity: !

Vacuum

Voltage output Output voltage: I to 5V 12 5% F.S. or less (with rated pressure range) Linearity: 11% F.S. or less; Output impedancei Approx 1ko Outpul current: 4 to 20mA; t2 5% F.S. or less (wilh rated pressure range) Linearity: !

HRX-OM-W038

Terminal no.12 Switch Terminal no. 12 11 Recommended accessory cable dia. is 0.14 to 1.5mm2 9 10 Terminal no.1 Fig. 3-8 Wiring of contact for remote signal inputsExample 3.3 Installation HRS Series 3-12 HRX-OM-W038 Chapter 3 Transport and Setting Up 3. Plug the prepared connector in to the contact input/output connector that is on the back of the thermo-chiller.

HRX-OM-O021

Terminal no.12 Switch Terminal no. 12 11 Recommended accessory cable dia. is 0.14 to 1.5mm2 9 10 Terminal no.1 Fig. 3-8 Wiring of contact for remote signal inputsExample 3.3 Installation HRS Series 3-12 HRX-OM-O021 Chapter 3 Transport and Setting Up 3. Plug the prepared connector in to the contact input/output connector that is on the back of the thermo-chiller.

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

Series 11-MXJ Air Slide Table

J I 12 Z ZZ H G 3 +0.03 0 depth 2 GA A 19 3.3 3.5 A 5.8 4 x M4 x 0.7 3 4 3 +0.05 0 depth 2.5 A-A Model G GA H I J K M Z ZZ 11-MXJ8-5 11-MXJ8-10 11-MXJ8-15 11-MXJ8-20 12 18 17 6 17 28.5 44.5 38 45 12 18 17 6 17 28.5 44.5 38 45 19 28 20 8 25 39.5 54.5 48 55 Other dimensions are the same as standard model (Series MXJ). 19 28 20 8 25 39.5 54.5 48 55 829 Air Slide Table 11-MXJ Made to Order Air