VFR

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

VFS

Cable length 1.5 m 3 m VVFS2000-30A-3 5 m VVFS2000-30A-4 7 m Component parts Assembly part no. Cable length 1.5 m 3 m VVZS3000-21A-3 5 m VVZS3000-21A-4 8 m Component parts VVFS2000-30A-1 VVFS2000-30A-2 VVZS3000-21A-1 VVZS3000-21A-2 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

Speed Controller with Indicator

flats) Metric Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FS1-M5E-23 3.2 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FS1-U10-32/23 AS131FS1-M5E-04 4 8.2 11.5 19.8 AS131FS1-U10/32-04 AS131FS1-M5E-06 6 10.4 20.9 20.4 36.6 8 AS131FS1-U10/32-06 7.2 M5 x 0.8 10/32UNF 8 9.6 9.4 Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3

1

m is number of I/O Units.

SY

G: Approx. 300 H: Approx. 600 45.9 <46.6> [47.5] Rc 1/8 (external pilot port) Rc 1/8 (Pilot EXH port) 164.3 <165.7> [167.5] (lead wire length) 75.4 [81.9] 34.5 17.5 15.5 29.5 29.5 44.5 5-Rc 3/8, 1/2 (piping port) 96.5 L type plug connector (L): DIN terminal (D): M type plug connector (M): 3 4 5 03 04 03 04 3 4 5 03 04 3 4 5 SY9 40(R)-LSY9 40(R)-DSY9 40(R)-MApplicable

A

B O L S ADH4 00 04 T H R E A D .Rc(PT) N .NPT M A X.

CG5-S

8 -04 R 1/2 -04 R 1/2 Straight Union KGH KGLU12-02 R 1/4 12 -03 R 3/8 -04 R 1/2 Applicable tubing O.D.

A

A1 E L MM R1 NZ U1 NDH10 NX A A1 E L MM R1 U1 NDH10 NX I-04 40 69 22 24 55 M 14 x 1.25 15.5 20 12+0.070 0 16-0.1 -0.3 Y-04C 40 22 24 55 M 14 x 1.5 13 38 25 12+0.070 0 16-0.1 -0.3 I-05 5063 74 27 28 60 M 18x 1.5 15.5 20 12+0.070 0 16-0.1 -0.3 Y-05C 5063 27 28 60 M 18x 1.5 15 38 27 12+0.070 0 16-0.1 -0.3 I-08 80 91 37 36 71 M 22 x 1.5 22.5 26 18+0.070 0 28 -0.1 -0.3 Y-08C 80 37 36 71 M 22 x

Modular F.R.L. Units

Example) IS10E-30N03-6PRZ Left Right Symbol Description Nq Body size 20 30 40 Pressure switch with piping adapter Nw Pipe thread type Nil Rc N2 NPT F2 G + 23 E (13) 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 + Ne Port size (5000) (3000) (500) C (23) 0.1 0.3 a Set pressure range Nil 0.1 to 0.4 MPa 61 0.1 to 0.6 MPa + 0.2 0.4 Port size MPa B Nil 0.5 m L 3 m Z 5 m + Semi-standard b Lead wire length

2/3 Port Valve

Note 3) Value on option "V", "M" (Non-leak, vacuum).

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Tube bore x Length Speed controller Silencer Series MB Series CJ2 Series CM2 6 x 1 m AS3301F-06 8 x 1 m AS3301F-08 AN110-01 4 x 1 m AS1301F-04 AN120-M5 SZ3120-M5 3-3-19 19 Series VZ3000 Construction 2 position single 2 position double Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

Speed Controller with One-touch Fitting

, AS2211F-01-mPA 300 600 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 08, 09, 10, 11 500 06, 07, 08, 09, 10 Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 06, 07 400 200 01, 23 300 03, 04 200 100 01, 23 100 0 0 0 5 10 0 5 10 Number of needle rotations Number of needle rotations AS4201F-G04-m, AS4211F-G04-m AS4301F-G04-m, AS4311F-G04-m AS4201F-04-mPA, AS4211F-04-mPA AS3201F-G02/03-m

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

type> (Lead wire length) 75.4 [82.4] Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 73.6 34.5 15.5 17.5 29.5 29.5 44.5 [1(P), 5(EA), 3(EB) port] 3/8, 1/2 96.5 L plug connector (L): M plug connector (M): DIN terminal (D, Y): 10-SY9140(R)-WO03 04 M8 connector (WO): D Y 10-SY9140(R)10-SY9140(R)-M10-SY9140(R)-L03 04 03 04 03 04

F

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

KR

M5 x 0.8 Width across flats 8 Effective area: 4.0 mm2 Weight: 3.7 g Gasket: M-5G1, M-5GH Weight: 0.01 g Weight: 0.04 g 15-3-28

Modular F.R.L. Unit

) 06 (10) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS40-06 02 03 04 E600VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) 06 10 06 10 E60006 10 E600E100-M5 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Note 6) Pressure switch with piping adapter 02 03 04 IS1000E-40 Note 6) Y24-01 02 Y34-01 02 Y34-01 02

42

The load ratio is obtained by the following formula: ((Load mass x 9.8)/Theoretical output) x 100% Conditions MB, CA2 series CS1, CS2 series Series Condition 10A x 1 m SGP (Steel pipe) dia. x Length VQ4100--03 VQ4101--03 AS420-03 Speed controller AN30-03 Silencer 10A x 1 m SGP (Steel pipe) dia. x Length VQ5100--04 VQ5101--04 AS420-04 Speed controller AN40-04 Silencer 448 INDEX Page 446 Base

smcmaintenancepartslist

Pressure Control Equipment Industrial Filters Port size Port size FN1 FN4 Symbol 10 20 Rc1 Rc2 Applicable model Specifications FN1 FN1101 FN1102 FN1112 FN4102 65 x 250L 65 x 500L Model Element dimension Material Construction Stainless steel 304 Element Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Nominal filtration rating Differential

ZP

3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06 04 06 04 06 04 06 Model 04 06 04 06 04 06 04 06 ZP2-T4020WK ZP2-T5020WK ZP2-T6020WK ZP2-T8020WK ZP2-T3507WK ZP2-T4010WK ZP2-T5010WK ZP2-T6010WK 2 x 1.5 0.5 0.5 10 11 2.5 0.8 04 06 ZP2-T 30 WK H Width across flat J (Hexagon) (G) (F) Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 14 (Hexagon) E 13 3 3 M10 x 1 D M5 x 0.8 6 8 Y A