Programless Controller Series LECP1

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

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A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

LG1H

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

LJ1H

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Environment

S1 U T2 T2 U [mm] Size S1 T2 U 63 84 142 4 Note) When the motor is mounted on the left or right side in parallel, the groove for auto switch on the side to which the motor is mounted is hidden. 504 Electric Actuator/Rod Type LEY Series AC Servo Motor Dust-tight/Water-jet-proof (IP65 Equivalent) * Select options Dimensions: In-line Motor LEY63D Encoder Z-phase detecting position 41 LEF Rod

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

A port B port 3-Q1 For unit mounting (mm) A B C D E(g6) F(h9) G H J K L M N P Q1 R S1 S2 T U V W X Model CRBU2W15-D CRBU2W15-DE CRBU2W20-D CRBU2W20-DE CRBU2W30-D CRBU2W30-DE M5 x 0.8 M3 x 0.5 10.5 10.5 11 10 11.511 14 13 12 13 15.514 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 15.5 6 10 0.5 29 M3 x 0.5 3.5 M3 x 0.5 21 3 29 36 48 0.004 0.012 0 0.043 6 14 42 34.5 10 20 1.5 M5 x 0.8 17 7 10 0.5

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-S1 V V V V V V ZP3EA-S2 V V V V V V V V w Holder Form/Diameter Part no.

CRB2/CRBU2/CRB1

CRBU2W-SE Free-Mounting Type CRBU2 CRB2 CRBU2W10-SE CRBU2W10-S CRB1 (mm) (depth) Q2 Model A B C D E (g6) F (h9) G H J K L M N P Q1 R S1 S2 T U V W X CRBU2W10-S CRBU2W10-SE CRBU2W15-S CRBU2W15-SE CRBU2W20-S CRBU2W20-SE CRBU2W30-S CRBU2W30-SE M3 (4) 10.5 10.5 M5 x 0.8 M3 x 0.5 M5 x 0.8 M3 x 0.5 0.004 0.012

Table of Contents

A port B port 3-Q1 For unit mounting (mm) A B C D E(g6) F(h9) G H J K L M N P Q1 R S1 S2 T U V W X Model CRBU2W15-D CRBU2W15-DE CRBU2W20-D CRBU2W20-DE CRBU2W30-D CRBU2W30-DE M5 x 0.8 M3 x 0.5 10.5 10.5 11 10 11.511 14 13 12 13 15.514 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 15.5 6 10 0.5 29 M3 x 0.5 3.5 M3 x 0.5 21 3 29 36 48 0.004 0.012 0 0.043 6 14 42 34.5 10 20 1.5 M5 x 0.8 17 7 10 0.5

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

A port B port 3-Q1 For unit mounting (mm) A B C D E(g6) F(h9) G H J K L M N P Q1 R S1 S2 T U V W X Model CRBU2W15-D CRBU2W15-DE CRBU2W20-D CRBU2W20-DE CRBU2W30-D CRBU2W30-DE M5 x 0.8 M3 x 0.5 10.5 10.5 11 10 11.511 14 13 12 13 15.514 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 15.5 6 10 0.5 29 M3 x 0.5 3.5 M3 x 0.5 21 3 29 36 48 0.004 0.012 0 0.043 6 14 42 34.5 10 20 1.5 M5 x 0.8 17 7 10 0.5

Model: 7 (VP700), Pilot: R (External Pilot), Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: S1 (M12 connector, made by Rockwell Automation), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: D (Dual)

Model: 5 (VP500), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: S1 (M12 connector, made by Rockwell Automation), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: D (Dual), Soft Start-up: S (with

Model: 7 (VP700), Pilot: R (External Pilot), Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: S1 (M12 connector, made by Rockwell Automation), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: D (Dual), Soft Start-up:

Model: 7 (VP700), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: S1 (M12 connector, made by Rockwell Automation), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: D (Dual), Soft Start-up: S (with

Model: 7 (VP700), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: S1 (M12 connector, made by Rockwell Automation), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: D (Dual)

Model: 7 (VP700), Pilot: R (External Pilot), Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: S1 (M12 connector, made by Rockwell Automation), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: D (Dual), Soft Start-up:

Model: 5 (VP500), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: S1 (M12 connector, made by Rockwell Automation), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: D (Dual)