CA2

Reed switch Solid state switch 5 V IC circuit Z76 Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Yes Relay, PLC 24 V 2-wire 100 V, 200 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V 100 V, 200 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2

REA/REB

model 0.5 (Nil) 3 (L) 5 (Z) D3-wire Z76 5 V IC circuit Yes Yes Grommet (NPN equivalent) 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Relay, PLC -X 5 V, 12 V IC circuit 3-wire (PNP) 202-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Data 2-wire 12 V Lead wire length symbols: 0.5 mNil

REA/REB

model 0.5 (Nil) 3 (L) 5 (Z) D3-wire Z76 5 V IC circuit Yes Yes Grommet (NPN equivalent) 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Relay, PLC -X 5 V, 12 V IC circuit 3-wire (PNP) 202-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Data 2-wire 12 V Lead wire length symbols: 0.5 mNil

Environment

0 15 10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

C95

switch Grommet Diagnostic indication (2-color) Z76 Z73 Z80 F59 F5P J51 J59 F59W F5PW J59W F5BAL IC IC 3-wire 5 V Yes AC 100 100 V or less 12 V 5 V, 12 V Relay, PLC No PLC 24 V 2-wire Terminal conduit 12 V Yes 100 V, 200 V Relay, PLC DIN terminal 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC 24 V 100 V, 200 V 2-wire 12 V 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Diagnostic indication (2

Auto Switch Guide

12, 24 VDC (4.5 to 28 V) CY Current consumption 10 mA or less 24 VDC (10 to 28 VDC) Load voltage 28 VDC or less MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 to 40 mA Load current 40 mA or less 80 mA or less CX 1.5 V or less (0.8 V or less at 10 mA load

Auto Switch Guide

12, 24 VDC (4.5 to 28 V) CY Current consumption 10 mA or less 24 VDC (10 to 28 VDC) Load voltage 28 VDC or less MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 to 40 mA Load current 40 mA or less 80 mA or less CX 1.5 V or less (0.8 V or less at 10 mA load

Auto Switch Guide

12, 24 VDC (4.5 to 28 V) CY Current consumption 10 mA or less 24 VDC (10 to 28 VDC) Load voltage 28 VDC or less MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 to 40 mA Load current 40 mA or less 80 mA or less CX 1.5 V or less (0.8 V or less at 10 mA load

ZP

Bracket Assembly Flat, Ball Joint Type Thin Flat Type with Ribs Deep Type q w e r t y u i Deep type t Buffer stroke q Vacuum inlet direction w Pad diameter Nil Pad unit T Vertical R Lateral (With One-touch fitting) Y Lateral (With barb fitting) 10 10 16 16 25 25 40 40 Stroke [mm] Pad diameter [mm] 10 16 25 40 10 V V V V 20 V V V V 30 V V V V 40 V V V 50 V V V V e Material N NBR S Silicone

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

, explosive gases, or constant water adhesion Body material Aluminum Seal material NBR, FKM Valve specifications Rated voltage AC 24 V, 48 V, 100 V, 110 V, 120 V, 200 V, 220 V, 230 V, 240 V DC 12 V, 24 V Allowable voltage fluctuation 10% of the rated voltage Allowable leakage voltage AC 5% or less of the rated voltage DC 2% or less of the rated voltage Apparent power*4, *5 AC 8 VA 9.5 VA

NCQ8

IC circuit Solid state switch Reed switch 5 V A96V A96 Yes Grommet IC circuit Relay, PLC A90V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV A90 A93 M9N M9P M9B F9NW F9PW F9BW F9BA 100 V 5 V, 12 V 12 V No 2-wire 24 V Yes 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V Relay, PLC Yes IC circuit Diagnostic indication (2-color display) 5 V, 12 V Grommet

Aluminum High Vacuum Angle Valve

U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd. 417 XLA/XLAV Series Specifications Model XLA(V)-16 XLA(V)-25 XLA(V)-40 XLA(V)-50 XLA(V)-63 XLA(V)-100 XLA(V)-160 XLA(V)-80 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum XLA 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLAV 5 to 50 1 x 10-6 to atmospheric pressure Operating

7ND9071en

Ex ic IIC T6...T4 Gc Ex tc IIIC T90 C Dc Ex ic IIIC T90 C...T120 C Dc Ui 32 V, Ii 380 mA, Pi 5.32 W, Ci 5 nF, Li 10 H.

CXS

/s 1 Graph V = up to 300mm/s 2 0.5 0.4 CXSL6 0.05 CXSM6 Weight m (kg) Weight m (kg) 0.1 CXSL6 0.05 CXSM6 5 0.03 5 0.01 10 20 30 40 50 100 10 20 30 40 50 100 Overhang L (mm) Overhang L (mm) 10 to 32 Graph V = up to 200mm/s 3 Graph V = up to 400mm/s 4 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30

Cylinder with Lock

K39 5 V, 12 V Solid state auto switch 3-wire (NPN) 5 V, 12 V M9NW V V V v v IC circuit 3-wire (PNP) M9PW V V V v v 2-wire 12 V M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC Yes 3-wire (NPN) 5 V, 12 V M9NA1 v v V v v IC circuit 3-wire (PNP) M9PA1 v v V v v 2-wire 12 V M9BA1 v v V v v 24 V Water-resistant (2-color indicator) Grommet With diagnostic output (2-color

Secondary Batteries

, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.

MB

100 V, 200 V DIN terminal Relay PLC Diagnostic indication (2-color indication) A59W Grommet G39 K39 Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit 24 V Grommet 100 V, 200 V 2-wire 12 V IC circuit 5 V, 12 V 3-wire (NPN) 2-wire Terminal conduit 12 V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Yes Relay PLC

LEC-OM02704CN

([0][4][0][5][0][6][0][7][0][8][0][9]) [0][4] [0][1] 0(PA) 0001(PB) 0002(PC) 0003(PD) 0009 4 [0][5] [0][1][F][F] 8 [8][5][0][0] [8][5][0][0] (16)10 [0][6] [0][1][F][F] 8 [8][5][0][0] [8][5] [0][0] (16)10 [0][7] [0][1][F][F] 8 [8][5][0][0] [8][5] [0][0] (16)10 [0][8] [0][1][F][F] 12 [8][5][0][0] [8][5][0][0] (16)10 [0][9] [0][1][F][F] 4 [8][5][0][0] [8][5][0][0] 0 0001 (3) ([

LEC-OM02904

(10V/10pulse) CCW CCW 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] 10[V] 10[V] CW CW A (124) (10V/1Mpulse) B (124) (10V/10Mpulse) CCW CCW 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] 10[V] 10[V] CW CW 5 25 5 C (124) (10V/100Mpulse) D (3) CCW 10[V] 8[V] 100M[pulse] 0 100M[pulse] 400[V] 0 10[V] CW E 2(45) CCW 8[V] 0 8[V] CW 1. 2. () 3. 400V8V/800V 4. 5.

2/3 Port Valve

Note 2) Value on option "V", "R", "Y" (Nonleak, Vacuum). (1) 10 (1) 5 AC 20 10 Min. VX31 DC Note 1) Dew point 10C or less Note 2) 50cSt or less Note 3) "D", "N" in the parenthesis are option symbols.