0.5

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

Digital Flow Switches Series PF2A

equipment such as a voltmeter.

JXCx-OMT0061CN

* A (A-5) 6 B (B-6) * 9 B (A-6) 8 3 (14.2) (2 ) 2 1 ( (14) (1 ) 5.5) B1 A1 5 6 (17.7) (3 ) 2 1 (18) B6 A6 ( 6.3) 16 15 (11) (30.7) 66 - 15.3 [5m ] (1) (2 ) ---A B-1 2 L A A-1 1 B (B-2) 6 B (A-2) 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (3) 5 5m Shiel d Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 B (B-6) 9 B (A-6) 8 3 (4) S 4 (+) B-1 5 (-) A-1 1 (+) B-3 2 A-

Compact and Lightweight

Set of long clamping screws ZH2-TB203-A 3 M4 x 70 2 pcs. ZH13DA ZH15DA ZH2-TB204-A 4 M4 x 90 2 pcs. ZH2-TB206-A 6 M4 x 130 2 pcs. Hexagon nut (M4) 2 pcs. ZH2-TB208-A 8 M4 x 170 2 pcs. (ZH2-TB201-A)3 1 M4 x 30 2 pcs. Flat washer (for M4) 2 pcs. ZH2-TB302-A 2 M4 x 55 2 pcs. ZH2-TB303-A 3 M4 x 80 2 pcs. ZH18DA ZH20DA ZH2-TB304-A 4 M4 x 100 2 pcs. ZH2-TB306-A 6 M4 x 145 2 pcs.

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Residual Pressure Release Valve

17 19 Weight (g) Connection thread D L1 L2 Q KEC-02 KEC-03 665

Quick Exhaust Valve Series AQ 1

Description Material Note q No.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

Series 12-REA Sine rodless cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 Although speed adjustment is possible with

Lock-Up Valve IL201/211/220 Series

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 171 A IL201/211/220 Series Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

The VT valve is a single valve with 6 functions (universal porting type) such as N.C. valve, N.O. valve, divider valve, selector valve, etc.  The manifold style valve, series VO, can be easily converted from N.C. (normally closed) to N.O. (normally open) by merely turning over the switch cover. 

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

IS3000

Non inductive (A) Non inductive (A) IS3 10 Model Load Load resistance Light load Inductive load Motor load Load resistance IS3100 (Gasket piping) IS3000-02 (Rc 1/4 thread) Circuit Rated voltage (V) N.O.

CL

is locked without a load.

ZX

Stabilize the source pressure by providing a tank and a vacuum regulator. Provide a vacuum switch valve to individual lines.

CL

If there is a risk of contact, provide safety measures such as a cover or a system that uses sensors that will activate an emergency stop before contact is made. 2. Use a balance circuit in which lurching of the piston is taken into consideration.

VER2000/4000

OFF state { A R1 (Exhaust air) P B (Supply air) F1 < F2 condition: See figure q. ON state { { Immediately after turning on F1 > F2: See figure e.

NVEPA|VEFseies

Mounting Amplifier Single mounting Ho.izontally Q r A vertica,,y F Multiple mounting + -f -t] + -ti n n n h n t t t l t t l t I i u ! L l !

Electro-Pneumatic Valve NVEP/NVEF Series

Mounting Amplifier Single mounting Ho.izontally Q r A vertica,,y F Multiple mounting + -f -t] + -ti n n n h n t t t l t t l t I i u ! L l !

•

(A,MR~~N '(lmjQ' . 180 600 1100 1190 [Ereo flaw) Effettive ~IOnal 11.6 17 2.9 5.2 18.4 5.4 9.3 'ttrea mm 2 . N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .