Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

Series 12-REA Sine rodless cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 Although speed adjustment is possible with

Lock-Up Valve IL201/211/220 Series

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 171 A IL201/211/220 Series Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

IS3000

Non inductive (A) Non inductive (A) IS3 10 Model Load Load resistance Light load Inductive load Motor load Load resistance IS3100 (Gasket piping) IS3000-02 (Rc 1/4 thread) Circuit Rated voltage (V) N.O.

CL

is locked without a load.

ZX

Stabilize the source pressure by providing a tank and a vacuum regulator. Provide a vacuum switch valve to individual lines.

CL

If there is a risk of contact, provide safety measures such as a cover or a system that uses sensors that will activate an emergency stop before contact is made. 2. Use a balance circuit in which lurching of the piston is taken into consideration.

VER2000/4000

OFF state { A R1 (Exhaust air) P B (Supply air) F1 < F2 condition: See figure q. ON state { { Immediately after turning on F1 > F2: See figure e.

NVEPA|VEFseies

Mounting Amplifier Single mounting Ho.izontally Q r A vertica,,y F Multiple mounting + -f -t] + -ti n n n h n t t t l t t l t I i u ! L l !

Electro-Pneumatic Valve NVEP/NVEF Series

Mounting Amplifier Single mounting Ho.izontally Q r A vertica,,y F Multiple mounting + -f -t] + -ti n n n h n t t t l t t l t I i u ! L l !

•

(A,MR~~N '(lmjQ' . 180 600 1100 1190 [Ereo flaw) Effettive ~IOnal 11.6 17 2.9 5.2 18.4 5.4 9.3 'ttrea mm 2 . N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

VXZ

Normally open VXZ 2232 02 1 G N.O.

LEC-OM02904

B2B2 3 rev 1 (2) (1) 200 TM MR Configurator2 PC02 MBR (MBR)OFF(Tb) 0 ms 0 1000 PC03 *ENRS 0h 0 0 A B AB CCW CW A A 0 B B A A 1 B B 0 1 0 1 PC04 **COP1 C-1 0h 0 0 0 02 14 1()(16) 11.1.2 02 1: 4 116 11.1.2 5 21 5 No.

PSxx-OMV0008CN

* 1015 10 1% 2162 LCD * -8No.PS-OMV0008CN-E ISE70G 02 L2 M 3 Y K T ISE70G 0~1 MPa ISE75G 0~2 MPa ISE76G 0~5 MPa ISE77G 0~10 MPa ISE78G 0~16 MPa 2 A A B B 02 Rc1/4 N02 NPT1/4 F02 G1/4 :ISO1179-1 1 M12 5m M12 5m T S : L IO-Link/1+2 NPNorPNP L2 1 M SI2 1 2kPaMPa / A ZS-50-A M46 2 B ZS-50-B M46 2 ZS-48-A ZS-31-B 5 m M12 ZS-31-C 5 m -9No.PS-OMV0008CN-E M12 4 24 OUT1 IO-Link

PSxx-OMV0003CN

ZS-50-A) A M4X6L B(ZS-50-B) B M4X6L -14No.PS-OMV0003CN-G -02-N02 8~12 Nm -F02 4~5 Nm 24 () -15No.PS-OMV0003CN-G ()336 336 -16No.PS-OMV0003CN-G FG M12 M12 (Port Class A) 1 DC(+) DC1224 V 2 OUT2 2 3 DC(-) 0 V 4 OUT1 1 IO-Link 1 L+ DC1830 V 2 DO 2 3 L0 V 4 C/Q (IO-Link)/1(SIO) -17No.PS-OMV0003CN-G NPN 2 DC(+) OUT1 OUT2 DC(-) PNP 2 DC(+) OUT1 OUT2 DC(-) IO-Link L+ C/Q IO-Link

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

A void A void A void A void A void A B A B A B A B A B A A A B A B A B A A A A 6 7 8 9 10 11 12 13 14 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 15 0 0 1 2 3 4 5 SC type OMRON SYSBUS wire system compatible SD type Sharp Satellite I/O link system compatible Terminal block (LED) nomenclature ADDRESS NO. STATION NO.

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL