Solenoid Direction: Opposite side of A port (A port bottom ported for Type 40), Type: A Port Bottom Ported, Stations: 10, Port Size: Rc 1/8, Thread: NPTF, Bracket: -

Solenoid Direction: Opposite side of A port (A port bottom ported for Type 40), Type: A Port Side Ported; 42S: Solenoids on the Same Side of A Port, Stations: 10, Port Size: Rc 1/8, Thread: -, Bracket: -

Solenoid Direction: Same Side of A Port, Type: A Port Side Ported; 42S: Solenoids on the Same Side of A Port, Stations: 10, Port Size: Rc 1/8, Thread: NPTF, Bracket: -

Solenoid Direction: Opposite side of A port (A port bottom ported for Type 40), Type: A Port Side Ported; 42S: Solenoids on the Same Side of A Port, Stations: 10, Port Size: Rc 1/8, Thread: NPTF, Bracket: -

Solenoid Direction: Opposite side of A port (A port bottom ported for Type 40), Type: A Port Side Ported; 42S: Solenoids on the Same Side of A Port, Stations: 10, Port Size: Rc 1/8, Thread: NPT, Bracket: -

Series: VQ20, Stations: 20 Stations, Option: None, Thread: NPT3/8

CATALOG

4, 5, 6, 8, 10 12 10 2, 3, 4, 5, 6, 8, 10 20 15 5, 10, 15, 20, 25, 30 30 25 5, 10, 15, 20, 25, 30, 40 60 32 5, 10, 15, 20, 25, 30, 40 60 40 5, 10, 15, 20, 25, 30, 40 60 Courtesy of Steven Engineering, Inc. !

A

, 10 12 10 2, 3, 4, 5, 6, 8, 10 20 15 5, 10, 15, 20, 25, 30 30 25 5, 10, 15, 20, 25, 30, 40 60 32 5, 10, 15, 20, 25, 30, 40 60 40 5, 10, 15, 20, 25, 30, 40 60 Courtesy of Steven Engineering, Inc. !

Electric Actuators

20 10 20 20 20 20 LG1H20 LG1H21 LG1H21 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium

Table of Contents

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Table of Contents

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Table of Contents

point L (mm) Gripping point L (mm) 15 15 5 5 10 10 20 20 25 25 30 30 MHW F F MRHQ MHS3-20D MHS3-20D 40 Pressure 0.6 MPa Misc. 35 Pressure 0.6 MPa 35 30 External grip 0.5 MPa 0.5 MPa DGripping force (N) Gripping force (N) 30 25 25 20 20 15 15 0.4 MPa 0.4 MPa F 200.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 10 10 5 5 0 0 5 5 25 25 10 10 15 15 20 20 30 30 35 35 Gripping point L (mm) Gripping point L (mm

ZP

(mm) 10 10 A8 10 to 16 M8 x 1 13 13 A10 20 to 32 M10 x 1 16 16 A14 40, 50 M14 x 1 20 20 25 25 Vacuum entry port 32 32 B5 M5 x 0.8 40 40 50 50 Material N NBR S Silicon rubber Pad type U Urethane rubber F Ball joint type F Fluoro rubber GN Conductive NBR GS Conductive silicon rubber 20 and larger are manufactured upon a receipt of order.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection T thread 10 20 30 40 50 04 8 4 10 13 16 A10 27.7 2.5 N S U F GN GS Vacuum inlet: Built-in One-touch fitting Pad diameter: 20 to 50 (Buffer stroke: 20 to 50 st) 06 10 6 J K ZP T F 10 06 31.8 10 6 4.5 08 35.9 14 8 6 20 30 50 20 25 32 40 50 A14 Applicable tubing O.D.

Table of Contents

, 15, 25 mm For 10 to 32 For 40, 50 Buffer stroke 10, 20, 30, 40, 50 mm 10, 20, 30, 50 mm Pad Type Flat Pad form Thin flat/Thin flat with ribs Flat with ribs Deep Bellows 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20, 25, 32, 40, 50 Pad dia.

ZP

(mm) Stroke (mm) 20 40 50 30 +10.5 +12.5 +22.5 +24 10 to 16 +37.5 +40 +66.5 20 to 50 13-11-114 Series ZPR Vacuum Pad: Ball Joint Type Lateral Vacuum Entry with Buffer 20 25 32 ZPR F 10-0-A10 (With buffer) 10 13 16 J K J K ZPR F 10-0-A14 (With buffer) S S M10 x 1 M14 x 1 Hexagon width across flats 14 3 I Hexagon width across flats 19 3 5 Hexagon width across flats 10 J ZX Applicable tubing

Fluoropolymer Piping Equipment

Connection threads Rc/NPT B C E E H L1 L1 L2 M Min. port size Y L2 M LQ3L11-F 4 1/8" 3.5 4.8 10 9 11 28.5 27.5 19.5 14 2.5 18.5 LQ3L12-F 3 2 LQ3L21-F 6 1/8" 4 6 17 16 16 34.5 33.5 20 20 4 18.5 LQ3L22-F 1/4" 22 21.5 LQ3L31-F 10 1/8" C (E, E) H C L1, L1 7.5 18.5 LQ3L32-F 8 6.4 LQ3L33-F 10 1/4" 24 7.5 21.5 LQ3L34-F 8 6.4 LQ3L35-F 10 3/8" 25.5 7.5 25 LQ3L36-F 8 6.4 LQ3L41-F 12 1/4" 6 10 24 22

AC Servo Motor Driver (Pulse input type/Positioning type ）

frame 10 A 20 Note 1.

Hydraulic

limit chart: Bore sizes 32 & 40 Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation F F F F F F F F F F F Bore size 32 B-rod 2000 5 2 4 8 3 7 1 1000 6 500 Stroke (mm) 100 50 10 0.1 0.5 1 5 10 20 Load (kN) Bore size 40 B-rod C-rod 3 7 5 2 4 3 7 2000 4 8 1 5 8 6 2 1 1000 6 500 Stroke (mm) 100 50 0.5 1 5 10 20 0.5 1 5 10 20 Load (kN

ZP

Product specifications Pad diameter Mounting thread size Nut tightening torque ZP (02 to 08) U, B ZP (10 to 16) UT, CT ZP (2004 to 4010) U M8 x 1 2 to 16 2004 to 4010 1.5 to 2.0 Nm ZP (10 to 32) U, C, B, D ZP (10 to 16) F ZP (40, 50) U, C, B, D ZP (20 to 50) F 10 to 32 2.5 to 3.5 Nm M10 x 1 20 to 50 6.5 to 7.5 Nm M14 x 1 Heavy-duty Pad Product part no.