45

T1) terminal block) -1A: +COM -1NA: COM SX3000-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

C95

Nil Without auto switch Bore size B L F G C D T Basic/without bracket style Axial foot style Rod side flange style Head side flange style Single clevis style Double clevis style Center trunnion style B L F G C D T For the applicable auto switch model, refer to the table below. 32 40 50 63 80 100 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Rod Single rod Double rod Nil W Stroke (mm) Refer to Standard

PF2A/PF2W

Digital Flow Switch, High Temperature Fluid Type For Water Series PF2W How to Order Integrated display type PF2W7 20 T 03 27 Flow rate range T Temperature range Unit specifications 0.5 to 4 l/min 2 to 16 l/min 5 to 40 l/min 04 20 40 0 to 90C Nil M With unit switching function Fixed SI unit Note) Thread type Wiring specifications Note) Fixed unit: Real-time flow rate: l/min Accumulated flow

P

The same symbol Construction Replacement of the symbol Without Buffer ZX T ZP 02 A5 UN [Pad model no.] ZR ZM Symbol 1 Pad dia. 02 to 08 ZH 2 10 to 16 3 20 to 32 4 40, 50 ZU ZL T 1 ZP A5 [qAdaptor] ZF ZP With Buffer ZCU Vacuum related T ZP 16 K20 A10 06 UGN [Pad model no.]

HRX-OM-S004

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

Pressure Relief 3 Port Valve with Locking Holes

Pressure relief Spacer Spacer with bracket Applicable 3 port valve P/N P/N F.R.L. combination VHS20-D Y200-D Y200T-D AC20-D VHS30-D Y300-D Y300T-D AC30-D VHS40-D Y400-D Y400T-D AC40-D VHS40-06-D Y500-D Y500T-D AC40-06-D VHS50-D Y600-D Y600T-D AC50-D AC60-DNote) Note) VHS50 can be connected to AC60. * New VHS series is compatible with previous model spacer Y200(T)-A to Y600(T)-A.

LEC-OM02904

E ()L d W D T Max.

HRX-OM-T002

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

AS-FPQ/AS-FPG

M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

E (Note)L d W D T Max.

KG

(mm) Model M1 Effective area (mm2) Weight (g) Note) Note) D Applicable tubing Applicable tubing L1 Q P D1 D2 L2 M2 a b 4.2 Nylon Urethane MS KGU06-08 KGU04-06 6 35 39.5 45 49 4 4.2 13.4 25.6 40 6 11 18 27 KGU08-10 KGU10-12 9.7 11.7 13.7 16.1 17 18.5 21 22 10.4 18 16 12.8 20 17 15.2 24.5 18.5 18.5 12.8 15.2 18.5 20.9 27.5 21 10.4 12.8 15.2 18.5 8 10 12 6 8 10 10.6 17.7 28.4 T Note) D1, D2:

•

ASP with PHot Check Valve enes How to Order ASP S;:30F 0,1 ,0615 t .. , I .""~" Pilot ch".J Body size e diameter size '3: 1/8 standard Applicable tube outsid Millimeter size Inch 06 07 01/4" I 06 '~ 1/4 standard 5 3/8 standard 6 1/2 standard 08 08 05/16" .09 I 10 010 ~1 1 * 03/8' L12 " 012 1211/2" ;~ Type I 3 I Untversal Port size . +' ) PH otport 4' ; ~Y!l1bOl Cylir!

Series PF2W Digital Flow Switch For Water

PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 Pin description 4 4 0.5 0.5 1 DC(+) 16 16 2 2 2 NC/Analog output 40 40 5 5 3 DC() 4 OUT 318 B Series PF2A/PF2W For Air/Water Digital Flow Switch Description Integrated Display Type PF2A710, 750, 711, 721, 751 PF2W704(T), 720(T), 740(T), 711 Remote Type/Monitor Unit PF2A300, 301, 310, 311 PF2W300, 301, 330, 331 Position

AC20-A to AC40-A

Standard Specifications AC20-A AC25-A AC30-A AC40-A AC40-06-A Model AF40-06-A AR40-06-A AL40-06-A AF40-A AR40-A AL40-A AF30-A AR30-A AL30-A AF30-A AR25-A AL30-A AF20-A AR20-A AL20-A Air filter Regulator Lubricator Component Port size Pressure gauge port size Fluid 3/4 1/8, 1/4 1/4, 3/8 1/8 1/4, 3/8 1/4, 3/8, 1/2 Air 5 to 60C (with no freezing) 1.5 MPa 1.0 MPa 0.05 to 0.7 MPa 5 m Class 1

Nozzle Type Ionizer

Repair Parts Emitter assembly IZN10E-NT Body assembly IZN10E A002 06 01 Nozzle type Symbol Type 01 Energy saving static neutralization nozzle 02 High flow rate nozzle 11 Female threads for piping One-touch fitting Symbol Type 06 6: Metric size 07 6.35 (1/4"): Inch size 16 6: Metric size (Elbow) 17 6.35 (1/4"): Inch size (Elbow) Emitter assembly Cartridge assembly IZN10E A003 Input/Output

Quick Exhaust Valve Series AQ 1

13.7 13.7 15.4 6.2 13.7 26.7 40.7 8 10.0 14.7 6 11.6 6 6 11.6 6.2 40.7 AQ340F-06-00 AQ340F-06-06 13.7 19.5 13.7 13.7 6.3 44.8 31.7 13 19.6 11.8 6 11.6 11 6 11.6 6.3 44.8 AQ240F-07-00 AQ240F-07-07 13.7 13.7 15.4 6.2 13.7 27.3 40.7 8 10.0 15.1 6.2 1/4" 12 6 1/4" 12 40.7 AQ340F-07-00 AQ340F-07-07 16.8 20.3 13.7 16.8 7.1 52.2 33.1 20.0 13 11.8 1/4" 13.2 11 1/4" 13.2 7.1 22.2 15-12-4

HRX-OM-R026

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

A-HEC-OM-J004

SV OU T 1 [Tips] OU T 2 AL 2 C OM R D Y DI AL 1 Status when control is stopped Lights up when control is stopped. When control is stopped, the RDY LED lights up.

Mini Free Mount Cylinder

-06 : Applicable to mounting condition 1, 2, 3 and 4. : Applicable to mounting condition 1 and 3.