CU

2 Carbon steel 9 Steel ball 1 Magnetic material 10 Magnet A F D9 type (2) 11 Auto switch 1 NBR 12 Piston gasket 2 NBR 13 Piston seal 1 NBR 14 Rod seal 1 NBR 15 Gasket 3 Free-Mounting Cylinder with Air Cushion Series CU Dimensions 2-cushion needle 2-port 2-P through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Note 7) p: For thread type: M5 and NPT only Note 8) c: Combination available for options: E1, E2, E3, E4. 4 Series ARP20/30/40 Specifications ARP20(K) ARP30(K) ARP40(K) Model Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Fluid Air Proof pressure 1.2 MPa Max. operating pressure 0.7 MPa Ex.) ARP30-02BG For 0.4 MPa setting 0.005 to 0.4 MPa Set pressure range Note 1) Ex.)

VHS20/30/40/50

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

MLU

M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8 36 40 45 53 6 7 8 11 54 68 86 104 26 42 54 64 5 to 300 5 to 300 5 to 300 5 to 300 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth 13 M8 x 1.25 depth 11 Rc, NPT, 1/8 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 KA H2 K MM MM1 NA NB NC ND NE NG NH NH1 NI NJ NS NY P S ZZ ZZ1 NF Model 10 12 14

High Speed Pilot Operated

frequency [Hz] 70 50 150 100 Valve Construction 2-position single 2-position single Standard 5-port specification Made to Order 3-port specification (-X1) q w 3 (EB) 1 (P) 5 (EA) 3 5 1 3 5 1 2 4 2 4 Component Parts No.

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

Air-hydro Unit

VNA VNA 2 1 2 1 2 1 VNA VNA D-X Technical Data 1177

Plate Cylinder with Lock Series MLU

17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8 36 40 45 53 6 7 8 11 54 68 86 104 26 42 54 64 5 to 300 5 to 300 5 to 300 5 to 300 MLUB25 MLUB32 MLUB40 MLUB50 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth 13 M8 x 1.25 depth 11 Rc, NPT, 1/8 M10 x 1.5 depth 14.5 M10 x 1.5 depth 15 KA H2 K MM MM1 NA NB NC ND NE NG NH NH1 NI NJ NS NY P S ZZ ZZ1 NF Model 10 12 14 18 M10 x 1.25 M12 x 1.25 M14 x 1.5

CC

4 Oil port size Rc RS H A (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL H NL P QB QL S T W RZQ CCT639.5 11 0 30 86 3 28 45 53 88 86 64 88 104 3/4 3/8 MI W S CCT1007 13 2 32 120 5 33 65 61 123 116 92 125 139 1 1/2 CCT1607 20 2 46 185 0 29 93 60 183 180 144 185 202.5 1 1/4 3/4 CEP1 L Dimension CE1 (mm) 800 700 600 500 400 300 200 100 50 Effective oil level stroke (mm) CE2 CCT63603.5

Air Cylinder Series MB

(Non-lube) 50 to 700mm/s 50 to 1000mm/s Operating piston speed +1.0 0 +1.4 0 +1.8 0 up to 250: , 251 to 1000: ,1001 to 1500: Allowable stroke tolerance Cushion Note 1) Both ends (Air cushion) JIS class 2 Thread tolerance 1/8 1/4 1/4 3/8 3/8 1/2 1/2 Port size (Rc, NPT, G) JIS Symbol Double acting Basic, Foot, Front flange, Rear flange, Mounting Single clevis, Double clevis, Center trunnion

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Air Cylinder

A AL B B1 C D E F G H H1 J K KA M MM N P S ZZ 32 Up to 300 22 19.5 42 17 31 10 24 8 9 38 6 M5 x 0.8 5.5 8 8 M10 x 1.25 18 1/8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to

ISO Interface

Location and size A, B port 02 Side 1/4 03 Side 3/8 04 Side 1/2 06 Side 3/4 10 Side 1 02B Bottom 1/4 03B Bottom 3/8 04B Bottom 1/2 Size of P, EA, EB port 02 1/4 03 3/8 04 1/2 06 3/4 10 1 Option No option TBU With terminal box SU With SI unit W Splash proof DISTRIBUTED BY: NATIONAL AND WORLDWIDE SERVICE NETWORK FOR A BRANCH OFFICE NEAR YOU, CALL United States Branch Offices Oceania SMC Corporation

ZSE5/ISE5

~g: D Sll:PR,~~RE~'mCil 0 0 M N '" 6 ;e;V 'P -$~ 11:rn I~ tP 00 lR ;l=i I I 12.3 I , 28 SMC CORPORATION ~. 1164,SH1MBASHI,MINATO-KU,TOKYO 10S,JAPAN Tel:03-3502-2740 Fax:03-52517240 l si printing January 1995.0-036,P-46(M) Augusl 1996, 49(RP) Specifications are subject 10 change without prior notice Printed In Smgapore and any obligation on the part of the manufacture,

Microprocessor-Controlled Electro-Pneumatic Regulator ITV2000 EASY PROGRAMMING GUIDE

Page 2 last updated 11/03/03 10:05 AM Microprocessor-Controlled Electro-Pneumatic Regulator ITV2000 EASY PROGRAMMING GUIDE INPUT SIGNAL CURRENT SIGNAL TYPES (ITV20 -0 , ITV20 -1 ) Supply Voltage VS Input Signal A 24VDC (ITV20 0) 4~20mA (ITV20 -0 ) 12VDC (ITV20 1) 0~20mA (ITV20 -1 ) VOLTAGE SIGNAL TYPES (ITV20 -2 , ITV20 -3 ) Supply Voltage VS Input Signal VIN 24VDC (ITV20 0) 0~5VDC (ITV20

Microprocessor-Controlled Electro-Pneumatic Regulator ITV2000 EASY PROGRAMMING GUIDE

FOR TECHNICAL SUPPORT PLEASE CALL 1-800-762-7621 Page 6 last updated 11/03/03 10:05 AM

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 100 200 205 M5 standard 1/8 standard 1/4 standard 3.2 4 6 8 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" Use 1/8" tube.

Clean Regulator

ITVX Specifications PVQ VY1 SRH30 SRH40 SRH31 SRH41 Model Non-relief Relief Relief mechanism VBA VBAT Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Port size AP100 Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2 Fluid Grade B Air, N2, Ar, CO2, Water Air, N2 1.5 MPa Proof pressure 1 MPa Max. operating pressure Low pressure type High pressure type 0.02

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.