Model: 3000 (SV3000), Wiring: 1A (Single), Fitting: C6 (With One-touch Fitting for 6mm)

Model: 2000 (SV2000), Wiring: 1A (Single), Fitting: C6 (With One-touch Fitting for 6mm)

Part Number Description: BOLT (VVQC1000-T0-1)   Product Line: V   Product Line Description: VALVE   Family Code: 324   Family Description: VQ4000 VALVE SOL 4/5-PORT   Class Code: 21   Part Code: 2   Reference Code:  J   PDF Documentation: PDF   Click here to report information errorImage shown may not match exact part number

Part Number Description: BOLT (VVQC1000-T0-1)   Product Line: V   Product Line Description: VALVE   Family Code: 324   Family Description: VQ4000 VALVE SOL 4/5-PORT   Class Code: 21   Part Code: 2   Reference Code:  J   PDF Documentation: PDF   Click here to report information errorImage shown may not match exact part number

Part Number Description: MOUNTING SCREW VVQC1000-70A-5   Product Line: V   Product Line Description: VALVE   Click here to report information errorImage shown may not match exact part number

Part Number Description: BOLT (VVQC1000-T0-1)   Product Line: V   Product Line Description: VALVE   Family Code: 324   Family Description: VQ4000 VALVE SOL 4/5-PORT   Class Code: 21   Part Code: 2   Reference Code:  J   PDF Documentation: PDF   Click here to report information errorImage shown may not match exact part number

Model: VQC2000, Wiring: Double Wiring, Port Size: For 6mm One-touch fitting, Check Valve Option: -

Model: 2000 (VQC2000), Wiring: D (Double Wiring), Port Size: C6 (For 6mm One-touch fitting)

2

D H Note) D is maximum diameter.

VFS

1, Metal joint q, w, O-ring t, y End plate (D) !2, Metal joint q, w, Gasket e End plate (D) !2, Metal joint q, w, Gasket e 02 03 VVFS3000-1A-1Plug-in type Manifold block assembly !0 Non plug-in type 02 03 VVFS3000-1A-2VVFS3000-2A-1 VVFS3000-2A-2 VVFS3000-3A-1 VVFS3000-3A-2 Plug-in type End plate (U side) assembly End plate (D side) assembly !1 Non plug-in type Plug-in type !

LEC-OM07605CN

(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

Vahs e, Gasket, Manifold / Subphftn Base Blnnk PlateAss'g DXT192-13-1A EXH Relocation SpacerAss'y oxT192-21-1A -*t\ f i"oor*n"o,ro" s.'.. lT ll I Base oounred tYPe *-l i.,.,!t, i J ,li,l,,,'i '1 "'\" ')'t' :' t't I I ir --)2' i .. il ."'i 3sskt i D-tn6t1oi .'.'

Title not found

Vahs e, Gasket, Manifold / Subphftn Base Blnnk PlateAss'g DXT192-13-1A EXH Relocation SpacerAss'y oxT192-21-1A -*t\ f i"oor*n"o,ro" s.'.. lT ll I Base oounred tYPe *-l i.,.,!t, i J ,li,l,,,'i '1 "'\" ')'t' :' t't I I ir --)2' i .. il ."'i 3sskt i D-tn6t1oi .'.'

High Vacuum Angle Valve

D-G

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),

o

ih* tlrb ldt vJ300-10-1A Type 42,42R,542 and S42R Applicable valves Type 42 & S42 NVJ314-O NVJ3140-O NVJ324-O NVJ3240-O Type S42 NVV3J3O42 Poollion qf A port ts | End cover side S I Solenoid side Typ 42R & S42R NVJ314R-O NVJ324R-O mli|ll!ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !

o

ih* tlrb ldt vJ300-10-1A Type 42,42R,542 and S42R Applicable valves Type 42 & S42 NVJ314-O NVJ3140-O NVJ324-O NVJ3240-O Type S42 NVV3J3O42 Poollion qf A port ts | End cover side S I Solenoid side Typ 42R & S42R NVJ314R-O NVJ324R-O mli|ll!ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

ih* tlrb ldt vJ300-10-1A Type 42,42R,542 and S42R Applicable valves Type 42 & S42 NVJ314-O NVJ3140-O NVJ324-O NVJ3240-O Type S42 NVV3J3O42 Poollion qf A port ts | End cover side S I Solenoid side Typ 42R & S42R NVJ314R-O NVJ324R-O mli|ll!ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !

XL-OMY0002

XLD50-2-9-1A XLD40-2-9-1A ** XLD50-2-9-1A ** AS568-009V AS568-016V AS568-016V AS468-009 ** AS568-016 ** AS568-016 ** 63 80 100 160 AS568-043V AS568-045V AS568-050V AS568-167V AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** AS568-233V B2401-V85V AS568-349V B2401-G155V AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** S XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A

VQ4000

(Except L kit) U D U D The maximum and minimum number of stations are varied depending on kit. (Refer to the table below.)