CL

CL CL1 Rod Side Flange Style Bore size (mm) MLGC B BZ FT FD FX FZ FY Rod side flange style: CLG1FN Head side flange style: CLG1GN 25 30 30 36 65 75 75 82 38 45 45 52 52 60 60 66 5.5 5.5 6.6 6.6 57.5 6 7 7 8 20 25 32 40 CNG 69 69 76 MNB For long stroke, refer to page 9-2-32.

Compact and Lightweight

ZQ ZR Body Ported Ejector Specifications 1 ZB Symbol ZA Vacuum pressure reached2 [kPa] Maximum suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Weight3 [g] Type S Type L Type S Type L Model Nozzle nominal size [mm] 1 3 ZX 2 ZH05DA 0.5 6 13 13 5.0 ZM ZH07DA 0.7 12 28 27 5.2 Body ported ZHDA 48 ZH10DA 1.0 26 52 52 6.1 ZL ZH13DA 1.3 40 78 84 12.4 90 ZH15DA 1.5 58 78 113 13.4 ZH ZH

Compact Cylinder

45 12 16 52 9.5 M8 x 1.25 67 3 14 7 38 5.5 M6 x 1.0 9 14.5 11 5 1 17 53 45 16 20 64 10.5 M10 x 1.5 82 2 17 8 46.5 6.6 M8 x 1.25 10.5 13.5 11 5 1.6 17 57 49 16 20 74 14.5 M10 x 1.5 96 3 17 8 56.5 6.6 M8 x 1.25 10.5 15.5 11 5 1.6 17 7 ISO Standards [ISO/21287] Compact Cylinder Series C55 Mounting Bracket Foot bracket Flange bracket Hexagon socket head cap screw (accessory) 2 x FD 4 x FD FL

70astamb1

G H MB J K MM N P S V W ZZ C B flats 19.5 27 32 32 37 37 32 40 50 63 80 100 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 135 139 156 156 190 190 46 52

CQM

320 343 366 389 182 205 228 250 274 297 IN 113 189 264 25 40 0692 0823 421 446 471 497 269 295 320 345 370 396 OUT 147 245 344 50 1133 1341 701 740 780 821 500 540 580 620 661 IN 181 302 422 32 With Auto Switch (Built-in magnet) OUT 241 402 563 Unit: g IN 317 528 739 Cylinder stroke (mm) Bore size (mm) 5 40 OUT 377 628 880 10 100 40 45 50 75 15 20 25 30 35 12 IN 495 825 1150 59 52

MGC

For details, refer to page 8-30-52. Wide range detection type, solid state auto switch (D-G5NBL type) is also available. For details, refer to page 8-30-50.

MGQ

For details about auto switches with pre-wire connector, refer to page 8-30-52. 8-20-2 3 Compact Guide Cylinder Series MGQ Specifications Air cylinder integrated with guide has achieved antilateral load and high nonrotating accuracy.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Stroke X X Y LZ LX (mm) Stroke range Bore size (mm) LS ZZ LD Y X LH LT LX LY LZ Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 20 25 32 40 50 63 80 86 107 120 138 148 165 192 114 136 166 190 210 236 265 6.6 6.6 9 9 11 13 17 22 24 27.5 34 40 47 59 13 14 16 19 22 24 30 58 62 70 80 96 110 146 72 75 88 100 120 140 180 0 0 0 0 1 3 3 16 16 22 24 32 36 40 41.5 45.5 52

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

) 10 A (Table traveling distance)2 52 (115.5) 65 L Cable length 250 Auto switch groove (1 row per side) 58 38 24 (4) [2]4 2 [(4)]4 (57.5) 6.5 24 Motor cable 6 48 38.5 (2.4) M4 x 0.7 thread depth 8 (F.G. terminal) 120 D x 120 (= E) B F 10 3H9 (+0.025 0 ) depth 35 n x 4.5 48 5 4 3H9 (+0.025 0 ) depth 35 3H9 (+0.025 0 ) depth 35 8 G H Motor option: With lock (160.5) Cable length 250 65 20

Electromagnetic Digital Flow Switch

S Without bracket (Bottom view) Model Port size A B C D E F G H I J K L M N O P Q R S T U LFE1l3l 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE1l4l 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE2l 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 62 53 4.6 9.5 14 56 38 2.5 depth 8.5 2.6 LFE3l 1 120 90 55 32 73 100 106

ITVH

Right angle type cable connector 3 m 52 10 ARJ (33) Straight type cable connector 3 m AR425 to 935 52 12.5 ARX AMR Setting part ARM 10 M12 x 1 Cable connection thread (Plug type) 5.5 8 ARP 111 11 Digital pressure display IR-A M5 x 0.8 Solenoid valve EXH Breathing IR M4 x 0.7 depth 8 F.G.

Air Cylinder

48 239 214 0.84 0.64 45 52 214 0.68 50 65 60 256 229 1.43 1.00 56 65 229 1.09 63 75 70 256 235 1.69 1.28 67 75 235 1.51 80 95 88 290 258 2.95 2.18 85 95 259 2.67 100 114 110 290 268 4.18 3.48 * Compared at 100 mm stroke Reduces labor time.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Station 2 52 43 Station 20 340 331 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 Station L1 L2 335 5 Port Solenoid Valve 10-SYJ5000 Flat Ribbon Cable Manifold [ ]: AC 10-SS5YJ5-20PStations -00 Directional Control Valves Air Grippers Modular F. R.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Pressure Switches/ Pressure Sensors 12 12 e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n 10 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62.1 41.7 25.7 39.4 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 P=17.5 94.9 76.2 7.5 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4 : 6 : 8 L n Formula: L1 = 17.5n + 52

LV50-OMQ0002

12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g LFE26 62 53 4.6 9.5 14 56 38 2.5 depth 8.5 2.6 Approx. 70g LFE38 62 53 4.6 3.5 20 68 43 2.5 depth 8.5 2.6 Approx. 70g -71No.LV50***-OMQ0002-G Dimension of the cable with M12 connector lead wire (LFE-1-A3) 4 Black Blue 3 White 2 1 Brown -72No.LV50***-OMQ0002-G Revision A : Contents revised in several places.

HRX-OM-Q026

PV SV 5.23 Communication Function HRSH Series 5-86 HRX-OM-Q026 Chapter 5 Display and Setting of Various Functions 52. Select a function with [] key or [] key, and press [SEL] to enter.

AC Servo Motor Driver (Pulse input type/Positioning type)

Acceleration/de celeration time 0 ~ 50 ms Set the time until the servo motor reaches/stops to the rated speed (3000 r/min) Move distance 0 ~ 2147483647 pulse Sets movement distance. 52 - 5.6.2 Motorspeed Configuration Motorspeed (r/min) configuration.

JXCx-OMT0032CN

./ . 44 15.1 . 44 15.2 . 45 15.3 . 46 15.4 . 47 15.5 . 48 15.6 . 48 16. . 49 2 - 16.1/ . 49 16.2 . 49 16.3 . 51 16.4 . 51 16.5 . 52 16.6 . 52 16.7 . 52 3 - LEC-G Series/ 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines

mb1

G H MB J K MM N P S V W ZZ C B flats 19.5 27 32 32 37 37 32 40 50 63 80 100 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 135 139 156 156 190 190 46 52

Series CQ2

52 4-19 through 162 204 4.5 3 Note 1) Flat washer 4 pcs. 2 x 4-M22 x 2.5 thread depth 38 102 + Stroke 17 36 M24 x 3 effective thread depth 33 119 + Stroke 162 204 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less.