MTS

54 (64) 48 48 (63) 0 (10) 40 D-M9, D-M9V 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12) D-F9W, D-F9WV 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12) ( ): Denotes the values of D-A9V, D-M9V and D-F9WV.

Refrigerated Air Dryers

K L M N P Q IDF1E Rc3/8 226 410 413 69 101 270 32 38 150 21 330 240 15 IDF2E 51 125 232 138 24 327 IDF3E 473 67 304 33 73 31 36 154 21 330 IDF4E Rc1/2 13 IDF6E 453 498 283 275 455 270 31 42 80 230 32 15 240 80 284 15 IDF8E 485 568 355 300 IDF11E 9 Rc3/4 Refrigerated Air Dryer IDF lE Series Dimensions Model Selection Options Optional Accessories Specific Product Precautions IDF15E1 603 54

JA/JAH/JB/JS

Pneumatic cylinder: 1 MPa or less Rotating angle Operating pressure Basic style Flange style Foot style Hydraulic cylinder: 3.5 MPa or less Standard/Thread nominal size JA6-3-050 JA10-4-070 JA15-5-080 JA15-6-100 JA20-8-125 JA30-10-125 JA40-14-150 JA63-18-150 JA80-22-150 JA100-26-150 JA140-30-150 JA160-36-150 0.5 6 M3 x 0.5 19 Basic style, Flange style, Foot style Mounting 0.5 10 M4 x 0.7 54

Floating Joint

eccentricity U (mm) Operating pressure angle temperature Standard/Thread nominal size JA6-3-050 JA10-4-070 JA15-5-080 JA15-6-100 JA20-8-125 JA30-10-125 JA40-14-150 JA63-18-150 JA80-22-150 JA100-26-150 JA140-30-150 JA160-36-150 6 10 10, 15 15 20 25, 32 40 50, 63 80 100 125, 140 160 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M36 x 1.5 19 54

EXxx-OMY0006CN

I/O . 54 10.6. . 54 10.7. . 59 10.8. Output status unit . 59 10.9. LED . 61 10.10. . 65 10.11. DIP . 65 2 No.EX##-OMY0006CN 10.12. . 68 11. EX245-DX1 . 70 11.1. . 70 11.2. . 71 11.3. . 72 11.4. . 72 11.5. LED . 73 11.6. . 74 12. EX245-DY1 . 75 12.1. . 75 12.2. . 76 12.3. . 77 12.4. . 77 12.5. LED . 78 12.6. . 79 13. . 80 13.1. . 80 13.2.

PFxx-OMP0001CN

No.PF-OMP0001CN-F // PFMB7501 PFMB7102 PFMB7202 2 10 11 12 14 14 16 17 [] 21 OU1OUT2 {3 ] 22 22 [] 24 25 F0 26 F1 OUT1 28 F2 OUT2 36 F3 41 F10 42 F13 43 F20 44 F22 45 F30 46 F31 47 F80 OFF 48 F81 49 F90 50 F98 52 F99 53 54 58 59 61 62 62 65 67 -1No.PF-OMP0001CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

HRX-OM-M090

5.19.1 Communication function . 5-54 5.19.2 Communication function setting and checking . 5-54 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-M090 Contents 6.3 Option T [High-pressure

CEx-OMQ0011

OUTPUT 35 9-3-5. 36 10 3744 11 11-1. 11-1-1. 45 11-1-2. 4548 11-1-3. 48 11-2. 11-2-1. 4952 11-2-2. 53 11-3. 11-3-1. 53 12 12-1. 54 12-2. 54 13 13-1. 5557 13-2. () 5758 14 14-1. 5960 - 1 1 1 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414:Pneumatic fluid powerGeneral rules relating to systems ISO 10218-1:2006Robots for industrial environments-Safety requirements-part1

CQS

62 69 77 12 50 61 71 81 92 102 16 89 104 120 136 152 167 183 199 215 231 20 127 146 166 186 206 227 247 267 287 308 25 Minimum Operating Pressure Unit: MPa Weight/With Auto Switch(Built-in magnet) Unit: g Bore size(mm) 12 16 20 25 Stroke (mm) Bore (mm) Min. operating pressure 0.07 0.07 0.05 0.05 5 10 15 20 25 30 35 40 45 50 Allowable Kinetic Energy Unit: J Bore size(mm) 46 54 62 70 77 85

SX

SX520 SX720 Type 41 Compact bar stock type Individual wiring SX340 P. 1-6-54 The base mounting facilitates maintenance after valves are changed. SX540 Type 41 Compact bar stock type Flat cable SX340 P N P. 1-6-64 A 26 pins MIL connector permits one-touch wiring of external cables in a bundle.

SYJ3000/5000/7000

73 75 115 58 81 SV 53 71 0.69 0.44 0.39 0.12 0.39 0.18 Body ported Base mounted 2 position C4 (One-touch 0.69 0.56 0.57 [0.41] 0.43 0.41 [0.41] 0.41 0.40 0.12 0.40 0.40 0.19 0.15 M5 x 0.8 SYJ520--C4 SZ fitting for 4) 84 126 72 0.37 [0.37] 0.37 0.10 [0.11] 0.10 82 3 position 0.4 [0.37] 0.15 [0.10] SY 54 73 75 115 58 81 53 71 0.70 0.47 0.40 0.12 0.36 0.19 2 position C6 (One-touch SYJ 0.72

Table of Contents

> Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32")

Cylinder with Lock Series CLS

Cylinder With$ Locking Mechanism 48 68 66 54 Be sure to confirm operation after mounting.

Cylinder with Lock Series CNS

E1 NX 25 + 0.084 0 28 + 0.084 0 32 + 0.1 0 32 0.1 0.3 36 0.1 0.3 40 0.1 0.3 I-12 I-14 I-16 125 140 160 33 27 46 54 100 M30 x 1.5 L1 U1 39 30 48 54 105 M30 x 1.5 39 34 55 60 110 M36 x 1.5 RR1 Rod End Nut 30 d Material: Rolled steel (mm) Applicable bore size (mm) d H B C D Part No.

Plate Cylinder with Lock Series MLU

DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 7 Plate Cylinder with Lock Series MLU Single knuckle joint Double knuckle joint MM C (R1) Sphere, ball R (R1) MM NDH10 NDH10 A1 A1 NX+0.4 +0.2 E1 NX -0.2 -0.4 NZ E1 U1 U1 L1 NO NL L1 NO NL (mm) Part no.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

S NN N NA NB NC ZZ -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 18 13 26 10 16 12 8 41 5 8 30 5 M8 x 1.25 1/8 81 M22 x 1.5 13 26 19 15 138 23 f8 15.5 to 800 25 22 17 32 12 16 12 8 46 6 8 32 5.5 M10 x 1.25 1/8 81 M24 x 1.5 13 28 19 15 143 25 f8 19.5 to 800 32 24 22 38 16 19 12 8 53 8 9 40 7.5 M14 x 1.5 1/8 87 M30 x 1.5 13 36 19 15 159 31 f8 21 to 800 40 24 24 41 18 21 14 11 54

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

X X LS + Stroke Y Y LX ZZ + Stroke LZ (mm) Bore size (mm) Stroke range (mm) Effective thread length (mm) A B1 B2 D E F GA1 GA2 GA3 GB1 GB2 GB3 H H1 H2 I K 20 18 13 26 10 8 16 10 12 12 8 10 10 41 5 8 31 5 15.5 25 to 300 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 5.5 19.5 25 to 400 32 24 22 38 16 14 19 11 13 13 8 10 10 53 8 9 40 7.5 21 25 to 500 40 24 24 41 18 16 21 12 17 17 11 16 16 54

Air Pilot Operated Series NVSA

qtu.s 4 a 9 &cssd .on-locking oprslor (hctudes O-dm *a0 Sc/sl/ M4 r 30 $lh lashf SERIES NVSA 3125 DIRECTIOI{AL AIR VALVE DIMENSIONS/PARTS LIST NVSA 3125 ' o DIMENSIONS A B c D E F G H J K M t{ o P R s 3.54 (90) '1.77 (4s) 0.94 (241 o.24 (6) 0.31 (8) 2.24 (sa 2.13 (54) 0.83 121't '1.06 (27], 0.87 0.39 00) 0.79 (20) 0.98 \251 2.13 (54) 0.39 (9.9) 0.78 (19.8) Millimeters In Parenlheses PARTS

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Assembly No. 8 One-touch fitting 8 One-touch fitting SY3000-55-1B SY3000-54-1C 6 One-touch fitting SY3000-54-2C Series SY5000 Series SY5000 Port size Assembly No. Port size Assembly No. 10 One-touch fitting SY5000-55-1B 10 One-touch fitting SY5000-54-1C Series SY7000 Series SY7000 Port size Assembly No.

AC Servo Motor Driver (CC-Link Type)

Refer to "LECSC2-T Operation Manual (Simplified Edition)", section 5.7 for how to set the Point table. -26- LEFB25 LEFB25U LEFB32 LEFB32U LEFB40 LEFB40U Lead symbol S Series Lead 54 Parameter *1,*2 Para. Initial value Recommended value No.