HRL

(Example 2) 3 4.7 k External switch 16 4.7 k Operation mode request (Momentary) 4 4.7 k 24 VDC 6 Power supply usage example Contact output 1: Operation status [Operation ON] This products power supply usage example (Example 1) 19 Contact output 2: FLT [Fault alarm occurrence OFF] 7 24 VDC 1 Contact output 3: WRN [Warning alarm occurrence OFF] Circuit diagram 2 20 14 I n t e r n a l c i r

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Model K VCKL0604-02F H KFN-06-X2 K VCKL0806-02F H KFN-08-X2 K VCKL1075-02F H L Union nut C3604BD + Ni plated 1 1 set unit KFN-10-X2 K VCKL1008-02F H K VCKL1209-02F H KFN-12-X2 K VCKL-02F H K VCKL0604-02F H KFS-06 K VCKL0806-02F H KFS-08 K VCKL1075-02F H M Sleeve Nylon 1 1 set unit KFS-10 K VCKL1008-02F H K VCKL1209-02F H KFS-12 N Gasket VCKK-4-1 Nylon 1 10 set unit 23 Troubleshooting (Valve

High Purity Chemical Valve

Note LVH 1 Actuator section PP y t r Integral fitting type PFA LVD Stainless steel With reducer 2 Body Threaded type PPS LVQ i PFA 3 Diaphragm PTFE LQ1 End plate 4 PPS PFA body only Insert bushing 5 PFA LVN 6 Nut PFA t y Lever PP 7 TL/TIL Collar PFA 8 LQ3 Dimensions/Integral Fitting Type N G A D L 4 x M K Non-locking type Locking type 60 (H2) (H1) C B A E J B (F) Dimensions (mm) A B C D

Series 10-, 21- AW-B Filter Regulator

Filter Regulator AW-B Series 1021AW K-B Series 1021Filter Regulator with Backflow Function How to Order Clean series "J" must always be selected. K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model L2 K J M N t W H E Panel thickness (Max. t) J L1 W 12 19 10 12 6 8 10 4 6 19 LQ2P22 LQ2P21 14.5 N (M) 6 18 19.9 7 16 31 73 LQ2P52 LQ2P51 LQ2P42 LQ2P41 LQ2P33 LQ2P32 LQ2P31 (E) (E) 36 83 H 20.5 6 22 24 26.2 7 24 L1 Class 2, 3 42 34.5 95 82 L2 24.5 Panel aperture K 9 28 30 33.1 7 30 21 49 40 110 93 (M) 30.5 9 32 36 40 10 36 26 47 108 H Inch sizes Courtesy of Steven Engineering, Inc.

VQ4000

Series VQ4000 Base Mounted Plug-in Unit How to Order Manifold VV5Q 4 1 08 K C8 F U1 Option Series Option None Exhaust cleaner: For D side mounting Exhaust cleaner: For U side mounting Special wiring specifications (Except double wiring) Name plate (T kit only) Symbol 4 VQ4000 Nil CD CU K N SB SD SU W Kit type (2) (2) Manifold (3) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

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PT ports lfeuin-in magna (l-lopuo* ilq-hoa a""t N J K aorh .!

High Purity Fluoropolymer

Model Panel thickness (Max. t) J L K J M N T W H E W 4 6 LQ2P22 LQ2P21 14.5 (M) 6 18 73 19.9 19 7 16 10 LQ2P52 LQ2P51 LQ2P42 LQ2P41 LQ2P33 LQ2P32 LQ2P31 (E) (E) 83 H 20.5 6 8 6 24 26.2 22 7 24 (L) Class 2, 3 95 82 Panel aperture K 12 19 10 12 24.5 9 30 33.1 21 28 7 30 110 93 (M) 30.5 N 9 36 40 26 32 10 36 108 H Inch sizes Class 4, 5 Applicable tubing O.D.

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

5 Port Solenoid Valve, Series VQC

Stations Note 1) K T Kit S Kit With name plate Note 2) (available for T Kit only) TD0 1 to 10 (20) Terminal block box kit The maximum number of stations differs depending on the electrical entry.

IDX-OM-W011

IDX-OM-W011-B / Series IDF1E/2E/3E-10(-A,C,S) IDF3E-20(-A,C) IDF4E-10(-A,C,L,M,R,S,T) IDF4E-20(-A,C,L,M,R,T) IDF6E-10(-A,C,K,L,M,R,S,T) IDF6E-20(-A,C,K,L,M,R,T) IDF8E-10(-A,C,K,L,M,R,S,T) IDF8E-20(-A,C,K,L,M,R,T) IDF11E-10(-A,C,K,L,M,R,S,T) IDF11E-20(-A,C,K,L,M,R,T) IDF15E1-10(-A,C,K,L,M,R,S,T) IDF15E1-20(-A,C,K,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded

Modular Type Regulator Series AR

Back flow mechanism Nil K Without back flow mechanism With back flow mechanism Thread type Nil N F Rc NPT G Optional specifications Port size Applicable model AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) Symbol 1 Note 2) N R Y Z Note 3) Description 0.02 to 0.2MPa setting Non-relieving type Flow direction: Right to left Upward handle Body size Port size

Compact manifold regulator ARM5 Series

V L4=50+T+X 50 SMC H H L L O O S S U U C C P P K K 8 U 57 (at knob locked) DIN rail part no.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

CLA

GR J K L LZ (mm) WHhout boot With boot .

T

9 Tubing Series T Variations K Tubing O.D. Tubing O.D.

ALF400 to 900, ALT-5/-9

) 8 8 . 0 ( 4 9 . 1 ) 0 . 1 ( 1 2 . 2 ) 5 1 . 1 ( 4 5 . 2 ) 5 8 . 1 ( 8 0 . 4 ) 9 . 1 ( 9 1 . 4 ) d r a d n a t s ( d r a u g l w o B t e k c a r B P 4 4 B P 1 4 4 B P 1 5 4 B P 2 5 4 B P 6 4 B F 8 6 e r u t a r e p m e T , 2 3 G V 1 # l i o e n i b r u t e s u , n i m / s p o r d 5 e t a r p i r d l i o g i s p 3 7 f o e r u s s e r p y l p p u s h t i W * s e i r e S T L A N k n a T

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

1 ) 0 . 1 ( 1 2 . 2 ) 5 1 . 1 ( 4 5 . 2 ) 5 8 . 1 ( 8 0 . 4 ) 9 . 1 ( 9 1 . 4 ) d r a d n a t s ( d r a u g l w o B t e k c a r B P 4 4 B P 1 4 4 B P 1 5 4 B P 2 5 4 B P 6 4 B F 8 6 e r u t a r e p m e T , 2 3 G V 1 # l i o e n i b r u t e s u , n i m / s p o r d 5 e t a r p i r d l i o g i s p 3 7 f o e r u s s e r p y l p p u s h t i W * s e i r e S T L A N k n a T d e e F o t u A l

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Refer to Table (1) (including 1 pc. of t). Table (1) ZQ13M--(-Q)Note 1) 4 Ejector assembly (1 pc. each in t and y is included.)

CG5-S

q o i r y t !