SMC Corporation of America
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86.4 Air blow port 8 6 2 x M3 x 0.5 thread depth 10 26 34.7 11 High flow rate nozzle IZN10E-02-X367 (103) 16 92.5 5 5.5 Variable nozzle direction 12 46 18.5 Air blow port 8 4 22 IZN10E Series Made to Order 2 This product is an individually applicable product.

1 8 NBR O-ring 2 x 1.25 2 x 1.25 9 NBR O-ring 4.5 x 1 4.5 x 1 4.5 x 1 4.5 x 1 10 x 1.3 10 NBR O-ring 27.8 x 1.5 JISB2401 P11 JISB2401 P11 27.8 x 1.5 11 NBR O-ring JISB2401 P5 Note 2) JISB2401 P5 Note 2) 12 NBR O-ring JISB2401 P16 Note 2) JISB2401 P16 Note 2) 13 NBR Seal (A) P36203015 P36203015 14 NBR Seal (B) P36203016 P36203016 KT-IR1000 Note 3) KT-IR1010 KT-IR3120 Service

10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra 10 in. (0.25 m) Option: 25 in. (0.62 m) Face seal, Tube weld 0.38 pisg (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 0.49 in3 (8 cm3) 2.76 lbs (1.25 kg) 5) Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Inboard leakage Outboard leakage

side Pilot port (A side) 2-M5 x 0.8 body side 2-4.5 Mounting hole Pilot port (A side) 2-M5 x 0.8 sub-plate side (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 5-3-7 8 Series VZA4000 Dimensions: Base Mounted 3 position closed center: VZA4341--01 02 Pilot port (B side) Body side Pilot port (A side) 2-M5 x 0.8 body side 2-4.5 Mounting hole Courtesy of Steven Engineering, Inc

C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2 46.5 R3 28.6 7.1 Manual override (For C6, C8) M5 X 0.8 external pilot port 10.5 (Only external pilot style (R)) (For C10) (For 02) 38.5

C10: One-touch fittings for 10 60.5 2-4.5 Mounting holes 02: Rc(PT)1/4 41.8 22 2-3.4 Mounting holes 28.5 20 A 4 13 18 SMC 38 Cover dia 1.6 Cross section 0.34mm2 2 46.5 R3 28.6 7.1 Manual override M5 X 0.8 External pilot port 10.5 (C6, C8) (Only exterminal pilot style (R)) 38.5 17.5 (C10) (02) 2-M2.5 X 0.45 Thread length 6 13 9 31.5 24.5 16.5 3 2.5 2-3.4 Mounting holes 4 36 9 6.5 6.5 47.5

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B J A C D E F G H I , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3 x M5 x 0.8 x depth 6 3 x M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 950

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa

03 SO-04 SO-05 NT-02 NT-03 NT-04 AC-NI-50 8 8 9 11 M22 x 1.5 M24 x 1.5 M30 x 1.5 M33 x 2.0 20 25 32 40 30 36.9 43.9 47.3 5 6 8 10 26 32 38 41 12.5 16.5 21.0 23 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 15.0 19.6 25.4 27.7 26 32 38 41 13 17 22 24 Accessory Brackets (Optional) I-type single knuckle joint Bracket L tap 4-J counter bore 20: I-02 25: I-03 Material: Rolled steel 32:

Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer

Common exhaust: VV3P5-41Stations 1-03 (G) (E) (T) (D, Y) (X port) (M5 x 0.8) N.C.

Q [l/min(ANR)] = x D2 x W x (P2 + 0.101) x 60 x C 6 4 x 10 0. 101 VBAT10, VBAT20, VBAT38 Q [l/min(ANR)] = x 1002 x 200 x (0.8 + 0.101) x 60 x 1 = 841 4 x 106 0. 101 Select booster regulator size from flow characteristics table. Refer to page 14-9-3 for flow characteristics.

Port size N M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

Poriing No. of Ports 'xx" M84010-02 Ta"NPTFSide l l M84011-02 7a" NPTF Side: Y.r" Bottom A & B 1 3 MB 4210-02 %"NPTFSid(2); % Botlom(5) 7 t 5 Manifolds *(OptionsT & P Only) Part No. Poding No.of Ports "xx" Subplates .

-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 17 (18) AS22l1FG-02-04(S)A 4 8.2 AS22l1FG-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS22l1FG-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 19 (20) AS32l1FG-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS32l1FG-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-10(S)A 10 15.9 26.7

EX600-ZMA2 EX600-ZMA3 (Specialized for Series SY) Enclosed parts Round head screw (M4 x 20) 1 pc. P-tight screw (4 x 14) 2 pcs. Enclosed parts Round head screw with washer (M4 x 20) 1 pc. P-tight screw (4 x 14) 2 pcs. Valve Plate EX600-ZMV1 EX600-ZMV2 (Specialized for Series SY) Enclosed parts Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 4 pcs.

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C Cooling capacity = Considering a safety

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (For VQZ100) This is used when changing piping location.

Set of long clamping screws ZH2-TB203-A 3 M4 x 70 2 pcs. ZH13DA ZH15DA ZH2-TB204-A 4 M4 x 90 2 pcs. ZH2-TB206-A 6 M4 x 130 2 pcs. Hexagon nut (M4) 2 pcs. ZH2-TB208-A 8 M4 x 170 2 pcs. (ZH2-TB201-A)3 1 M4 x 30 2 pcs. Flat washer (for M4) 2 pcs. ZH2-TB302-A 2 M4 x 55 2 pcs. ZH2-TB303-A 3 M4 x 80 2 pcs. ZH18DA ZH20DA ZH2-TB304-A 4 M4 x 100 2 pcs. ZH2-TB306-A 6 M4 x 145 2 pcs.