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Note 5) The direction of rod end width across flats (12) differs depending on the products.

Contents Bore size (mm) NBR NBR 12 12 12 12 Bumper A Bumper A Bumper A Bumper A Resin Resin Resin Resin 12 12 Bumper A Bumper A Resin Resin 13 !4 13 !4 13 !4 13 !4 Bumper B Bumper B Bumper B Bumper B Resin Resin Resin Resin (Only 63 is common to the bumper A.) (Only 63 is common to the bumper A.) 13 !4 13 !4 Bumper B Bumper B Resin Resin (Only 63 is common to the bumper A.)

No need to readjust the nozzle angle when the ionizer is restarted. eCartridge assembly p. 12 wBody assembly p. 12 Maintenance warning function Monitors emitter contamination or wear continuously and will turn on an LEDs and output signal.

Selection of Dip Switch 53 Chapter 12: Driving 12-1. Setting of Origin Direction 54 12-2. Adjustment of Air Balance 54 Chapter 13: Error Messages & Countermeasures 13-1. Controller 5557 13-2. Brake Units Life Span 58 Chapter 14: Appendix 14-1.

OUTPUT 35 9-3-5. 36 10 3744 11 11-1. 11-1-1. 45 11-1-2. 4548 11-1-3. 48 11-2. 11-2-1. 4952 11-2-2. 53 11-3. 11-3-1. 53 12 12-1. 54 12-2. 54 13 13-1. 5557 13-2. () 5758 14 14-1. 5960 - 1 1 1 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414:Pneumatic fluid powerGeneral rules relating to systems ISO 10218-1:2006Robots for industrial environments-Safety requirements-part1

M2 M3 m2 m3 m4 10 15 25 1 2 1 2 2 2 1.4 CY1F 1.5 3 1.5 5 5 5 2 14 20 14 12 12 12 12 The above values are the maximum allowable values for moment and load. Refer to each graph regarding the maximum allowable moment and maximum allowable load for a particular piston speed.

Flow Direction Symbols on Body Meter-out type Meter-in type Flow Rate and Effective Area Symbol JIS Symbol ASD230F ASD330F ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 Metric size 4, 6 8, 10 1/8" 5/32" 3/16" 1/4" 6 6, 8 1/4" 5/16" 3/8" Tubing O.D. 3/16" 1/4" 1/4" 5/16" 3/8" 3/8" Inch size Flow rate l/min (ANR) Controlled flow (Free flow) 500 600 700 1200 1300 175 295 350 75 {N R/min}

(l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500

M D2 L A D1 M5 X 0.8 M6 X 1.0 36.5 KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S 9 12 37 33 8 16 10.4 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 12 1 8 M5 X 0.8 M6 X 1.0 2.5 3 4.0 4.0 5.6 5.6 12 8 6 17 14 12.8 1 8 1 4

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com With sub-plate S070 B 5 B G Base mounted S070 C 5 B G 32 Body ported Body type Body type Body ported Symbol C Port size Symbol 32 Connection Barb fitting Applicable tubing 3.18/2 Coil voltage 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Electrical entry

Standard Base mounted Universal External pilot Flow Characteristics/Weight Flow characteristics (1) Port size Valve model Weight (kg) Series 2 1 (A P) 1 2 (P A) 3 2 (R A) 2 3 (A R) C [dm3/(sbar)] 3.3 4.0 2.9/2.9 3.1/2.9 6.6 9.1 6.5/7.0 7.9/8.1 12 15 12/12 15/14 Cv 0.86 0.99 0.74/0.76 0.79/0.83 1.6 2.4 1.7/1.8 1.8/1.9 2.9 3.8 2.9/3.1 3.5/3.3 C [dm3/(sbar)] 3.4 3.7 3.3/3.6 4.1/4.1

For Y terminal, it is up to 1.25 mm2 4. c Cable (8) external: 6 to 12 mm Note) For the one with the external dimension ranged between 9 to 12 mm, remove the inside parts of the rubber seal (7) before using. Supply air Install an air filter and a lubricator on the upstream side. Lubrication This solenoid valve requires lubrication. Use turbine oil Class 1 (ISO VG32).

16 16 80 100 112 58 61 75 100 125 138 9 9 12 74 78 100 to 1000 to 1000 to 1000 Rear flange type (G) 4-FD FY B FX FT ZZ + Stroke FZ (mm) Stroke range Bore size (mm) B FT FD FX FY FZ ZZ 40 50 63 12 16 16 80 100 112 58 61 75 100 125 138 9 9 12 74 78 100 190 211 237 to 1000 to 1000 to 1000 4 Series MGZ Construction Parts list Description Material Aluminum alloy Aluminum alloy Aluminum alloy

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Yes 5 V A93V A93 Grommet 12 V 100 V Relay PLC 24 V 2-wire IC circuit A90V A90 5 V,12 V 100 V or less M9NV M9N 3-wire (NPN) IC circuit 5 V 12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V 2-wire Relay PLC Yes Grommet 24 V F9NWV F9NW 3-wire (NPN) Diagnostic indication 2-color display IC circuit 5 V 12 V F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire 12 V . . .

/1) Dimension table 1) The motor mounting plate and coupling are attached but no motor, controller, driver, motor cable and encoder cable are included. 2) Sensors must be procured by the customer. 3) For motor details, please refer to Applicable motors on page 23. 12 3 500 12 3 450 10 2 400 10 2 350 8 1 300 8 1 250 6 0 200 6 0 150 6 0 100 Stroke F E Stroke F E 20 7 900 20 7 850 18 6 800 18

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

V 24 V Connector Grommet Diagnostic indication (2-color display) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Solid state switch Connector 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Diagnostic indication (2-color display) Relay PLC 24 V Yes 12 V 5 V, 12 V 2-wire Water resistant (2-color display) Grommet IC circuit With diagnostic output (2-color display)

28 12 6.2 6.2 14 8 34.1 15.2 14 13.0 10.5 31.1 17 33.9 35.9 40.3 43.2 10 17 38 17 18.5 24 19.5 16.5 12 40.7 20.9 20.9 22 25.5 45.7 24.8 21.3 Reference dimensions after R(PT) installation.