CG5-S

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 <R type> <R type> 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

CG5-S

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 <R type> <R type> 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

HRX-OM-W058

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-W058 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

S Couplers Series KK/KKH/KK13

KKA9S-10M -12M -14M KKA3S-01M-1 -02M-1 -03M-1 KKA4S-02M-1 -03M-1 -04M-1 KKA6S-03M-1 -04M-1 -06M-1 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 1/8 1/8 1/4 1/4 With check valve 1/2 1/2 3/4 3/4 1 1 Without check valve 1 1

Table of Contents

1 Drain q r e w t i u y o !0 !

Air Fittings & Tubing

(mm) 8 6 4 Connection thread Model 10 12 Male connector KSH KXH M5 X 0.8 M6 X 1.0 1 8 R(PT) R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 Male elbow KSL KXL M5 X 0.8 M6 X 1.0 R(PT) 1 8 R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 Precautions Be sure to read before handling.

High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Micro Mechanical Valve Series VM1000

(R) 1 (P) Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 13 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

Table of Contents

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

HRX-OM-X027

fluid temperature [] 50Hz 60Hz Fig 9.5-1 Heating capacity(HRS050-A-20-R) HRS-R Series 9.4 Cooling capacity 9-7 HRX-OM-X027 Chapter 9 Documents 9.6 Pump capacity Fig 9.6-1 Pump capacity(HRS050--20-R) 9.6 Pump capacity HRS-R Series 9-8 HRX-OM-X027 Chapter 9 Documents 9.7 Compliance This system conforms to the following standards.

Shock Absorbers and Rate Controls

(SMAII BORE} UFM10 x t ) UF r/220 uF s/16 18 + UF I-72 [ ' Dtr_ C l' I j rIl l l T F I r H o .L 8 a.22 & _l -! g.3t g 1 R r I -1 .2( 20 F G (otolog llo.

VM

insertion of R thread Connection thread R Model H 2(A) 1(P) Effective area (mm2) L1 L2 L3 L4 L5 L6 Q B Weight (g) 1(P) R 2(A) 2(A) R 3(R) VHK R-01S-01S 18 41 65.2 32.6 32.6 16.5 3.5 11 57 30 8.6 1.2 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 VHK R-02S-02S 18 41 78 39 39 16.5 3.5 11 66 47 9.7 1.2 VHK R-03S-03S 22 46 88.6 44.3 44.3 21.5 4 14 76 72 16.1 3.2 VHK R-04S-04S 22 46 97.4 48.7 48.7 21.5 4 14

Modular F.R.L. Units

Applicable Model Applicable Model Model AF20-A AF30-A AF40-A AF40-06-A AF50-A AF60-A Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Model AF30-A AF40-A AF40-06-A AF50-A AF60-A Port size 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 30 AF A X425 2 03 B 30 AF A 2 03 B X430 q w t y e r For high pressure q w y e r t Semi-standard: Select one each for a to c.

I

(V) 5 1.5 0.7 3 2.5 1.3 AC125 0.1 AC250 0.8 1.5 2 0.5 1 3 DC30 4 2 3 3 0.1 DC125 0.05 0.4 0.05 0.4 Insulation Resistance 100 M@ 500V (DC) *High Inrush Circuits D I M E N S I O N S P N E U M AT I C P R E S S U R E S W I T C H: S E R I E S IS3000 H O W T O O R D E R P N E U M AT I C P R E S S U R E S W I T C H: S E R I E S IS3000 IS3 0 C O N N E C T I O N L A M P 0 Rc(PT) 1/ 4 1 Flange No

AS

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard Universal type 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 01 02 03 04 Applicable tubing O.D.

EX120/121/122

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 US C R C US US C R R R R R R R US C US C US C US C US C US C TYPE1 SERIAL NO.

3 Port Solenoid Valve/

M12 connector pin number Wiring specication y t r q e y t w w r w q e y e q t r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) X X 1(P) 21 Safety Standard ISO13849-1 Certied 3 Port Solenoid Valve/ Residual Pressure Release Valve with Detection