Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079)

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079)

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 4 (Cassette Type Full MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079)

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079)

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079)

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079)

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079)

Body Class: 3 (Orifice Diameter ø8), Valve Type: 0 (Normally Closed), Applicable Tube OD: 07 (1/4), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 2 (By-pass)

Body Class: 3 (Orifice Diameter ø8), Valve Type: 0 (Normally Closed), Applicable Tube OD: 11 (3/8), Port B OUT: Ports A & B Same Size, Pilot Port: N (Body Class 3, 4, 5, 6 - NPT 1/8"), Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 2 (By-pass)

Body Class: 3 (Orifice Diameter ø8), Valve Type: 2 (Double Acting), Applicable Tube OD: 07 (1/4), Port B OUT: Ports A & B Same Size, Pilot Port: N (Body Class 3, 4, 5, 6 - NPT 1/8"), Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 2 (By-pass)

Body Class: 3 (Orifice Diameter ø8), Valve Type: 2 (Double Acting), Applicable Tube OD: 11 (3/8), Port B OUT: Ports A & B Same Size, Pilot Port: N (Body Class 3, 4, 5, 6 - NPT 1/8"), Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 2 (By-pass)

Body Class: 4 (Orifice Diameter ø10), Valve Type: 0 (Normally Closed), Applicable Tube OD: 13 (1/2), Port B OUT: Ports A & B Same Size, Pilot Port: N (Body Class 3, 4, 5, 6 - NPT 1/8"), Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 2 (By-pass)

Body Class: 3 (Orifice Diameter ø8), Valve Type: 0 (Normally Closed), Applicable Tube OD: 06 (ø6), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 2 (By-pass)

Body Class: 3 (Orifice Diameter ø8), Valve Type: 0 (Normally Closed), Applicable Tube OD: 07 (1/4), Port B OUT: Ports A & B Same Size, Pilot Port: N (Body Class 3, 4, 5, 6 - NPT 1/8"), Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 2 (By-pass)

Body Class: 3 (Orifice Diameter ø8), Valve Type: 0 (Normally Closed), Applicable Tube OD: 11 (3/8), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 2 (By-pass)

Body Class: 5 (Orifice Diameter ø16), Valve Type: 0 (Normally Closed), Applicable Tube OD: 19 (Rcø19, NPT 3/4"), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 2 (By-pass)

Flow Range: 40 (4~40 l/min), Tube Size: 19 (3/4), Output Specification: 2 (Pulse Output + Analog Output (4~20mA))

Flow Range: 20 (1.8~20 l/min), Tube Size: 13 (1/2), Output Specification: 2 (Pulse Output + Analog Output (4~20mA))

Flow Range: 04 (0.4~4L/min), Tube Size: 11 (3/8), Output Specification: 2 (Pulse Output + Analog Output (4~20mA))

Type: 3 [Standard, 100 â„“/min (ANR)], Port Size: 2 (Rc1/4), Digital Flow Switch: Without Digital Flow Switch, Regulator: R1 (w/Regulator+Pressure Outlet Port Assembly), ON/OFF Valve: V (With Air Operated), Restrictor: S (With Restrictor), Filter: F (With Filter)