VFRA3000

1 5 Port Air Operated Valve Series VFRA3000 How to Order SA 02 VFRA3 11 2 VA SA Thread type (Including pilot port) Function VA Nil Rc 2 position single 1 2 3 4 3 position exhaust center F N T 2 position double G NPT NPTF 3 position closed center VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258

VZA2000

Nil T F Rc NPTF, NPT G Caution 3 position closed center 3 position exhaust center Refer to pages 5-11-2 to 5-11-6 for Safety Instruction and Solenoid Valve Precautions. 5-3-1 2 Series VZA2000 Dimensions: Body Ported 2 position single: VZA2121-M5 2 position double: VZA2221-M5 2-2.8 mounting hole 2-2.8 Mounting hole Pilot port (A side) M5 x 0.8 Pilot port (A side) Pilot port (B side) 2-2.8

VHK

44.3 47.7 51 68 1 4 3 8 1 2 17 19 72 70 12 22 46 76.3 31.5 44.8 21.5 4 21.8 14 17.5 3.2 63 70 VHK-B2A 49 17 1 30 25 21.5 31 VHK-12F-02S VHK-12F-03S VHK-12F-04S 77.3 80.2 45.8 48.7 64 71 72 22 70 1 4 3 8 1 2 3 port valve Reference dimensions after insertion of R thread. 1(P)/2(A): Male Thread Effective area (mm2) Connection thread R Model Bracket mounting dimensions S (Width across flats) T

Size: 7 (Body Size 7), Style: 0 (Standard Formula), Operation: 1 (External Pilot Solenoid), Port Size: 12 (1+1/4), Thread: T (NPTF), Voltage: 3 (110VAC 50/60HZ), Lead Wire: T (Conduit Terminal), Surge Suppressor: Z (Light+Surge Suppressor)

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Magnetically Coupled Rodless Cylinder / Low Profile And High Precision Guide Series CY1F

Cylinder / Low Profile And High Precision Guide Series CY1F 10,15,25 ll ll l h l pact mpact pact mp m ler overall length ler overall length ller overall length ll ll 29% reduction in height 29% reduction in height 2 29% reduction in height Overall length reduced 31% Ove Ove O 31% 31% 31% CY1F MY2H CY1H CY1F Height mm CY1H 10 15 25 Series CY1F CY1H 28 34 46 46 63 39.5 Overall length mm h i h h t

Stainless Steel One-touch Fittings Series KG

Weight (g) M T(M) L Part No. Nylon Urethane 4 KGE06-00 KGE04-00 26 33 52 70 KGE08-00 KGE10-00 5.6 13.1 18.0 29.5 5.6 13.1 26.1 41.5 14 32.5 16 17 34.5 17 19 38 18.5 24 42.5 21 M12 1 M14 1 M16 1 M20 1 M22 1 44 22 58.3 46.1 90 KGE12-00 23 13 15 17 21 6 8 10 12 27 16 32 M28 1.5 51 25 113 (96) 115 KGE16-00 29 Note) ( ): Values for soft nylon.

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

A and C Corrected air flow = 350 (0.75 x 1.00) = 467 l/min (ANR) 3 Based on condition t, B and C Corrected air flow = 1200 (0.95 x 0.90) = 1400 l/min (ANR) 3 Based on condition y; IDUS4E is selected as the model to process an air flow larger than 467 l/min (ANR) with a 50Hz power supply, according to data D-1.

Rotary One-touch Fittings Manifold Series KM

Thead NPT T Applicable tube O.D. F (inch) Part No.

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 SGDE servo pack R U V 2 1MC M T 3 W 1CN 4 150 1 2 3 4 5 6 PULS PULS SIGN SIGN CLR CLR Be sure to ground.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 E 14.6 20 24 29 35 40 52 EY 39.5 45.5 53.5 67 83 106 129 EB 30 32 38 50 57 66 77 EC 5.8 5.8 6.5 8.5 10 14 14 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 F 4 4 6 6 6 6 6 T 6 6

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

1 q t i PF2D540 o !0 u !0 !2ywr e !1 q t i Series PF2D For Deionized Water and Chemicals Digital Flow Switch Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuits and wiring examples 60 70 176 z to , are terminal numbers.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

By comparing this average pressure value with the set pressure value, switch output (ON//OFF) is determined. t (ms) t (ms) Time Switch output operation when normal ON OFF Time Switch output operation when anti-chattering function is used.

Series KG Stainless Steel One-touch Fittings

Weight (g) M L T(M) Part No. Nylon Urethane 4 KGE06-00 KGE04-00 26 33 52 70 KGE08-00 KGE10-00 5.6 13.1 18.0 29.5 5.6 13.1 26.1 41.5 14 32.5 16 17 34.5 17 19 38 18.5 24 42.5 21 13 15 17 21 M12 1 M14 1 M16 1 M20 1 M22 1 44 22 58.3 46.1 90 KGE12-00 23 6 8 10 12 27 16 32 M28 1.5 51 25 113 (96) 115 KGE16-00 29 Note) ( ): Values for soft nylon.

Self-seal Fittings Series KC

Mounting hole T (M) Part No. Nylon Urethane L1 L2 M 1 4 1 4 3 8 3 8 3 8 KCE04-02 KCE06-02 KCE08-03 KCE10-03 KCE12-03 2.6 32 36 42 79 105 2.6 6.8 16.2 25.6 35.4 M12 1 M14 1 M16 1 M20 1 M22 1 40.5 42.7 49.4 53.9 56.1 14 17 19 24 27 17 17 19 22 24 14.7 14.7 15 14.2 13.7 13 15 17 21 23 18 19 21.5 24 25.5 6.8 13.1 20.4 30.4 Straight: KCH Applicable tube O.D.

Air Cylinder Series MB

Features 2 Air Cylinder/Single Rod Series MB 32, 40, 50, 63, 80, 100, 125 How to Order Standard MB L 32 50 50 L 32 Y7BW MDB With auto switch Number of auto switches Built-in magnet S 3 n 2 1 3 n Auto switch Mounting Without auto switch Basic/Without bracket Axial foot Front flange Rear flange Single clevis Double clevis Center trunnion B L F G C D T Bore size Refer to table below for

Series LX Construction and Mounting

T-slots l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) LXP M5 x 0.8 7.4 8.5 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body.

Clean Room Regulator/Fluoro Resin Type Series SRF30

Construction Tubing Integral fittings e y t e t i r y !6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Q P R O D U C T S Q Q Q Q Q Q 3 Q Q 3 Port 100/200/300 Series VQZ Base Mounted & Body Ported High speed and Long life. Response time Life VQZ100 10ms VQZ200 12ms 200 million cycles VQZ300 15ms Dispersion accuracy 2ms * Life: Metal seal type * Response time: Metal seal, single solenoid with light and surge voltage supressor.