Oscillation Angle A: [90°] 90°, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001, Format: With external stopper, Patterning: Standard product, Size: 05, Connection

Oscillation Angle A: [90°] 90°, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001, Format: With external stopper, Patterning: Standard product, Size: 05, Connection

Oscillation Angle A: [90°] 90°, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001, Format: With external stopper, Patterning: Standard product, Size: 05, Connection

Oscillation Angle A: [90°] 90°, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001, Format: With external stopper, Patterning: Standard product, Size: 05, Connection

Oscillation Angle A: [90°] 90°, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001, Format: With external stopper, Patterning: Standard product, Size: 05, Connection

Oscillation Angle A: [90°] 90°, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001, Format: With external stopper, Patterning: Standard product, Size: 05, Connection

Oscillation Angle A: [180°] 180°, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001, Format: With external stopper, Patterning: Standard product, Size: 05, Connection

Oscillation Angle A: [180°] 180°, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001, Format: With external stopper, Patterning: Standard product, Size: 05, Connection

Oscillation Angle A: [180°] 180°, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001, Format: With external stopper, Patterning: Standard product, Size: 05, Connection

Oscillation Angle A: [180°] 180°, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001, Format: With external stopper, Patterning: Standard product, Size: 05, Connection

Oscillation Angle A: [180°] 180°, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001, Format: With external stopper, Patterning: Standard product, Size: 05, Connection

Oscillation Angle A: [180°] 180°, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001, Format: With external stopper, Patterning: Standard product, Size: 05, Connection

Oscillation Angle A: [180°] 180°, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001, Format: With external stopper, Patterning: Standard product, Size: 05, Connection

Oscillation Angle A: [180°] 180°, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001, Format: With external stopper, Patterning: Standard product, Size: 05, Connection

Oscillation Angle A: [180°] 180°, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001, Format: With external stopper, Patterning: Standard product, Size: 05, Connection

Rated Flow Range: 05 (0.05 to 5 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C4 (ø4), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible with Argon and Carbon Dioxide

Tank Capacity: 05 (5 L), Material: S (Stainless Steel)

Model: 2 (SGC200), Valve Type: 1 (Normally Closed), Seal Material: A (NBR), Pressure Range: 05 (0 to 0.5 MPa), Thread: N (NPT), Port Size: 15 (1/2), Pilot Valve: Y (0.35 W Type, V116), Voltage: 5 (24 VDC), Electrical Entry: W (M12 Connector, 4-pin Type), Surge Suppressor: Z (With Light and Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Bracket Mounting Position: B2 (Bracket

Stations: 05 (5 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Switch: 5 (Remote Sensor Unit), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: Flow Adj.

Stations: 05 (5 Stations), Systems, Port Combinations: AN [Ejector System, ø5/16" (Common PV)], Exhaust: 1 (Complex Exhaust), SI unit prefix: S (SI unit for EX260 or EX500), SI Unit: A3N (EX500, Gateway decentralized system 2, 32 outputs, M12), EX600 Output Polority, End Plate Type: Nil (without SI Unit, or not EX600), EX600, I/O Unit Stations: Nil (without I/O stations, or not EX600), Option