Exhaust Cleaner for Clean Rooms AMP Series 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.
Model AMG250 AMG350 AMG450 AMG550 AMG650 AMG850 AMG150 (1) Flow rate (l /min (ANR)) 750 1500 2200 3500 6000 12000 300 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 3/4, 1 1, 11/2 11/2, 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow is at 0.7MPa. Max. flow depends on operating pressure.
Instance attribute ID Access rule Description Value 1 Get/Set 1 MAC ID 0-63 2 Get/Set 1 Baud Rate 0-2 3 Get/Set BOI 0-1 4 Get/Set Bus-off Counter 0-255 5 Get Allocation Information 6 Get MAC ID Switch Changed 0-1 7 Get Baud Rate Switch Changed 0-1 8 Get MAC ID Switch Value 0-63 9 Get Baud Rate Switch Value 0-2 10 Set Quick Connect 0-1 1: Set is available in SW mode. -16No.EX-OMO0004-D 3-4
Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.
Metric size Inch size 06 08 10 12 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Universal Port size Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 With One-touch
211 277 321 B 260 298 366 432 T 9 9 11 11 S 8 7 10 15 R 78 97 98 115 P 50 35 45 46.5 AL 1 4, 3 8 1 4, 3 8 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 103 121 131 161 10 10 70 70 264 302 370 436 100 120 130 160 180 210 246 290 AMR3000 AMR4000 AMR5000 AMR6000 1 4, 3 8, 1 2 1 4, 3 8, 1 2 1 2, 3 4 1 2, 3 4 3 4, 1 3 4, 1 Adapter
No.RS2H-OM0045PC / RS2H (5080) P.2 1. P.4 1-1. 1-2. 1-3. 1-4. 2. P.5 3. P.8 3-1. 3-2. 3-3. 3-4. 3-5. 3-6. 3-7. 4. P.12 5. P.12 6. P.13 6-1. 6-2. 6-3. 6-3-1. 6-3-2. 6-3-3. 6-3-4. 6-4. 6-4-1. 6-4-2. 7. P.17 7-1. 7-2. 7-3. 7-3-1.D-M9/A9 7-3-2.D-P3DW 8. P.20 8-1. 8-2. 9. P.21 10.
Model Port size 4 6 8 10 12 ASD One-touch fittings for AS121-M5 AS221-01 AS221-02 AS321-02 AS321-03 AS421-04 M5 x 0.8 AS 1 8 R metal body specifications 1 4 R AS-FE 1 4 Uses flame resistant resin as standard. (UL standard V-0) R 3 8 R KE 1 2 R Note 1) : Brass parts are electroless nickel plated, provided as standard.
1 2 E2 E3 E4 E6 E10 None With pressure switch S None Adapter assembly 4 3 1/4 3/8 1/2 3/4 1 AMR3000/4000 AMR3000/4000 AMR4000/5000 AMR5000/6000 AMR6000 1 standard Port size Thread Thread Symbol Port size Applicable model N F Rc (PT) NPT G (PF) Rc(PT) NPT G(PF) N F 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter ass'y is same as the port size of the body.
5<3'95 % A " 8 " $ )% % 8 % =) *% $ ) 2% 8 % " 1 ,% 2 % ) .BB & A & 1% % $) $ ) ) ) ) ) 88 % ,) ; ' ; 8 1 ) /% ) / , A & 1% % '$ , $ 3 :; C $ 1 ,) ; ' ; ) ) ) ) 88 % /% ) / VQD VKF .$ VK VT VS t o r e q y u i w & q w e r t y u & D % % ' % % ' % % ! ! ! , !%,' ? !2! 8 % 8 % ? ( , 0( , = ) % $ B /EB3A /EB '!'
24. 1) 2) 3) 1) 2) 1.5~2 2 2. 2-5. ,AS 8 2-6. 2-6-1.
Temperature drift: +/0.2C Stability: +/0.01 to 0.03 C source. 2500 2500 Facility water temp. 10deg.C 1-2 Unused After identifying a problem be sure to check the cause and take Facility water temp. 20deg.C Accuracy related to temp 2000 2000 Cooling capacity W 3-5 PT-RTD 8 1 Cooling capacity W necessary countermeasures before turning on the power.
Heavy load Standard load Medium load Light load 1 10 50 100 200 1 0.25 0.49 0.98 1.96 2 20 2 0.49 75 200 400 0.74 1.47 2.94 3 30 3 0.74 100 300 600 0.98 1.96 3.92 4 40 125 400 800 4 0.98 1.23 2.45 4.90 5 50 5 1.23 150 500 1000 1.47 2.94 5.88 6 75 200 600 1200 6 1.47 1.96 3.92 7.84 7 100 250 700 1400 7 1.72 2.45 4.90 9.80 8 300 300 800 1600 8 1.96 2.94 5.88 11.76 9 500 500 900 1800 9 2.21
9 Rod seal NBR Basic (B) CM2QB Bore size Stroke (mm) Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 S 65 65 67 91 N 15 15 15 21.5 Bore A 18 22 22 24 B2 26 32 32 41 D 8 10 12 14 H2 8 8 8 10 I 28 33.5 37.5 46.5 ZZ 119 123 125 157 NA 24 30 34.5 42.5 AL 15.5 19.5 19.5 21 E F 13 13 13 16 K 5 5.5 5.5 7 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 B1 13 17 17 22 G 8 8 8 11 MM M8 X 1.25 P 1/8 1/8 1
RB RA RC RF RE RD RJ SC SB SA Model MIS20-30 MIS20-20 MIS20-10 MIS12-30 MIS12-20 MIS12-10 8 6 6 M5 x 0.8 14 18 1.8 2.5 8 24 22.5 12 34 26 2.2 4 12 9 M8 x 1 10.5 11 Series MIW/MIS Auto Switch Mounting When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the bottom.
Therefore, it must be readjusted to obtain the angle that suits your application. 1.5-10 Rotary Cylinder Series MRQ Construction/Parts List CRB1 CRBU CRA1 CRQ MRQ MSQ MSUB Component Parts Component Parts Note No. #4 #5 #6 #7 #8 #9 $0 $1 $2 $3 $4 $5 $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 Description Note Anodized Anodized Description Piston packing Cushion packing O ring O ring O ring O ring
(mounting hole) With supply valve (N)ZL112-K2L-E25 (L) P Blank plate assembly (SYJ500-10-2A) P V V RESETSET Supply valve Circuit diagram + MULTISTAGE EJECTOR 9 Series (N)ZL Multistage Ejector Standard How to Order 12 N ZL2 Port Size Air Supply Port Vacuum Port 1/8 PT 3/4 PT 1/8 NPT 3/4 NPT Nil N Lead wire length 0.5m 2.9m Nil L 1.2mm 12 Nozzle diameter With vacuum pressure gauge Exhaust
0 Cushion Rubber bumper Thread tolerance JIS class 2 1/8 1/4 Port size (Rc,NPT,G) Standard Strokes Auto switch mounting bracket/Part No.
L1 L2 A (2) L3 H (1) T2 T1 D1 D2 Model ASR ASQ AS1200-M3 M3 x 0.5 M3 x 0.5 4.5 6.6 23.5 21.5 8 5 5 20.5 18.5 AS120-M5 M5 x 0.8 M5 x 0.8 8 10 28.3 10.3 9 9 25 22.2 25.5 AS120-U10/32 10-32UNF 10-32UNF AS220-01 30.5 13.2 14.3 14.6 32.4 27.4 12 (12.7) 18 35.5 1/8 1/8 AS220-02 35.3 17.5 18 19.5 34.8 29.8 17 (17.5) 27.2 40.3 1/4 1/4 AS320-03 40.8 19.7 22.5 24.3 40.6 35.6 19 30 45.8 3/8 3/8 AS420