Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Full MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Model: 1000 (SV1000), Disk Type: 2A (EXH Block Disk - Exhaust)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)

Model: 2000 (SV2000), Disk Type: 2A (EXH Block Disk - Exhaust)

Part Number Description: NUT MOUNTING   Product Line: V   Product Line Description: VALVE   Click here to report information errorImage shown may not match exact part number

Valve Stations: 3 Stations, Port Size: 03 (3/8), Thread: T (NPT/NPTF), SI Unit: WS (Wireless Remote Unit), End Plate Type: 2 (M12 Connector Power Supply, Max Supply Current 2A), SI Unit COM: N (-COM)

Valve Stations: 2 Stations, Port Size: N9 (ø5/16" One-touch Fitting), Thread: N (NPT), SI Unit: Q (DeviceNetâ„¢), End Plate Type: 2 (M12 Connector Power Supply, Max Supply Current 2A), SI Unit COM: N (-COM)

Valve Stations: 2 Stations, Port Size: C8 (ø8 One-touch Fitting), Thread: Rc, SI Unit: V (CC-Link), End Plate Type: 2 (M12 Connector Power Supply, Max Supply Current 2A)

Valve Stations: 4 Stations, Port Size: C6 (ø6 One-touch Fitting), Thread: F (G), SI Unit: WS (Wireless Remote Unit), End Plate Type: 2 (M12 Connector Power Supply, Max Supply Current 2A), SI Unit COM: N (-COM)

Valve Stations: 6 Stations, Port Size: 03 (3/8), Thread: Rc, SI Unit: V (CC-Link), End Plate Type: 2 (M12 Connector Power Supply, Max Supply Current 2A), SI Unit COM: N (-COM)

Valve Stations: 2 Stations, Port Size: 03 (3/8), Thread: Rc, SI Unit: Q (DeviceNetâ„¢), End Plate Type: 2 (M12 Connector Power Supply, Max Supply Current 2A), SI Unit COM: N (-COM)

Valve Stations: 3 Stations, Port Size: C8 (ø8 One-touch Fitting), Thread: Rc, SI Unit: V (CC-Link), End Plate Type: 2 (M12 Connector Power Supply, Max Supply Current 2A)

Valve Stations: 4 Stations, Port Size: 03 (3/8), Thread: T (NPT/NPTF), SI Unit: Q (DeviceNetâ„¢), End Plate Type: 2 (M12 Connector Power Supply, Max Supply Current 2A), SI Unit COM: N (-COM)