SMC Corporation of America
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Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications 6 10 Bore size (mm) Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Piston speed Cushion Stroke adjustable range Port size Air (Non-lube) Size Suction flow rate L/min (ANR) 6 10 1.05 MPa 7 15 0.7 MPa 0.15 MPa 0.1 MPa 10C to 60C (No freezing) 30 to 400 mm/s Rubber bumper

pressure 0.3 MPa 5.0 Inlet pressure 0.3 MPa 3.0 Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 2.5 4.0 2.5 Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa 2.0 Inlet pressure 0.5 MPa 2.0 3.0 1.5 1.5 2.0 1.0 1.0 1.0 0.5 0.5 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0.0 Inlet pressure 0.7 MPa 0.0 0.0 0 5 6 7 8 1 2 3 4 2 1 3 4 5 6 7 8 9 10 11 12 0 2 4 6 8 1 3 5 7 9 10 12 14 11 13 15

VA, DC: 15 W Contact point construction: 1a, 1b Maintenance space Float switch Part no.

AMV 15 20 Creates a comfortable work-ing environment without greasy fumes. Port size Exhaust cleaner for vacuum pump 10 14 20 30 40 R1 R1 R2 80 (3B) JIS 10K FF flange 1 2 Captures and separates 99.5% of even low-flow and highly concentrated greasy fumes. Using the AMV series, greasy fumes cannot be visibly recognized in the exhaust from the vacuum pump.

1 VBA VBAT 7 9 AP100 Material Note Component Parts 14 4 Description Body Valve guide Bonnet Piston Valve Adjusting screw Panel nut Hexagon nut Adjusting spring Valve spring Spring holder Mini Y-seal O-ring Lock washer Bracket Pressure gauge Cassette No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Aluminum alloy Brass Brass POM Brass Iron Iron Iron Steel wire Stainless steel Steel band NBR

Flash Operating voltage 24 VDC +20%/-15%, Class 2 1 ON US2 [US3, US4 .. etc] is present (> approx. 22.8 VDC). Detected: < approx. 20.4 VDC Cancelled: > approx. 21.6 VDC 3 : If the US2 power supply is not present or below the dropout level, the SF LED will also flash and the error code "0x01F1" will be generated.

I/O monitor(I/O ) 15 2. Diagnosis Data() 24 3. Sys. Configuration() 27 4. Parameter Setting() 33 5.

Doc.No.LFE*-OMZ0012 Product Name Electromagnetic Digital Flow Switch Remote Type Model/ Series/ Product Number LFE#(Z) SMC Corporation Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product Parts 13 Definition and Terminology 14 Mounting and Installation 15 Installation 17 Piping Method 18 Wiring 20 Maintenance and Inspection 22 Troubleshooting 23 Specifications

The maximum operating 0 5 10 15 20 25 30 ( temperature for the valve is 150oC. If the heater temperature is over 200oC or valve temperature is Time (sec.) Duration of the inrush current flow (as a guide) over 150oC, please use thermostat to control the heaters to prevent overheating.

40 800/50 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 XLA-63-2 XLA-80-2 AC90240V XL1A25-60S-2 XL1A25-60S-3 1 1 H4 AC100V 400/100 600/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15

(9)(11)(12)(13) (14)(15)(16)(17) FGD-CA003 FGDT,F(L500) L500 (18) FGD-CA004 FGDC,E(L250) FGD-CA005 FGDC,E(L500) 7/11 FGX-OM-L007-C 2. 2.

(1) (2) (3) (4) (5) (6) OUT1 (1)OUT1OUT2 (2)+(3) (4)/ () (5)IP8000(2) (6)IP8100(3) 15 7-1 5 O K O O K K (1) 0% (4mAD (1) 0% (4mAD C) C) (2) 100%(20 (2) 100%(2 mADC) 0mADC) (3) 0%(1) (3) 0%(1) (4) (4) 16 7-2 / () mADC 17 18 18OUT1OUT2A 1718 ( 1/16-1 ) 11-1(/) 7-3 A 1M1/8OUT117 1/8 1/81/4 2A(17) SUPOUT1 A 17 8.

For detailed description of the signals, refer to the following pages. 15 (2) Internal circuit (Numbers in brackets indicates the pin numbers) (5) PWR_DC24V LF (6) PWR_GND Output signal GND (9) CTR (10) CYL (11) VAL (16) RF (17) PWR Max.

No.PS-OMS0004CN-D // PSE570/573/574 2 8 9 10 10 14 15 15 17 -1No.PS-OMS0004CN-D (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety

With across flat of the guide bolt and tightening torque Width across flats Tightening torque (Nominal) (Nm) 10 1.5 0.27 16 2 0.54 20 2.5 0.95 25 3 2.25 0.2mm Gap gauge 0.2mm Surface plate 15 - 3-4.

6. 7. 11 - 3-2. 1025 Nm 10 1.5 0.27 16 2 0.54 20 2.5 0.95 25 3 2.25 Assy O O O NC () NO O C Assy Assy 12 - 32,40 Assy Nm 32 3 1.37 40 4 2.84 Nm 32 2 1.37 40 2.5 2.84 NC () Assy NO O C 13 - 3-3.Assy 1025 (1)Assy 2 (2),0.2mm , , () Nm 10 1.5 0.27 16 2 0.54 20 2.5 0.95 25 3 2.25 0.2mm 0.2mm 14 - 3-4. 1025 (1)Assy (2) (3) (4) (5)Assy O Assy :GR-S-010(10g) O C 15

MH*-OMM0057 MHL2-10D* MHL2-16D* MHL2-20D* MHL2-25D* MHL2-32D* MHL2-40D* 1. 23 2. 4 3. 3-1 5 3-2 5 3-3 5 3-4 67 3-5 8 3-6 9 3-7 1012 3-8 13 4. 4-1 13 4-2 14 4-3 15 4-4 16 1 - *1) (ISO/IEC) (JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment

No.MH*-OMZ0003 / / JMHZ2-16D-X7400B-TM . 2 1. . 4 2. . 5 3. . 6 3-1. . 6 3-2. . 7 3-3. . 8 3-4. . 9 3-5. () . 10 3-6. . 11 3-7. . 12 4. . 13 4-1. . 13 4-2. 3 . 14 4-3. . 15 5. . 16 5-1 . 16 5-2. . 16 5-3.

JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 (mm) 10 3 4M40.7 8 3.4 8 2 14 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% (W) 0.4 [0.40.1] P .1367 LED 300 15 - 4-3.

9 Rod seal NBR Basic (B) CM2QB Bore size Stroke (mm) Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 S 65 65 67 91 N 15 15 15 21.5 Bore A 18 22 22 24 B2 26 32 32 41 D 8 10 12 14 H2 8 8 8 10 I 28 33.5 37.5 46.5 ZZ 119 123 125 157 NA 24 30 34.5 42.5 AL 15.5 19.5 19.5 21 E F 13 13 13 16 K 5 5.5 5.5 7 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 B1 13 17 17 22 G 8 8 8 11 MM M8 X 1.25 P 1/8 1/8 1